| Patent | Date |
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Motor with force constant modeling and identification for flexible mode control
Grant 11,223,303 - Yang , et al. January 11, 2 | 2022-01-11 |
Dual valve fluid actuator assembly
Grant 11,092,170 - Poon , et al. August 17, 2 | 2021-08-17 |
Dual Valve Fluid Actuator Assembly
App 20190376531 - Poon; Alex Ka Tim ; et al. | 2019-12-12 |
Magnet array for moving magnet planar motor
Grant 10,261,419 - Yang , et al. | 2019-04-16 |
Motor With Force Constant Modeling And Identification For Flexible Mode Control
App 20180367067 - Yang; Pai-Hsueh ; et al. | 2018-12-20 |
Magnetic sensor calibration and servo for planar motor stage
Grant 9,921,495 - Yang , et al. March 20, 2 | 2018-03-20 |
Methods for limiting counter-mass trim-motor force and stage assemblies incorporating same
Grant 9,529,353 - Yang , et al. December 27, 2 | 2016-12-27 |
Method for determining a commutation offset and for determining a compensation map for a stage
Grant 9,465,305 - Yang , et al. October 11, 2 | 2016-10-11 |
Method for calibrating a force constant of a motorized stage used for supporting and moving a workpiece
Grant 9,243,969 - Yang January 26, 2 | 2016-01-26 |
Magnet Array For Moving Magnet Planar Motor
App 20150338750 - Yang; Pai-Hsueh ; et al. | 2015-11-26 |
Dynamic Correction to Remove the Influence of Motor Coil Flux on Hall Sensor Measurement
App 20150241525 - Yang; Pai-Hsueh ; et al. | 2015-08-27 |
Coil Switching Method for Moving Magnet Planar Motor
App 20150241794 - Yang; Pai-Hsueh ; et al. | 2015-08-27 |
Method and apparatus to allow a plurality of stages to operate in close proximity
Grant 9,030,057 - Binnad , et al. May 12, 2 | 2015-05-12 |
Method for determing a commutation offset and for determining a compensation map for a stage
Grant 9,013,134 - Yang , et al. April 21, 2 | 2015-04-21 |
Control systems and methods for compensating for effects of a stage motor
Grant 8,853,988 - Binnard , et al. October 7, 2 | 2014-10-07 |
Magnetic Sensor Calibration And Servo For Planar Motor Stage
App 20140204358 - Yang; Pai-Hsueh ; et al. | 2014-07-24 |
Stage assembly with measurement system initialization, vibration compensation, low transmissibility, and lightweight fine stage
Grant 8,582,080 - Binnard , et al. November 12, 2 | 2013-11-12 |
Control systems and methods applying iterative feedback tuning for feed-forward and synchronization control of microlithography stages and the like
Grant 8,451,431 - Yang , et al. May 28, 2 | 2013-05-28 |
Feedforward Control Adjusted With Iterative Learning
App 20130116814 - Yang; Pai-Hsueh | 2013-05-09 |
Force Distribution Method for Stage Systems Utilizing Dual Actuators
App 20130049647 - Yang; Pai-Hsueh | 2013-02-28 |
Method and Apparatus to Allow a Plurality of Stages to Operate in Close Proximity
App 20120328836 - Binnad; Michael B. ; et al. | 2012-12-27 |
Synchronization control devices and methods
App 20120319637 - Yang; Pai-Hsueh ; et al. | 2012-12-20 |
Method For Determing A Commutation Offset And For Determining A Compensation Map For A Stage
App 20120127447 - Yang; Pai-Hsueh ; et al. | 2012-05-24 |
Method For Determining A Commutation Offset And For Determining A Compensation Map For A Stage
App 20120113405 - Yang; Pai-Hsueh ; et al. | 2012-05-10 |
Methods For Limiting Counter-mass Trim-motor Force And Stage Assemblies Incorporating Same
App 20120069316 - Yang; Pai-Hsueh ; et al. | 2012-03-22 |
On-machine methods for identifying and compensating force-ripple and side-forces produced by actuators on a multiple-axis stage
Grant 8,140,288 - Yang , et al. March 20, 2 | 2012-03-20 |
Method For Calibrating A Force Constant Of A Motorized Stage Used For Supporting And Moving A Workpiece
App 20120060582 - Yang; Pai-Hsueh | 2012-03-15 |
Active-isolation mounts for optical elements
Grant 7,989,756 - Koo , et al. August 2, 2 | 2011-08-02 |
Control Systems and Methods for Compensating for Effects of a Stage Motor
App 20100237819 - Binnard; Michael B. ; et al. | 2010-09-23 |
Stage-control systems and methods including inverse closed loop with adaptive controller
App 20100222898 - Yang; Pai-Hsueh | 2010-09-02 |
Control systems and methods applying iterative feedback tuning for feed-forward and synchronization control of microlithography stages and the like
App 20100188647 - Yang; Pai-Hsueh ; et al. | 2010-07-29 |
Active-isolation Mounts For Optical Elements
App 20090237793 - Koo; Shiang-Lung ; et al. | 2009-09-24 |
Stage Assembly With Measurement System Initialization, Vibration Compensation, Low Transmissibility, And Lightweight Fine Stage
App 20080278705 - Binnard; Michael ; et al. | 2008-11-13 |
On-machine methods for identifying and compensating force-ripple and side-forces produced by actuators on a multiple-axis stage
App 20080275661 - Yang; Pai-Hsueh ; et al. | 2008-11-06 |
Stage assembly with measurement system initialization, vibration compensation, low transmissibility, and lightweight fine stage
Grant 7,417,714 - Binnard , et al. August 26, 2 | 2008-08-26 |
E/I core actuator commutation formula and control method
Grant 7,253,576 - Yang , et al. August 7, 2 | 2007-08-07 |
Fine force actuator assembly for chemical mechanical polishing apparatuses
Grant 7,172,493 - Novak , et al. February 6, 2 | 2007-02-06 |
Linear motor force ripple identification and compensation with iterative learning control
App 20060170382 - Yang; Pai-Hsueh ; et al. | 2006-08-03 |
Stage assembly with measurement system initialization, vibration compensation, low transmissibility, and lightweight fine stage
App 20060101928 - Binnard; Michael ; et al. | 2006-05-18 |
Auto-calibration of attraction-only type actuator commutations
Grant 7,034,474 - Yang , et al. April 25, 2 | 2006-04-25 |
Fine force actuator assembly for chemical mechanical polishing apparatuses
App 20060035564 - Novak; W. Thomas ; et al. | 2006-02-16 |
Feedforward control with reduced learning time for lithographic system to improve throughput and accuracy
App 20050231706 - Yang, Pai-Hsueh ; et al. | 2005-10-20 |
E/I core actuator commutation formula and control method
App 20050218842 - Yang, Pai-Hsueh ; et al. | 2005-10-06 |
Fine force control of actuators for chemical mechanical polishing apparatuses
App 20050197045 - Novak, W. Thomas ; et al. | 2005-09-08 |
Auto calibration of attraction-only type actuator commutations
App 20050173992 - Yang, Pai Hsueh ; et al. | 2005-08-11 |
Modular stage with reaction force cancellation
Grant 6,917,412 - Poon , et al. July 12, 2 | 2005-07-12 |
Fine force control of actuators for chemical mechanical polishing apparatuses
Grant 6,855,032 - Yang , et al. February 15, 2 | 2005-02-15 |
Modular Stage With Reaction Force Cancellation
App 20040165172 - Poon, Alex Ka Tim ; et al. | 2004-08-26 |
Control system and method for improving tracking accuracy of a stage through processing of information from previous operations
App 20040128918 - Yang, Pai-Hsueh ; et al. | 2004-07-08 |
Double isolation fine stage
App 20040119964 - Poon, Alex Ka Tim ; et al. | 2004-06-24 |
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