Patent | Date |
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Semiconductor structure and method forming the same Grant 10,854,616 - Yang December 1, 2 | 2020-12-01 |
Semiconductor Structure And Method Forming The Same App 20200335509 - Yang; Chin-Cheng | 2020-10-22 |
Semiconductor device having etching control layer in substrate and method of fabricating the same Grant 10,580,789 - Huang , et al. | 2020-03-03 |
Layout Design For Fanout Patterns In Self-aligned Double Patterning Process App 20190385848 - YANG; Chin-Cheng ;   et al. | 2019-12-19 |
Layout design for fanout patterns in self-aligned double patterning process Grant 10,497,566 - Yang , et al. De | 2019-12-03 |
Method for forming an aligned mask Grant 10,474,027 - Yang Nov | 2019-11-12 |
Interlevel connectors in multilevel circuitry, and method for forming the same Grant 10,446,437 - Yang Oc | 2019-10-15 |
Method For Forming An Aligned Mask App 20190146330 - Yang; Chin-Cheng | 2019-05-16 |
Edge structure for multiple layers of devices, and method for fabricating the same Grant 10,192,824 - Yang Ja | 2019-01-29 |
Semiconductor Device And Method Of Fabricating The Same App 20190013325 - Huang; Chi-Hao ;   et al. | 2019-01-10 |
Patterned material layer and patterning method Grant 10,153,263 - Yang , et al. Dec | 2018-12-11 |
Interconnect structure and fabricating method thereof Grant 10,153,233 - Huang , et al. Dec | 2018-12-11 |
Semiconductor device and critical dimension defining method thereof Grant 10,103,166 - Liu , et al. October 16, 2 | 2018-10-16 |
Semiconductor Device And Critical Dimension Defining Method Thereof App 20180294276 - Liu; Kuan-Cheng ;   et al. | 2018-10-11 |
Edge Structure For Multiple Layers Of Devices, And Method For Fabricating The Same App 20180294224 - Yang; Chin-Cheng | 2018-10-11 |
Interlevel Connectors In Multilevel Circuitry, And Method For Forming The Same App 20180102281 - Yang; Chin-Cheng | 2018-04-12 |
Pad structure and manufacturing method thereof Grant 9,941,153 - Yang April 10, 2 | 2018-04-10 |
3D memory process and structures Grant 9,859,292 - Yang January 2, 2 | 2018-01-02 |
Patterned Material Layer And Patterning Method App 20170084597 - Yang; Chin-Cheng ;   et al. | 2017-03-23 |
LC module layout arrangement for contact opening etch windows Grant 9,478,546 - Yang October 25, 2 | 2016-10-25 |
Multilayer 3-D structure with mirror image landing regions Grant 9,425,209 - Yang , et al. August 23, 2 | 2016-08-23 |
Patterning method and semiconductor structure including forming a plurality of holes using line pattern masks Grant 9,412,615 - Yang August 9, 2 | 2016-08-09 |
Method of forming semiconductor device Grant 9,412,612 - Yang August 9, 2 | 2016-08-09 |
Patterning method and semiconductor structure Grant 9,396,966 - Yang July 19, 2 | 2016-07-19 |
3D memory process and structures App 20160190151 - Yang; Chin-Cheng | 2016-06-30 |
Patterning Method And Semiconductor Structure App 20160189977 - Yang; Chin-Cheng | 2016-06-30 |
Semiconductor Wafer Holder And Wafer Carrying Tool Using The Same App 20160155658 - Yang; Chin-Cheng | 2016-06-02 |
Semiconductor device and method for fabricating the same Grant 9,343,477 - Yang May 17, 2 | 2016-05-17 |
Lc Module Layout Arrangement For Contact Opening Etch Windows App 20160111429 - Yang; Chin Cheng | 2016-04-21 |
Patterning Method And Semiconductor Structure App 20160086809 - Yang; Chin-Cheng | 2016-03-24 |
Semiconductor Device And Method For Fabricating The Same App 20160071867 - Yang; Chin-Cheng | 2016-03-10 |
Mask monitor mark and method for marking the mark App 20160062227 - Yang; Chin-Cheng | 2016-03-03 |
Method Of Forming Semiconductor Device App 20160064237 - Yang; Chin-Cheng | 2016-03-03 |
Multilayer connection structure Grant 9,269,660 - Chen , et al. February 23, 2 | 2016-02-23 |
Scanner And Method For Performing Exposure Process On Wafer App 20160048087 - Yang; Chin-Cheng ;   et al. | 2016-02-18 |
Coating method and coating system Grant 9,209,016 - Yang December 8, 2 | 2015-12-08 |
Alignment mark Grant 9,188,883 - Yang November 17, 2 | 2015-11-17 |
Method for forming separate narrow lines, method for fabricating memory structure, and product thereof Grant 9,147,692 - Yang September 29, 2 | 2015-09-29 |
Double patterning by PTD and NTD process Grant 9,097,975 - Yang August 4, 2 | 2015-08-04 |
Wafer centering hardware design and process Grant 9,082,802 - Yang July 14, 2 | 2015-07-14 |
Method For Forming Separate Narrow Lines, Method For Fabricating Memory Structure, And Product Thereof App 20150187786 - Yang; Chin-Cheng | 2015-07-02 |
Semiconductor devices and methods of manufacturing the same Grant 8,999,838 - Yang April 7, 2 | 2015-04-07 |
Double Patterning By Ptd And Ntd Process App 20140377708 - Yang; Chin Cheng | 2014-12-25 |
Method and apparatus for transferring substrate Grant 8,847,122 - Yang September 30, 2 | 2014-09-30 |
Lithography process and structures Grant 8,835,103 - Yang September 16, 2 | 2014-09-16 |
Double patterning by PTD and NTD process Grant 8,835,100 - Yang September 16, 2 | 2014-09-16 |
Apparatus for and method of wafer edge exposure Grant 8,804,096 - Yang August 12, 2 | 2014-08-12 |
Double Patterning By Ptd And Ntd Process App 20140080069 - Yang; Chin Cheng | 2014-03-20 |
Lithography Process And Structures App 20140017610 - YANG; Chin Cheng | 2014-01-16 |
Patterning process Grant 8,530,147 - Yang September 10, 2 | 2013-09-10 |
Multilayer Connection Structure App 20130161835 - Chen; Shih-Hung ;   et al. | 2013-06-27 |
Wafer Centering Hardware Design And Process App 20130138238 - Yang; Chin Cheng | 2013-05-30 |
Semiconductor Devices And Methods Of Manufacturing The Same App 20130048984 - Yang; Chin-Cheng | 2013-02-28 |
Method for making multilayer connection structure Grant 8,383,512 - Chen , et al. February 26, 2 | 2013-02-26 |
Baking apparatus, baking method and method of reducing gap width Grant 8,367,981 - Yang February 5, 2 | 2013-02-05 |
Method for patterning material layer Grant 8,343,713 - Huang , et al. January 1, 2 | 2013-01-01 |
Apparatus For And Method Of Wafer Edge Exposure App 20120268721 - Yang; Chin Cheng | 2012-10-25 |
Overlay mark Grant 8,278,770 - Yang October 2, 2 | 2012-10-02 |
Methods of manufacturing memory devices Grant 8,232,203 - Yang July 31, 2 | 2012-07-31 |
Multilayer Connection Structure and Making Method App 20120181701 - Chen; Shih-Hung ;   et al. | 2012-07-19 |
Method of forming mark in IC-fabricating process Grant 8,183,123 - Yang May 22, 2 | 2012-05-22 |
Overlay mark, method of checking local aligmnent using the same and method of controlling overlay based on the same Grant 8,084,872 - Yang December 27, 2 | 2011-12-27 |
Wafer structure Grant 8,076,758 - Yang December 13, 2 | 2011-12-13 |
Overlay mark Grant 8,049,345 - Yang , et al. November 1, 2 | 2011-11-01 |
Method Of Forming Mark In Ic-fabricating Process App 20110263125 - Yang; Chin-Cheng | 2011-10-27 |
Method of patterning target layer on substrate Grant 8,012,675 - Yang September 6, 2 | 2011-09-06 |
Method of forming mark in IC-fabricating process Grant 7,998,826 - Yang August 16, 2 | 2011-08-16 |
Integrated Circuit Having Line End Created Through Use Of Mask That Controls Line End Shortening And Corner Rounding Arising From Proximity Effects App 20110191728 - Yang; Chin-Cheng ;   et al. | 2011-08-04 |
Overlay Mark App 20110169175 - Yang; Chin-Cheng ;   et al. | 2011-07-14 |
Methods Of Manufacturing Memory Devices App 20110159682 - YANG; Chin Cheng | 2011-06-30 |
Metal-to-contact Overlay Structures And Methods Of Manufacturing The Same App 20110156259 - Yang; Chin Cheng | 2011-06-30 |
Semiconductor Memory Devices And Methods Of Manufacturing The Same App 20110127632 - Yang; Chin Cheng | 2011-06-02 |
Overlay mark arrangement for reducing overlay shift Grant 7,952,213 - Yang , et al. May 31, 2 | 2011-05-31 |
Mask for controlling line end shortening and corner rounding arising from proximity effects Grant 7,939,225 - Yang , et al. May 10, 2 | 2011-05-10 |
Wafer Structure App 20110089578 - Yang; Chin-Cheng | 2011-04-21 |
Method of improving overlay performance in semiconductor manufacture Grant 7,927,960 - Yang , et al. April 19, 2 | 2011-04-19 |
Photomask structure Grant 7,923,175 - Huang , et al. April 12, 2 | 2011-04-12 |
Exposure process and photomask set used therein Grant 7,901,872 - Huang , et al. March 8, 2 | 2011-03-08 |
Method of enabling alignment of wafer in exposure step of IC process after UV-blocking metal layer is formed over the whole wafer Grant 7,880,274 - Yang February 1, 2 | 2011-02-01 |
Patterning process Grant 7,862,986 - Yang January 4, 2 | 2011-01-04 |
Method And Apparatus For Transferring Substrate App 20100310342 - YANG; CHIN-CHENG | 2010-12-09 |
Overlay mark and application thereof Grant 7,684,040 - Yang March 23, 2 | 2010-03-23 |
Method Of Patterning Target Layer On Substrate App 20100068657 - Yang; Chin-Cheng | 2010-03-18 |
Method For Patterning Material Layer App 20100035191 - Huang; Chih-Hao ;   et al. | 2010-02-11 |
Process monitor mark and the method for using the same Grant 7,652,284 - Yang January 26, 2 | 2010-01-26 |
Method for determining an overlay correlation set Grant 7,645,546 - Yang , et al. January 12, 2 | 2010-01-12 |
Overlay Mark, Method Of Checking Local Aligmnent Using The Same And Method Of Controlling Overlay Based On The Same App 20100002933 - Yang; Chin-Cheng | 2010-01-07 |
Baking Apparatus, Baking Mehod And Method Of Reducing Gap Width App 20090286407 - Yang; Chin-Cheng | 2009-11-19 |
Method for fabricating semiconductor wafer with enhanced alignment performance Grant 7,611,961 - Yang November 3, 2 | 2009-11-03 |
Method for checking alignment accuracy using overlay mark Grant 7,599,063 - Yang October 6, 2 | 2009-10-06 |
Photomask and method of manufacturing the same Grant 7,566,516 - Yang July 28, 2 | 2009-07-28 |
Method of exposure for lithography process and mask therefor Grant 7,566,526 - Yang July 28, 2 | 2009-07-28 |
Method for forming shallow trench isolation region Grant 7,563,690 - Yang July 21, 2 | 2009-07-21 |
Mask for Controlling Line End Shortening and Corner Rounding Arising from Proximity Effects App 20090176069 - Yang; Chin-Cheng ;   et al. | 2009-07-09 |
Overlay Mark And Method For Forming The Same App 20090134531 - Yang; Chin-Cheng | 2009-05-28 |
Patterning Process App 20090130612 - Yang; Chin-Cheng | 2009-05-21 |
Patterning Process App 20090104564 - Yang; Chin-Cheng | 2009-04-23 |
Alignment Mark And Mehtod For Forming The Same App 20090096116 - Yang; Chin-Cheng | 2009-04-16 |
Method Of Forming Mark In Ic-fabricating Process App 20090068843 - Yang; Chin-Cheng | 2009-03-12 |
Mixing and matching method and integration system for providing backup strategries for optical environments and method for operating the same Grant 7,493,588 - Yang February 17, 2 | 2009-02-17 |
Method Of Enabling Alignment Of Wafer In Exposure Step Of Ic Process After Uv-blocking Metal Layer Is Formed Over The Whole Wafer App 20080315373 - Yang; Chin-Cheng | 2008-12-25 |
Overlay Mark And Application Thereof App 20080304063 - Yang; Chin-Cheng | 2008-12-11 |
Exposure Process And Photomask Set Used Therein App 20080292974 - Huang; Chih-Hao ;   et al. | 2008-11-27 |
Pattern registration mark designs for use in photolithography and methods of using the same Grant 7,449,792 - Yang , et al. November 11, 2 | 2008-11-11 |
Semiconductor Structure App 20080268350 - Yang; Chin-Cheng | 2008-10-30 |
Overlay mark, method for forming the same and application thereof Grant 7,432,605 - Huang , et al. October 7, 2 | 2008-10-07 |
Method For Checking Alignment Accuracy Using Overlay Mark App 20080242043 - Yang; Chin-Cheng | 2008-10-02 |
Photomask with alignment marks for the current layer Grant 7,413,834 - Yang August 19, 2 | 2008-08-19 |
Method For Fabricating Semiconductor Wafer With Enhanced Alignment Performance App 20080153249 - Yang; Chin-Cheng | 2008-06-26 |
Method of improving overlay performance in semiconductor manufacture App 20080136049 - Yang; Chin Cheng ;   et al. | 2008-06-12 |
Overlay Mark, Method For Forming The Same And Application Thereof App 20080122124 - Huang; Chih-Hao ;   et al. | 2008-05-29 |
Method of fabricating shallow trench isolation structure Grant 7,358,145 - Yang April 15, 2 | 2008-04-15 |
Photomask With Alignment Marks For The Current Layer App 20080076037 - Yang; Chin-Cheng | 2008-03-27 |
Method of fabricating shallow trench isolation structure App 20070293017 - Yang; Chin-Cheng | 2007-12-20 |
Overlay Mark Arrangement for Reducing Overlay Shift App 20070258637 - Yang; Chin Cheng ;   et al. | 2007-11-08 |
Pattern registration mark designs for use in photolithography and methods of using the same App 20070246843 - Yang; Chin Cheng ;   et al. | 2007-10-25 |
Method for Forming Shallow Trench Isolation Region App 20070238260 - Yang; Chin Cheng | 2007-10-11 |
Photomask Structure App 20070190431 - Huang; Chun-Chung ;   et al. | 2007-08-16 |
Method for determining an overlay correlation set App 20070184628 - Yang; Chin-Cheng ;   et al. | 2007-08-09 |
Process monitor mark and the method for using the same App 20070178659 - Yang; Chin-Cheng | 2007-08-02 |
Method to prevent anti-assist feature and side lobe from printing out App 20070092843 - Yang; Chin Cheng | 2007-04-26 |
Method to form photo patterns App 20070092844 - Yang; Chin Cheng | 2007-04-26 |
Integration system and the method for operating the same App 20070026322 - Yang; Chin-Cheng | 2007-02-01 |
Photomask and method of manufacturing the same App 20060281019 - Yang; Chin-Cheng | 2006-12-14 |
Method of exposure for lithography process and mask therefor App 20060134565 - Yang; Chin Cheng | 2006-06-22 |
Mask for reducing proximity effect Grant 6,983,444 - Yang January 3, 2 | 2006-01-03 |
Methods for forming a photoresist pattern using an anti-optical proximity effect Grant 6,905,899 - Yang June 14, 2 | 2005-06-14 |
Methods for forming a photoresist pattern using an anti-optical proximity effect App 20050064728 - Yang, Chin-Cheng | 2005-03-24 |
Fine line printing by trimming the sidewalls of pre-developed resist image Grant 6,864,185 - Yang , et al. March 8, 2 | 2005-03-08 |
Mask for reducing proximity effect App 20050026047 - Yang, Chin Cheng | 2005-02-03 |
Fine line printing by trimming the sidewalls of pre-developed resist image App 20040170929 - Yang, Ta-Hung ;   et al. | 2004-09-02 |
Character display system Grant 4,581,611 - Yang , et al. April 8, 1 | 1986-04-08 |