| Patent | Date |
|---|
Apparatus For Increasing Flux From An Ampoule
App 20210308703 - Choi; Kenric ; et al. | 2021-10-07 |
Apparatus for depositing metal films with plasma treatment
Grant 11,133,155 - Yao , et al. September 28, 2 | 2021-09-28 |
Semiconductor Cleaning Equipment And Method For Cleaning Through Vias Using The Same
App 20210296115 - YAO; Daping ; et al. | 2021-09-23 |
Apparatus for increasing flux from an ampoule
Grant 11,059,061 - Choi , et al. July 13, 2 | 2021-07-13 |
Apparatus and methods to remove residual precursor inside gas lines post-deposition
Grant 10,752,990 - Yao , et al. A | 2020-08-25 |
Gas feedthrough assembly
Grant 10,640,870 - Yao , et al. | 2020-05-05 |
Methods to fill high aspect ratio features on semiconductor substrates with MOCVD cobalt film
Grant 10,600,685 - Yao , et al. | 2020-03-24 |
Apparatus For Depositing Metal Films With Plasma Treatment
App 20200020509 - YAO; DAPING ; et al. | 2020-01-16 |
Apparatus for depositing metal films with plasma treatment
Grant 10,453,657 - Yao , et al. Oc | 2019-10-22 |
Methods for pre-cleaning conductive materials on a substrate
Grant 10,283,345 - Xie , et al. | 2019-05-07 |
Apparatus for Increasing Flux from an Ampoule
App 20180250695 - Choi; Kenric ; et al. | 2018-09-06 |
Methods To Fill High Aspect Ratio Features On Semiconductor Substrates With Mocvd Cobalt Film
App 20180151424 - YAO; DAPING ; et al. | 2018-05-31 |
Apparatus For Depositing Metal Films With Plasma Treatment
App 20180012732 - YAO; DAPING ; et al. | 2018-01-11 |
Gas Feedthrough Assembly
App 20170306488 - YAO; Daping ; et al. | 2017-10-26 |
Apparatus And Methods To Remove Residual Precursor Inside Gas Lines Post-Deposition
App 20170275754 - Yao; Daping ; et al. | 2017-09-28 |
Methods For Pre-cleaning Conductive Materials On A Substrate
App 20170098540 - XIE; Xiangjin ; et al. | 2017-04-06 |
Method and hardware for cleaning UV chambers
Grant 9,506,145 - Baluja , et al. November 29, 2 | 2016-11-29 |
Apparatus For Selectively Sealing A Gas Feedthrough
App 20160326648 - Lam; Hyman W. H. ; et al. | 2016-11-10 |
Methods for repairing low-k dielectrics using carbon plasma immersion
Grant 9,478,437 - Yao , et al. October 25, 2 | 2016-10-25 |
Method And Hardware For Cleaning Uv Chambers
App 20160296981 - BALUJA; Sanjeev ; et al. | 2016-10-13 |
Methods for pre-cleaning conductive interconnect structures
Grant 9,460,959 - Xie , et al. October 4, 2 | 2016-10-04 |
Method and hardware for cleaning UV chambers
Grant 9,364,871 - Baluja , et al. June 14, 2 | 2016-06-14 |
Selective deposition of polymer films on bare silicon instead of oxide surface
Grant 8,664,126 - Yao March 4, 2 | 2014-03-04 |
Method And Hardware For Cleaning Uv Chambers
App 20140053866 - BALUJA; Sanjeev ; et al. | 2014-02-27 |
Methods for quantitative measurement of a plasma immersion process
Grant 8,492,177 - Yao , et al. July 23, 2 | 2013-07-23 |
Methods For Quantitative Measurement Of A Plasma Immersion Process
App 20130137197 - YAO; DAPING ; et al. | 2013-05-30 |
Selective Deposition Of Polymer Films On Bare Silicon Instead Of Oxide Surface
App 20120315740 - Yao; Daping | 2012-12-13 |
Methods For Repairing Low-k Dielectrics Using Carbon Plasma Immersion
App 20120309114 - YAO; DAPING ; et al. | 2012-12-06 |
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