| Patent | Date |
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Selective material removal
Grant 11,417,534 - Xia , et al. August 16, 2 | 2022-08-16 |
Semiconductor processing chamber for multiple precursor flow
Grant 11,361,939 - Samir , et al. June 14, 2 | 2022-06-14 |
Multi-zone Semiconductor Substrate Supports
App 20220148894 - Samir; Mehmet Tugrul ; et al. | 2022-05-12 |
Multi-zone semiconductor substrate supports
Grant 11,276,590 - Samir , et al. March 15, 2 | 2022-03-15 |
Semiconductor processing chamber for multiple precursor flow
Grant 11,276,559 - Samir , et al. March 15, 2 | 2022-03-15 |
Seasoning process for establishing a stable process and extending chamber uptime for semiconductor chip processing
Grant 11,164,724 - Kang , et al. November 2, 2 | 2021-11-02 |
Process window widening using coated parts in plasma etch processes
Grant 11,101,136 - Yang , et al. August 24, 2 | 2021-08-24 |
Semiconductor processing chamber multistage mixing apparatus and methods
Grant 10,964,512 - Samir , et al. March 30, 2 | 2021-03-30 |
Method and Apparatus for Selective Deposition of Dielectric Films
App 20210043448 - Li; Ning ; et al. | 2021-02-11 |
Semiconductor Processing Chamber Multistage Mixing Apparatus
App 20200328098 - Samir; Mehmet Tugrul ; et al. | 2020-10-15 |
Semiconductor processing chamber multistage mixing apparatus
Grant 10,699,921 - Samir , et al. | 2020-06-30 |
Semiconductor processing chamber multistage mixing apparatus
Grant 10,679,870 - Samir , et al. | 2020-06-09 |
Selective Material Removal
App 20200098586 - Xia; Ming ; et al. | 2020-03-26 |
Semiconductor Processing Chamber Multistage Mixing Apparatus
App 20190333786 - Samir; Mehmet Tugrul ; et al. | 2019-10-31 |
Semiconductor Processing Chamber For Multiple Precursor Flow
App 20190311883 - Samir; Mehmet Tugrul ; et al. | 2019-10-10 |
Process Window Widening Using Coated Parts In Plasma Etch Processes
App 20190272998 - Yang; Dongqing ; et al. | 2019-09-05 |
Semiconductor Processing Chamber Multistage Mixing Apparatus And Methods
App 20190252154 - Samir; Mehmet Tugrul ; et al. | 2019-08-15 |
Semiconductor Processing Chamber Multistage Mixing Apparatus
App 20190252216 - Samir; Mehmet Tugrul ; et al. | 2019-08-15 |
Process window widening using coated parts in plasma etch processes
Grant 10,297,458 - Yang , et al. | 2019-05-21 |
Process Window Widening Using Coated Parts In Plasma Etch Processes
App 20190043726 - Yang; Dongqing ; et al. | 2019-02-07 |
Multi-zone Semiconductor Substrate Supports
App 20180337074 - Samir; Mehmet Tugrul ; et al. | 2018-11-22 |
Semiconductor Processing Chamber For Multiple Precursor Flow
App 20180337057 - Samir; Mehmet Tugrul ; et al. | 2018-11-22 |
Seasoning Process For Establishing A Stable Process And Extending Chamber Uptime For Semiconductor Chip Processing
App 20180337021 - Kang; Sang Won ; et al. | 2018-11-22 |
Methods and apparatus for selective dry etch
Grant 10,134,581 - Li , et al. November 20, 2 | 2018-11-20 |
Method And Apparatus For Selective Deposition Of Dielectric Films
App 20180211833 - Li; Ning ; et al. | 2018-07-26 |
Seasoning process for establishing a stable process and extending chamber uptime for semiconductor chip processing
Grant 10,008,366 - Kang , et al. June 26, 2 | 2018-06-26 |
Methods And Apparatus For Selective Dry Etch
App 20170263438 - Li; Ning ; et al. | 2017-09-14 |
Saving ion-damaged spacers
Grant 9,721,789 - Yang , et al. August 1, 2 | 2017-08-01 |
Method For Fabricating Nanowires For Horizontal Gate All Around Devices For Semiconductor Applications
App 20170194430 - WOOD; Bingxi Sun ; et al. | 2017-07-06 |
Grooved insulator to reduce leakage current
Grant 9,659,753 - Cho , et al. May 23, 2 | 2017-05-23 |
Seasoning Process For Establishing A Stable Process And Extending Chamber Uptime For Semiconductor Chip Processing
App 20170069463 - KANG; Sang Won ; et al. | 2017-03-09 |
Grooved Insulator To Reduce Leakage Current
App 20160042920 - CHO; TAE ; et al. | 2016-02-11 |
Dry-etch For Selective Oxidation Removal
App 20150311089 - Kim; Sang Hyuk ; et al. | 2015-10-29 |
Dry-etch for selective oxidation removal
Grant 9,064,816 - Kim , et al. June 23, 2 | 2015-06-23 |
Dry-etch For Selective Oxidation Removal
App 20140199850 - Kim; Sang Hyuk ; et al. | 2014-07-17 |
Uniform dry etch in two stages
Grant 8,741,778 - Yang , et al. June 3, 2 | 2014-06-03 |
Smooth SiConi etch for silicon-containing films
Grant 8,501,629 - Tang , et al. August 6, 2 | 2013-08-06 |
High-temperature selective dry etch having reduced post-etch solid residue
Grant 8,475,674 - Thadani , et al. July 2, 2 | 2013-07-02 |
Invertable pattern loading with dry etch
Grant 8,435,902 - Tang , et al. May 7, 2 | 2013-05-07 |
Uniform Dry Etch In Two Stages
App 20120196447 - Yang; Dongqing ; et al. | 2012-08-02 |
High-temperature Selective Dry Etch Having Reduced Post-etch Solid Residue
App 20110266252 - Thadani; Kiran V. ; et al. | 2011-11-03 |
Invertable Pattern Loading With Dry Etch
App 20110230052 - Tang; Jing ; et al. | 2011-09-22 |
Smooth Siconi Etch For Silicon-containing Films
App 20110151674 - TANG; JING ; et al. | 2011-06-23 |
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