Patent | Date |
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Signal-carrying flexure structure for micro-electromechanical devices Grant 7,612,423 - Yao November 3, 2 | 2009-11-03 |
Method for fabricating microelectromechanical system (MEMS) devices Grant 7,346,981 - Borwick, III , et al. March 25, 2 | 2008-03-25 |
Signal-carrying flexure structure for micro-electromechanical devices App 20070046141 - Yao; Jun J. | 2007-03-01 |
Microelectricalmechanical system with improved beam suspension Grant 7,049,806 - Herbert , et al. May 23, 2 | 2006-05-23 |
Microelectricalmechanical system with improved beam suspension App 20050040808 - Herbert, Patrick C. ;   et al. | 2005-02-24 |
Microelectromechanical system (MEMS) with improved beam suspension Grant 6,803,755 - Herbert , et al. October 12, 2 | 2004-10-12 |
Microelectromechanical system (MEMS) devices and fabricating methods App 20040113513 - Borwick, Robert L. III ;   et al. | 2004-06-17 |
Process for manufacture of micro electromechanical devices having high electrical isolation Grant 6,617,657 - Yao , et al. September 9, 2 | 2003-09-09 |
Micro electromechanical isolator Grant 6,417,743 - Mihailovich , et al. July 9, 2 | 2002-07-09 |
Microelectromechanical system with improved beam suspension App 20020070723 - Herbert, Patrick C. ;   et al. | 2002-06-13 |
Integrated tunable high efficiency power amplifier Grant 6,232,841 - Bartlett , et al. May 15, 2 | 2001-05-15 |
Trimmable singleband and tunable multiband integrated oscillator using micro-electromechanical system (MEMS) technology Grant 6,232,847 - Marcy, 5th , et al. May 15, 2 | 2001-05-15 |
Process for manufacture of micro electromechanical devices having high electrical isolation Grant 6,159,385 - Yao , et al. December 12, 2 | 2000-12-12 |
Frequency synthesizer using micro electro mechanical systems (MEMS) technology and method Grant 6,094,102 - Chang , et al. July 25, 2 | 2000-07-25 |
Method of fabricating suspended single crystal silicon micro electro mechanical system (MEMS) devices Grant 6,074,890 - Yao , et al. June 13, 2 | 2000-06-13 |
Integrated passive transceiver section Grant 6,049,702 - Tham , et al. April 11, 2 | 2000-04-11 |
Tunable-trimmable micro electro mechanical system (MEMS) capacitor Grant 5,959,516 - Chang , et al. September 28, 1 | 1999-09-28 |
Monolithically integrated switched capacitor bank using micro electro mechanical system (MEMS) technology Grant 5,880,921 - Tham , et al. March 9, 1 | 1999-03-09 |
Integrated tunable inductance network and method Grant 5,872,489 - Chang , et al. February 16, 1 | 1999-02-16 |
Integrated variable gain power amplifier and method Grant 5,834,975 - Bartlett , et al. November 10, 1 | 1998-11-10 |
Micro electromechanical RF switch Grant 5,578,976 - Yao November 26, 1 | 1996-11-26 |
Methods of fabricating integrated, aligned tunneling tip pairs Grant 5,449,903 - Arney , et al. September 12, 1 | 1995-09-12 |
Transistor microstructure Grant 5,397,904 - Arney , et al. March 14, 1 | 1995-03-14 |
Methods of fabricating integrated, aligned tunneling tip pairs Grant 5,235,187 - Arney , et al. August 10, 1 | 1993-08-10 |
Multi-dimensional precision micro-actuator Grant 5,179,499 - MacDonald , et al. January 12, 1 | 1993-01-12 |