Patent | Date |
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Coupled accordion springs in microelectromechanical systems (MEMS) devices Grant 10,920,756 - Zhang , et al. February 16, 2 | 2021-02-16 |
Self-calibrated heavy metal detector Grant 10,746,696 - Yang , et al. A | 2020-08-18 |
Piezoelectric energy harvester for human motion Grant 10,536,098 - Zhang , et al. Ja | 2020-01-14 |
Integrated super-capacitor Grant 10,468,201 - Jiang , et al. No | 2019-11-05 |
Method of producing a super-capacitor Grant 10,373,766 - Jiang , et al. | 2019-08-06 |
Method Of Producing A Super-capacitor App 20190027322 - Jiang; Yingqi ;   et al. | 2019-01-24 |
Method of producing a super-capacitor Grant 10,102,981 - Jiang , et al. October 16, 2 | 2018-10-16 |
Apparatus and method for shielding and biasing in MEMS devices encapsulated by active circuitry Grant 10,081,535 - Chen , et al. September 25, 2 | 2018-09-25 |
Electric energy scavenger device Grant 10,069,441 - Jiang , et al. September 4, 2 | 2018-09-04 |
Integrated circuit with shared electrode energy storage devices Grant 10,050,320 - Jiang , et al. August 14, 2 | 2018-08-14 |
Self-calibrated Heavy Metal Detector App 20180172631 - Yang; Chen ;   et al. | 2018-06-21 |
Coupled Accordion Springs In Microelectromechanical Systems (mems) Devices App 20180087491 - Zhang; Qian ;   et al. | 2018-03-29 |
MEMs device with outgassing shield Grant 9,764,946 - Chen , et al. September 19, 2 | 2017-09-19 |
Piezoelectric Energy Harvester For Human Motion App 20170237368 - Zhang; Qian ;   et al. | 2017-08-17 |
Electric Energy Scavenger Device App 20170117824 - Jiang; Yingqi ;   et al. | 2017-04-27 |
Super-capacitor with separator and method of producing the same Grant 9,601,278 - Jiang , et al. March 21, 2 | 2017-03-21 |
Apparatus and method for preventing stiction of MEMS devices encapsulated by active circuitry Grant 9,556,017 - Chen , et al. January 31, 2 | 2017-01-31 |
Low frequency response microphone diaphragm structures and methods for producing the same Grant 9,505,614 - Liu , et al. November 29, 2 | 2016-11-29 |
Integrated Circuit with Shared Electrode Energy Storage Devices App 20160204492 - Jiang; Yingqi ;   et al. | 2016-07-14 |
Integrated Super-Capacitor App 20160104581 - Jiang; Yingqi ;   et al. | 2016-04-14 |
Method Of Producing A Super-capacitor App 20160064149 - Jiang; Yingqi ;   et al. | 2016-03-03 |
Super-Capacitor with Separator and Method of Producing the Same App 20160064155 - Jiang; Yingqi ;   et al. | 2016-03-03 |
Microchip with blocking apparatus Grant 9,242,856 - Chen , et al. January 26, 2 | 2016-01-26 |
Dual single-crystal backplate microphone system and method of fabricating same Grant 9,219,963 - Yang , et al. December 22, 2 | 2015-12-22 |
BAW Gyroscope with Bottom Electrode App 20150318190 - Sammoura; Firas N. ;   et al. | 2015-11-05 |
System and method for detecting surface charges of a MEMS device Grant 9,174,837 - Liu , et al. November 3, 2 | 2015-11-03 |
Microphone system with mechanically-coupled diaphragms Grant 9,143,870 - Liu , et al. September 22, 2 | 2015-09-22 |
Sealed MEMS devices with multiple chamber pressures Grant 9,102,512 - Tsau , et al. August 11, 2 | 2015-08-11 |
MEMS device with improved charge elimination and methods of producing same Grant 9,029,179 - Liu , et al. May 12, 2 | 2015-05-12 |
Low Frequency Response Microphone Diaphragm Structures And Methods For Producing The Same App 20150125984 - Liu; Fang ;   et al. | 2015-05-07 |
MEMS Device with Outgassing Shield App 20150115376 - Chen; Li ;   et al. | 2015-04-30 |
Sealed MEMS Devices with Multiple Chamber Pressures App 20150097253 - Tsau; Christine H. ;   et al. | 2015-04-09 |
Low frequency response microphone diaphragm structures and methods for producing the same Grant 8,946,831 - Liu , et al. February 3, 2 | 2015-02-03 |
Methods and structures for using diamond in the production of MEMS Grant 8,940,639 - Liu , et al. January 27, 2 | 2015-01-27 |
Method of manufacturing MEMS devices with reliable hermetic seal Grant 8,921,128 - Chen , et al. December 30, 2 | 2014-12-30 |
Apparatus and Method for Shielding and Biasing in MEMS Devices Encapsulated by Active Circuitry App 20140374850 - Chen; Li ;   et al. | 2014-12-25 |
Apparatus and Method for Preventing Stiction of MEMS Devices Encapsulated by Active Circuitry App 20140374856 - Chen; Li ;   et al. | 2014-12-25 |
Method Of Manufacturing Mems Devices With Reliable Hermetic Seal App 20140356989 - Chen; Li ;   et al. | 2014-12-04 |
Low Frequency Response Microphone Diaphragm Structures And Methods For Producing The Same App 20140264650 - Liu; Fang ;   et al. | 2014-09-18 |
Methods and Structures for Using Diamond in the Production of MEMS App 20140220723 - Liu; Fang ;   et al. | 2014-08-07 |
Microchip with Blocking Apparatus and Method of Fabricating Microchip App 20140203422 - Chen; Li ;   et al. | 2014-07-24 |
Microphone with parasitic capacitance cancelation Grant 8,755,541 - Liu , et al. June 17, 2 | 2014-06-17 |
Microchip with blocking apparatus and method of fabricating microchip Grant 8,749,036 - Chen , et al. June 10, 2 | 2014-06-10 |
Microphone System with Mechanically-Coupled Diaphragms App 20140133685 - Liu; Fang ;   et al. | 2014-05-15 |
Microchip With Blocking Apparatus And Method Of Fabricating Microchip App 20140131850 - Chen; Li ;   et al. | 2014-05-15 |
Dual Single-Crystal Backplate Microphone System and Method Of Fabricating Same App 20140072152 - Yang; Kuang L. ;   et al. | 2014-03-13 |
Microphone with Parasitic Capacitance Cancelation App 20140072150 - Liu; Fang ;   et al. | 2014-03-13 |
MEMS Device with Improved Charge Elimination and Methods of Producing Same App 20140001577 - Liu; Fang ;   et al. | 2014-01-02 |
BAW gyroscope with bottom electrode Grant 8,616,056 - Sammoura , et al. December 31, 2 | 2013-12-31 |
Package for Damping Inertial Sensor App 20130320466 - Chen; Li ;   et al. | 2013-12-05 |
Method of fabricating a dual single-crystal backplate microphone Grant 8,590,136 - Yang , et al. November 26, 2 | 2013-11-26 |
System and Method for Detecting Surface Charges of a MEMS Device App 20130257456 - Liu; Fang ;   et al. | 2013-10-03 |
Reduced stiction MEMS device with exposed silicon carbide Grant 8,507,306 - Chen , et al. August 13, 2 | 2013-08-13 |
Method for etching material longitudinally spaced from etch mask Grant 8,455,288 - Yang , et al. June 4, 2 | 2013-06-04 |
Method For Etching Material Longitudinally Spaced From Etch Mask App 20130065343 - Yang; Kuang L. ;   et al. | 2013-03-14 |
MEMS stiction testing apparatus and method Grant 8,215,151 - Sammoura , et al. July 10, 2 | 2012-07-10 |
BAW Gyroscope with Bottom Electrode App 20120111113 - Sammoura; Firas N. ;   et al. | 2012-05-10 |
Reduced Stiction MEMS Device with Exposed Silicon Carbide App 20110073859 - Chen; Li ;   et al. | 2011-03-31 |
Dual Single-Crystal Backplate Microphone System and Method Of Fabricating Same App 20110075865 - Yang; Kuang L. ;   et al. | 2011-03-31 |
Nickel-Based Bonding of Semiconductor Wafers App 20100283138 - Chen; Li ;   et al. | 2010-11-11 |
MEMS Stiction Testing Apparatus and Method App 20090320557 - Sammoura; Firas N. ;   et al. | 2009-12-31 |
Metalization systems for heater/sensor elements Grant 5,006,421 - Yang , et al. April 9, 1 | 1991-04-09 |