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Patent applications and USPTO patent grants for Yang; Kun-Shu.The latest application filed is for "polishing pad with offset concentric grooving pattern and method for polishing a substrate therewith".
Patent | Date |
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Polishing pad with offset concentric grooving pattern and method for polishing a substrate therewith Grant 9,687,956 - Tsai , et al. June 27, 2 | 2017-06-27 |
CMP polishing pad having edge exclusion region of offset concentric groove pattern Grant 9,409,276 - Tsai , et al. August 9, 2 | 2016-08-09 |
Polishing Pad With Offset Concentric Grooving Pattern And Method For Polishing A Substrate Therewith App 20150298287 - Tsai; Ching-Ming ;   et al. | 2015-10-22 |
Cmp Polishing Pad Having Edge Exclusion Region Of Offset Concentric Groove Pattern App 20150111476 - TSAI; Ching-Ming ;   et al. | 2015-04-23 |
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