| Patent | Date |
|---|
Substrate supporting unit, substrate processing apparatus, and method of manufacturing substrate supporting unit
Grant 10,622,228 - Lee , et al. | 2020-04-14 |
Method for substrate processing using exhaust ports
Grant 10,593,545 - Yang , et al. | 2020-03-17 |
Substrate supporting unit, substrate processing apparatus, and method of manufacturing substrate supporting unit
Grant 10,192,760 - Lee , et al. Ja | 2019-01-29 |
Substrate processing apparatus including heat-shield plate
Grant 9,953,850 - Yang , et al. April 24, 2 | 2018-04-24 |
Substrate processing apparatus including exhaust ports and substrate processing method
Grant 9,875,895 - Yang , et al. January 23, 2 | 2018-01-23 |
Substrate processing apparatus including processing unit
Grant 9,869,019 - Yang , et al. January 16, 2 | 2018-01-16 |
Substrate treatment apparatus, and method for controlling temperature of heater
Grant 9,758,870 - Je , et al. September 12, 2 | 2017-09-12 |
Substrate Processing Apparatus Including Exhaust Ports And Substrate Processing Method
App 20170148649 - YANG; IL-KWANG ; et al. | 2017-05-25 |
Heater moving type substrate processing apparatus
Grant 9,644,895 - Yang , et al. May 9, 2 | 2017-05-09 |
Substrate Supporting Unit, Substrate Processing Apparatus, And Method Of Manufacturing Substrate Supporting Unit
App 20170110347 - LEE; Dong-Keun ; et al. | 2017-04-20 |
Apparatus for processing substrate for supplying reaction gas having phase difference
Grant 9,620,395 - Yang , et al. April 11, 2 | 2017-04-11 |
Showerhead having cooling system and substrate processing apparatus including the showerhead
Grant 9,593,418 - Yang , et al. March 14, 2 | 2017-03-14 |
Substrate processing apparatus including auxiliary gas supply port
Grant 9,593,415 - Yang , et al. March 14, 2 | 2017-03-14 |
Plasma treatment apparatus and plasma antenna
Grant 9,564,294 - Woo , et al. February 7, 2 | 2017-02-07 |
Substrate processing device equipped with semicircle shaped antenna
Grant 9,416,451 - Je , et al. August 16, 2 | 2016-08-16 |
Substrate processing device with connection space
Grant 9,368,380 - Yang , et al. June 14, 2 | 2016-06-14 |
Substrate Supporting Unit, Substrate Processing Apparatus, And Method Of Manufacturing Substrate Supporting Unit
App 20160049317 - LEE; Dong-Keun ; et al. | 2016-02-18 |
Substrate Processing Device
App 20160013086 - YANG; Il-Kwang ; et al. | 2016-01-14 |
Apparatus For Processing Substrate
App 20150380284 - YANG; Il-Kwang ; et al. | 2015-12-31 |
Apparatus For Processing Substrate
App 20150369539 - YANG; Il-Kwang ; et al. | 2015-12-24 |
Substrate-processing Device
App 20150337460 - YANG; Il-Kwang ; et al. | 2015-11-26 |
Purge Chamber, And Substrate-processing Apparatus Including Same
App 20150267291 - Yang; Il-Kwang ; et al. | 2015-09-24 |
Substrate Processing Apparatus
App 20150252476 - Yang; Il-Kwang ; et al. | 2015-09-10 |
Substrate Processing Device
App 20150211116 - Yang; Il-Kwang ; et al. | 2015-07-30 |
Substrate Processing Device
App 20150191821 - Yang; Il-Kwang ; et al. | 2015-07-09 |
Apparatus For Processing Substrate
App 20150136026 - Yang; Il-Kwang ; et al. | 2015-05-21 |
Apparatus For Processing Substrate
App 20150122177 - Yang; Il-Kwang ; et al. | 2015-05-07 |
Heater Moving Type Substrate Processing Apparatus
App 20150044622 - Yang; Il-Kwang ; et al. | 2015-02-12 |
Substrate Processing Apparatus Including Auxiliary Gas Supply Port
App 20150013909 - Yang; Il-Kwang ; et al. | 2015-01-15 |
Apparatus For Processing Substrate For Supplying Reaction Gas Having Phase Difference
App 20140345801 - Yang; Il-Kwang ; et al. | 2014-11-27 |
Substrate Processing Apparatus Including Processing Unit
App 20140345528 - Yang; Il-Kwang ; et al. | 2014-11-27 |
Substrate Processing Apparatus Including Heat-shield Plate
App 20140348617 - Yang; Il-Kwang ; et al. | 2014-11-27 |
Substrate Processing Module And Substrate Processing Apparatus Including The Same
App 20140341682 - Yang; Il-Kwang ; et al. | 2014-11-20 |
Apparatus For Processing Apparatus Having Side Pumping Type
App 20140331933 - Yang; Il-Kwang ; et al. | 2014-11-13 |
Showerhead Having Cooling System And Substrate Processing Apparatus Including The Showerhead
App 20140311411 - Yang; Il-Kwang ; et al. | 2014-10-23 |
Substrate Processing Apparatus Including Exhaust Ports And Substrate Processing Method
App 20140315375 - Yang; Il-Kwang ; et al. | 2014-10-23 |
Substrate processing apparatus and method
Grant 8,528,499 - Je , et al. September 10, 2 | 2013-09-10 |
Substrate Processing Device For Supplying Reaction Gas Through Symmetry-type Inlet And Outlet
App 20130186337 - Je; Sung Tae ; et al. | 2013-07-25 |
Substrate Processing Device Equipped With Semicircle Shaped Antenna
App 20130180453 - Je; Sung Tae ; et al. | 2013-07-18 |
Substrate-processing Apparatus And Substrate-transferring Method
App 20130149078 - Je; Sung Tae ; et al. | 2013-06-13 |
Substrate processing apparatus and method
Grant 8,312,840 - Yang November 20, 2 | 2012-11-20 |
Plasma Treatment Apparatus And Plasma Antenna
App 20110198032 - Woo; Sang Ho ; et al. | 2011-08-18 |
Substrate Processing Apparatus And Method
App 20110028001 - Je; Sung-Tae ; et al. | 2011-02-03 |
Substrate Processing Apparatus And Method
App 20110021034 - Yang; Il-Kwang | 2011-01-27 |
Apparatus And Method For Processing Substrate
App 20110014397 - Yang; Il-Kwang | 2011-01-20 |
Apparatus And Method For Processing Substrate
App 20110000618 - Yang; Il-Kwang | 2011-01-06 |
Apparatus And Method For Processing Substrate
App 20100330301 - Yang; Il-Kwang | 2010-12-30 |
Substrate Supporting Unit, Substrate Processing Apparatus, And Method Of Manufacturing Substrate Supporting Unit
App 20100319855 - Lee; Dong-Keun ; et al. | 2010-12-23 |
Plasma Processing Apparatus And Plasma Processing Method
App 20100319621 - Woo; Sang-Ho ; et al. | 2010-12-23 |
Plasma Processing Apparatus And Method
App 20100276393 - Woo; Sang-Ho ; et al. | 2010-11-04 |
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