| Patent | Date |
|---|
Atomic layer etching and smoothing of refractory metals and other high surface binding energy materials
Grant 11,450,513 - Yang , et al. September 20, 2 | 2022-09-20 |
Atomic Layer Etch And Ion Beam Etch Patterning
App 20220254649 - TAN; Samantha SiamHwa ; et al. | 2022-08-11 |
Photoresist Development With Halide Chemistries
App 20220244645 - Tan; Samantha SiamHwa ; et al. | 2022-08-04 |
Atomic Layer Etching For Subtractive Metal Etch
App 20220199422 - YANG; Wenbing ; et al. | 2022-06-23 |
Atomic Layer Etching Of Tungsten For Enhanced Tungsten Deposition Fill
App 20220115244 - LAI; Chiukin Steven ; et al. | 2022-04-14 |
Atomic Layer Etching Of Tungsten For Enhanced Tungsten Deposition Fill
App 20210305059 - Lai; Chiukin Steven ; et al. | 2021-09-30 |
Atomic layer etch of tungsten for enhanced tungsten deposition fill
Grant 11,069,535 - Lai , et al. July 20, 2 | 2021-07-20 |
Atomic Layer Etching And Smoothing Of Refractory Metals And Other High Surface Binding Energy Materials
App 20210005425 - Yang; Wenbing ; et al. | 2021-01-07 |
High Energy Atomic Layer Etching
App 20200402770 - Yang; Wenbing ; et al. | 2020-12-24 |
Atomic Layer Etch Of Tungsten For Enhanced Tungsten Deposition Fill
App 20200286743 - Lai; Chiukin Steven ; et al. | 2020-09-10 |
High energy atomic layer etching
Grant 10,763,083 - Yang , et al. Sep | 2020-09-01 |
Dry plasma etch method to pattern MRAM stack
Grant 10,749,103 - Tan , et al. A | 2020-08-18 |
Atomic layer etching 3D structures: Si and SiGe and Ge smoothness on horizontal and vertical surfaces
Grant 10,727,073 - Tan , et al. | 2020-07-28 |
Integrating Atomic Scale Processes: Ald (atomic Layer Deposition) And Ale (atomic Layer Etch)
App 20200161139 - Kanarik; Keren Jacobs ; et al. | 2020-05-21 |
Integrating atomic scale processes: ALD (atomic layer deposition) and ALE (atomic layer etch)
Grant 10,515,816 - Kanarik , et al. Dec | 2019-12-24 |
Dry Plasma Etch Method To Pattern Mram Stack
App 20190312194 - Tan; Samantha ; et al. | 2019-10-10 |
Dry plasma etch method to pattern MRAM stack
Grant 10,374,144 - Tan , et al. | 2019-08-06 |
Integrating Atomic Scale Processes: Ald (atomic Layer Deposition) And Ale (atomic Layer Etch)
App 20190139778 - Kanarik; Keren Jacobs ; et al. | 2019-05-09 |
High Energy Atomic Layer Etching
App 20190108982 - Yang; Wenbing ; et al. | 2019-04-11 |
Integrating atomic scale processes: ALD (atomic layer deposition) and ale (atomic layer etch)
Grant 10,186,426 - Kanarik , et al. Ja | 2019-01-22 |
Atomic layer etching of tungsten and other metals
Grant 10,096,487 - Yang , et al. October 9, 2 | 2018-10-09 |
Atomic Layer Etch Of Tungsten For Enhanced Tungsten Deposition Fill
App 20180240682 - Lai; Chiukin Steven ; et al. | 2018-08-23 |
Atomic layer etching of GaN and other III-V materials
Grant 10,056,264 - Yang , et al. August 21, 2 | 2018-08-21 |
Atomic layer etching of tungsten for enhanced tungsten deposition fill
Grant 9,972,504 - Lai , et al. May 15, 2 | 2018-05-15 |
Integrating Atomic Scale Processes: Ald (atomic Layer Deposition) And Ale (atomic Layer Etch)
App 20180033635 - Kanarik; Keren Jacobs ; et al. | 2018-02-01 |
Dry Plasma Etch Method To Pattern Mram Stack
App 20180019387 - Tan; Samantha ; et al. | 2018-01-18 |
Dry plasma etch method to pattern MRAM stack
Grant 9,806,252 - Tan , et al. October 31, 2 | 2017-10-31 |
Integrating atomic scale processes: ALD (atomic layer deposition) and ALE (atomic layer etch)
Grant 9,805,941 - Kanarik , et al. October 31, 2 | 2017-10-31 |
Atomic Layer Etching 3d Structures: Si And Sige And Ge Smoothness On Horizontal And Vertical Surfaces
App 20170229314 - Tan; Samantha ; et al. | 2017-08-10 |
Integrating Atomic Scale Processes: Ald (atomic Layer Deposition) And Ale (atomic Layer Etch)
App 20170117159 - Kanarik; Keren Jacobs ; et al. | 2017-04-27 |
Atomic Layer Etching Of Tungsten And Other Metals
App 20170053810 - Yang; Wenbing ; et al. | 2017-02-23 |
Integrating atomic scale processes: ALD (atomic layer deposition) and ALE (atomic layer etch)
Grant 9,576,811 - Kanarik , et al. February 21, 2 | 2017-02-21 |
Atomic Layer Etching Of Tungsten For Enhanced Tungsten Deposition Fill
App 20170040214 - Lai; Chiukin Steven ; et al. | 2017-02-09 |
ATOMIC LAYER ETCHING OF GaN AND OTHER III-V MATERIALS
App 20160358782 - Yang; Wenbing ; et al. | 2016-12-08 |
Inorganic solution and solution process for electronic and electro-optic devices
Grant 9,502,600 - Yang , et al. November 22, 2 | 2016-11-22 |
Dry Plasma Etch Method To Pattern Mram Stack
App 20160308112 - Tan; Samantha ; et al. | 2016-10-20 |
Integrating Atomic Scale Processes: Ald (atomic Layer Deposition) And Ale (atomic Layer Etch)
App 20160203995 - Kanarik; Keren Jacobs ; et al. | 2016-07-14 |
Method to etch non-volatile metal materials
Grant 9,391,267 - Shen , et al. July 12, 2 | 2016-07-12 |
Method to etch non-volatile metal materials
Grant 9,257,638 - Tan , et al. February 9, 2 | 2016-02-09 |
Method To Etch Non-volatile Metal Materials
App 20150340603 - SHEN; Meihua ; et al. | 2015-11-26 |
Method To Etch Non-volatile Metal Materials
App 20150280114 - SHEN; Meihua ; et al. | 2015-10-01 |
Method To Etch Non-volatile Metal Materials
App 20150280113 - TAN; Samantha S.H. ; et al. | 2015-10-01 |
Method to etch non-volatile metal materials
Grant 9,130,158 - Shen , et al. September 8, 2 | 2015-09-08 |
Inorganic Solution And Solution Process For Electronic And Electro-optic Devices
App 20140116512 - Yang; Yang ; et al. | 2014-05-01 |
Method for restoring computer operating system
Grant 7,447,888 - Du , et al. November 4, 2 | 2008-11-04 |
Method for renovating the computer operating system
App 20070011493 - Du; Bin ; et al. | 2007-01-11 |
Method for implementing data backup and recovery in computer hard disk
Grant 7,111,203 - Hu , et al. September 19, 2 | 2006-09-19 |
Method for implementing data backup and recovery in computer hard disk
App 20040078680 - Hu, Jianfeng ; et al. | 2004-04-22 |
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