| Patent | Date |
|---|
Seamless gap fill
Grant 11,437,271 - Yang , et al. September 6, 2 | 2022-09-06 |
Low Resistivity DRAM Buried Word Line Stack
App 20220278108 - Yang; Yixiong ; et al. | 2022-09-01 |
Low Resistivity Metal Contact Stack
App 20220277961 - Lakshmanan; Annamalai ; et al. | 2022-09-01 |
Methods For Forming Impurity Free Metal Alloy Films
App 20220267904 - Bajaj; Geetika ; et al. | 2022-08-25 |
Treatments To Enhance Material Structures
App 20220262629 - GANDIKOTA; Srinivas ; et al. | 2022-08-18 |
Treatments to enhance material structures
Grant 11,417,517 - Gandikota , et al. August 16, 2 | 2022-08-16 |
Mosfet Gate Engineerinng With Dipole Films
App 20220254900 - Yang; Yong ; et al. | 2022-08-11 |
Amorphous Silicon-Based Scavenging And Sealing EOT
App 20220254640 - Yang; Yong ; et al. | 2022-08-11 |
Thermal Process Chamber Lid With Backside Pumping
App 20220246471 - Cui; Anqing ; et al. | 2022-08-04 |
Threshold Voltage Modulation For Gate-all-around Fet Architecture
App 20220238680 - HUNG; Steven C. H. ; et al. | 2022-07-28 |
Atomic layer deposition chamber with funnel-shaped gas dispersion channel and gas distribution plate
Grant 11,384,432 - Rasheed , et al. July 12, 2 | 2022-07-12 |
Methods for forming impurity free metal alloy films
Grant 11,359,282 - Bajaj , et al. June 14, 2 | 2022-06-14 |
Methods And Apparatus For Metal Fill In Metal Gate Stack
App 20220165852 - GANDIKOTA; Srinivas ; et al. | 2022-05-26 |
P-Type Dipole For P-FET
App 20220165854 - Lin; Yongjing ; et al. | 2022-05-26 |
Metal Based Hydrogen Barrier
App 20220157654 - Gandikota; Srinivas ; et al. | 2022-05-19 |
Thermal process chamber lid with backside pumping
Grant 11,335,591 - Cui , et al. May 17, 2 | 2022-05-17 |
Integrated Dipole Flow For Transistor
App 20220115516 - Lin; Yongjing ; et al. | 2022-04-14 |
Methods And Apparatus For Seam Reduction Or Elimination
App 20220108916 - YANG; Yixiong ; et al. | 2022-04-07 |
P-type dipole for p-FET
Grant 11,289,579 - Lin , et al. March 29, 2 | 2022-03-29 |
Pmos High-k Metal Gates
App 20220077298 - GANDIKOTA; SRINIVAS ; et al. | 2022-03-10 |
Methods For Forming Impurity Free Metal Alloy Films
App 20220049353 - Bajaj; Geetika ; et al. | 2022-02-17 |
Integrated dipole flow for transistor
Grant 11,245,022 - Lin , et al. February 8, 2 | 2022-02-08 |
Method Of Tuning Film Properties Of Metal Nitride Using Plasma
App 20210351071 - LIU; Wenyi ; et al. | 2021-11-11 |
Seamless Gap Fill
App 20210351074 - Yang; Yixiong ; et al. | 2021-11-11 |
Fluorine-doped nitride films for improved high-k reliability
Grant 11,171,047 - Yang , et al. November 9, 2 | 2021-11-09 |
Methods For Gapfill In Substrates
App 20210287900 - YANG; Yixiong ; et al. | 2021-09-16 |
Methods For Reflector Film Growth
App 20210288086 - Li; Luping ; et al. | 2021-09-16 |
Methods for gapfill in substrates
Grant 11,101,128 - Yang , et al. August 24, 2 | 2021-08-24 |
Lids And Lid Assembly Kits For Atomic Layer Deposition Chambers
App 20210246552 - RASHEED; Muhammad M. ; et al. | 2021-08-12 |
Methods and apparatus for n-type metal oxide semiconductor (NMOS) metal gate materials using atomic layer deposition (ALD) processes with metal based precursors
Grant 11,075,276 - Lin , et al. July 27, 2 | 2021-07-27 |
Method of reducing effective oxide thickness in a semiconductor structure
Grant 11,062,900 - Li , et al. July 13, 2 | 2021-07-13 |
Tuning work function of p-metal work function films through vapor deposition
Grant 11,018,009 - Jian , et al. May 25, 2 | 2021-05-25 |
PMOS High-K Metal Gates
App 20210134972 - Yang; Yixiong ; et al. | 2021-05-06 |
In-situ tungsten deposition without barrier layer
Grant 10,991,586 - Wu , et al. April 27, 2 | 2021-04-27 |
Treatments To Enhance Material Structures
App 20210111020 - GANDIKOTA; Srinivas ; et al. | 2021-04-15 |
P-Type Dipole For P-FET
App 20210098581 - Lin; Yongjing ; et al. | 2021-04-01 |
Fluorine-Doped Nitride Films for Improved High-K Reliability
App 20200411373 - Yang; Yixiong ; et al. | 2020-12-31 |
Thermal Process Chamber Lid With Backside Pumping
App 20200381295 - Cui; Anqing ; et al. | 2020-12-03 |
Integrated Dipole Flow For Transistor
App 20200373404 - Lin; Yongjing ; et al. | 2020-11-26 |
Liner For V-nand Word Line Stack
App 20200373318 - Wrench; Jacqueline S. ; et al. | 2020-11-26 |
Metal Based Hydrogen Barrier
App 20200373200 - Gandikota; Srinivas ; et al. | 2020-11-26 |
Methods of increasing selectivity for selective etch processes
Grant 10,755,947 - Zhang , et al. A | 2020-08-25 |
In-situ Tungsten Deposition Without Barrier Layer
App 20200243341 - Wu; Yong ; et al. | 2020-07-30 |
Method Of Reducing Effective Oxide Thickness In A Semiconductor Structure
App 20200176247 - LI; LUPING ; et al. | 2020-06-04 |
Methods and apparatus for doping engineering and threshold voltage tuning by integrated deposition of titanium nitride and aluminum films
Grant 10,665,450 - Yang , et al. | 2020-05-26 |
High pressure annealing of metal gate structures
Grant 10,636,705 - Wang , et al. | 2020-04-28 |
Methods And Apparatus For N-type Metal Oxide Semiconductor (nmos) Metal Gate Materials Using Atomic Layer Deposition (ald) Proce
App 20200111885 - LIN; YONGJING ; et al. | 2020-04-09 |
Oxygen Free Deposition Of Platinum Group Metal Films
App 20200063263 - Yang; Yixiong ; et al. | 2020-02-27 |
Methods Of Increasing Selectivity For Selective Etch Processes
App 20190341268 - Zhang; Wenyu ; et al. | 2019-11-07 |
Tuning Work Function Of P-metal Work Function Films Through Vapor Deposition
App 20190326120 - JIAN; Guoqiang ; et al. | 2019-10-24 |
Atomic layer deposition chamber with thermal lid
Grant 10,407,771 - Cui , et al. Sept | 2019-09-10 |
Methods And Apparatus For Doping Engineering And Threshold Voltage Tuning By Integrated Deposition Of Titanium Nitride And Aluminum Films
App 20190057863 - YANG; YIXIONG ; et al. | 2019-02-21 |
Methods for selective deposition of metal silicides via atomic layer deposition cycles
Grant 10,199,230 - Ganguli , et al. Fe | 2019-02-05 |
Aluminum content control of TiAIN films
Grant 10,170,321 - Zhang , et al. J | 2019-01-01 |
Aluminum Content Control of TiAIN Films
App 20180269065 - Zhang; Wenyu ; et al. | 2018-09-20 |
Multi-threshold voltage structures with a lanthanum nitride film and methods of formation thereof
Grant 9,748,354 - Tang , et al. August 29, 2 | 2017-08-29 |
Multi-threshold Voltage Structures With A Lanthanum Nitride Film And Methods Of Formation Thereof
App 20170179252 - TANG; Wei V. ; et al. | 2017-06-22 |
Methods for etching via atomic layer deposition (ALD) cycles
Grant 9,595,466 - Fu , et al. March 14, 2 | 2017-03-14 |
Methods For Selective Deposition Of Metal Silicides Via Atomic Layer Deposition Cycles
App 20160322229 - GANGULI; Seshadri ; et al. | 2016-11-03 |
Atomic Layer Deposition Chamber With Funnel-shaped Gas Dispersion Channel And Gas Distribution Plate
App 20160312360 - RASHEED; Muhammad M. ; et al. | 2016-10-27 |
Methods For Etching Via Atomic Layer Deposition (ald) Cycles
App 20160276214 - FU; Xinyu ; et al. | 2016-09-22 |
Atomic Layer Deposition Chamber With Thermal Lid
App 20160097119 - CUI; ANQING ; et al. | 2016-04-07 |
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