Yang; Ken L.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Yang; Ken L..The latest application filed is for "method of making dimple structure for prevention of mems device stiction".
- Yang; Ken L. - Bellevue WA
| Patent | Date |
|---|---|
| Method of making dimple structure for prevention of MEMS device stiction Grant 7,482,192 - Yu , et al. January 27, 2 | 2009-01-27 |
| System and method for uniform multi-plane silicon oxide layer formation for optical applications Grant 7,442,589 - Yu , et al. October 28, 2 | 2008-10-28 |
| Method Of Making Dimple Structure For Prevention Of Mems Device Stiction App 20070269920 - Yu; Lianzhong ; et al. | 2007-11-22 |
| System And Method For Uniform Multi-plane Silicon Oxide Layer Formation For Optical Applications App 20070167027 - Yu; Lianzhong ; et al. | 2007-07-19 |
| Systems and methods for direct silicon epitaxy thickness measuring App 20070004056 - Yu; Lianzhong ; et al. | 2007-01-04 |
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