Patent | Date |
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Remote plasma generator using ceramic Grant 9,773,645 - Lee , et al. September 26, 2 | 2017-09-26 |
Remote Plasma Generator Using Ceramic App 20160307739 - LEE; Ja-woo ;   et al. | 2016-10-20 |
Apparatus for generating gas plasma, gas composition for generating plasma and method for manufacturing semiconductor device using the same Grant 8,083,892 - Min , et al. December 27, 2 | 2011-12-27 |
Semiconductor etching apparatus Grant 7,764,483 - Kim , et al. July 27, 2 | 2010-07-27 |
Apparatus for generating gas plasma, gas composition for generating plasma and method for manufacturing semiconductor device using the same App 20090229758 - Min; Young-Min ;   et al. | 2009-09-17 |
Apparatus for generating gas plasma, gas composition for generating plasma and method for manufacturing semiconductor device using the same Grant 7,578,944 - Min , et al. August 25, 2 | 2009-08-25 |
Methods And Apparatus For Semiconductor Etching Including An Electro Static Chuck App 20080194113 - Kim; Jin-Man ;   et al. | 2008-08-14 |
Apparatus For Depositing Thin Film And Method Of Depositing The Same App 20080095953 - LEE; Heok-Jae ;   et al. | 2008-04-24 |
Semiconductor etching apparatus App 20080066867 - Kim; Jin-Man ;   et al. | 2008-03-20 |
Photolithography System And Method App 20070297794 - PARK; Byong-Cheol ;   et al. | 2007-12-27 |
Method for generating gas plasma Grant 7,193,369 - Min , et al. March 20, 2 | 2007-03-20 |
Apparatus for generating gas plasma, gas composition for generating plasma and method for manufacturing semiconductor device using the same App 20060084269 - Min; Young-Min ;   et al. | 2006-04-20 |
Substrate manufacturing apparatus and substrate transfer module used therein App 20050220576 - Kim, Ki-Sang ;   et al. | 2005-10-06 |
Plasma chemical vapor deposition apparatus having an improved nozzle configuration App 20050092245 - Moon, Ahn-Sik ;   et al. | 2005-05-05 |
Pedestal of a load-cup which supports wafers loaded/unloaded onto/from a chemical mechanical polishing apparatus Grant 6,860,801 - Yang , et al. March 1, 2 | 2005-03-01 |
Input/output valve switching apparatus of semiconductor manufacturing system Grant 6,824,617 - Yang , et al. November 30, 2 | 2004-11-30 |
RF matching unit Grant 6,816,029 - Choi , et al. November 9, 2 | 2004-11-09 |
Method and apparatus for generating gas plasma, gas composition for generating plasma and method for manufacturing semiconductor device using the same App 20040092119 - Min, Young-Min ;   et al. | 2004-05-13 |
Method of and apparatus for use in orienting an object at a reference angle Grant 6,705,020 - Keum , et al. March 16, 2 | 2004-03-16 |
Method of and an apparatus for regulating the temperature of an electrostatic chuck Grant 6,684,652 - Kim , et al. February 3, 2 | 2004-02-03 |
Focus ring and apparatus for processing a semiconductor wafer comprising the same Grant 6,623,597 - Han , et al. September 23, 2 | 2003-09-23 |
Pedestal of a load-cup which supports wafers loaded/unloaded onto/from a chemical mechanical polishing apparatus App 20030045219 - Yang, Yun-Sik ;   et al. | 2003-03-06 |
Input/output valve switching apparatus of semiconductor manufacturing system App 20030010450 - Yang, Yun-Sik ;   et al. | 2003-01-16 |
Method of and an apparatus for regulating the temperature of an electrostatic chuck App 20020174667 - Kim, Jin-Man ;   et al. | 2002-11-28 |
RF matching unit App 20020023718 - Choi, Dae-Kyu ;   et al. | 2002-02-28 |
Semiconductor device manufacturing system having means for reducing a pressure difference between loadlock and processing chambers Grant 6,039,770 - Yang , et al. March 21, 2 | 2000-03-21 |