loadpatents
Patent applications and USPTO patent grants for Yang; Chi-Ming.The latest application filed is for "heat dissipation structure, semiconductor packaging device, and manufacturing method of the semiconductor packaging device".
Patent | Date |
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Heat dissipation structure, semiconductor packaging device, and manufacturing method of the semiconductor packaging device Grant 11,450,586 - Chen , et al. September 20, 2 | 2022-09-20 |
Heat Dissipation Structure, Semiconductor Packaging Device, And Manufacturing Method Of The Semiconductor Packaging Device App 20220262701 - CHEN; Jia-Liang ;   et al. | 2022-08-18 |
Biological Chip Testing System App 20220244216 - Yang; Chi-Ming | 2022-08-04 |
Semiconductor lithography system and/or method Grant 11,402,761 - Wu , et al. August 2, 2 | 2022-08-02 |
Probing System For Discrete Wafer App 20220163563 - HSU; Wen-Yuan ;   et al. | 2022-05-26 |
Photoresist For Semiconductor Fabrication App 20220100087 - Liu; Chih-Cheng ;   et al. | 2022-03-31 |
In-Situ Deposition and Densification Treatment for Metal-Comprising Resist Layer App 20220100088 - Kuo; Yi-Chen ;   et al. | 2022-03-31 |
Photoresist For Semiconductor Fabrication App 20220100086 - Liu; Chih-Cheng ;   et al. | 2022-03-31 |
Semiconductor devices employing a barrier layer Grant 11,264,321 - Chang Chien , et al. March 1, 2 | 2022-03-01 |
Ellipsometer and method for estimating thickness of film Grant 11,255,658 - Hsu , et al. February 22, 2 | 2022-02-22 |
Method Of Manufacturing A Semiconductor Device And Pattern Formation Method App 20220005687 - LIU; Chih-Cheng ;   et al. | 2022-01-06 |
Apparatus and method for generating an electromagnetic radiation Grant 11,199,767 - Lee , et al. December 14, 2 | 2021-12-14 |
Semiconductor Lithography System And/or Method App 20210364930 - Wu; Tsiao-Chen ;   et al. | 2021-11-25 |
Apparatus and method for generating an electromagnetic radiation Grant 11,153,957 - Hsu , et al. October 19, 2 | 2021-10-19 |
Method Of Manufacturing A Semiconductor Device App 20210305047 - WEI; Jia-Lin ;   et al. | 2021-09-30 |
Method Of Manufacturing A Semiconductor Device App 20210302839 - LIU; Chih-Cheng ;   et al. | 2021-09-30 |
Method Of Manufacturing A Semiconductor Device App 20210302833 - WENG; Ming-Hui ;   et al. | 2021-09-30 |
Photoresist Layer Surface Treatment, Cap Layer, And Method Of Forming Photoresist Pattern App 20210305040 - KUO; Yi-Chen ;   et al. | 2021-09-30 |
Optical module Grant 11,125,968 - Yang , et al. September 21, 2 | 2021-09-21 |
Method For Forming A Semiconductor Structure Using Dehydrating Chemical, And Method For Forming A Semiconductor Structure App 20210265221 - LEE; CHUNG-CHIEH ;   et al. | 2021-08-26 |
3D IC bump height metrology APC Grant 11,075,097 - Cheng , et al. July 27, 2 | 2021-07-27 |
Wafer Polishing Head, System Thereof, And Method Using The Same App 20210220965 - HWANG; JAMES JENG-JYI ;   et al. | 2021-07-22 |
Flexible framework for secure search Grant 11,038,867 - Krishnaprasad , et al. June 15, 2 | 2021-06-15 |
Method for forming a semiconductor structure using dehydrating chemical, and method for forming a semiconductor structure Grant 11,004,746 - Lee , et al. May 11, 2 | 2021-05-11 |
Method of manufacturing semiconductor structure Grant 10,991,604 - Hsu , et al. April 27, 2 | 2021-04-27 |
Organometallic Cluster Photoresists For Euv Lithography App 20210087210 - Chang; Hsu-Kai ;   et al. | 2021-03-25 |
Device And Methods For Chemical Mechanical Polishing App 20210039223 - HWANG; JAMES JENG-JYI ;   et al. | 2021-02-11 |
Light generation system using metal-nonmetal compound as precursor and related light generation method Grant 10,880,982 - Hsu , et al. December 29, 2 | 2020-12-29 |
Apparatus and methods for chemical mechanical polishing Grant 10,875,148 - Peng , et al. December 29, 2 | 2020-12-29 |
Apparatus and methods for chemical mechanical polishing Grant 10,875,143 - Hwang , et al. December 29, 2 | 2020-12-29 |
Method For Manufacturing Semiconductor Structure App 20200402806 - CHENG; NAI-HAN ;   et al. | 2020-12-24 |
Ellipsometer And Method For Estimating Thickness Of Film App 20200386539 - HSU; FENG YUAN ;   et al. | 2020-12-10 |
Method and apparatus for performing a polishing process in semiconductor fabrication Grant 10,857,649 - Lee , et al. December 8, 2 | 2020-12-08 |
Ellipsometer and method for estimating thickness of film Grant 10,760,896 - Hsu , et al. Sep | 2020-09-01 |
Semiconductor manufacturing apparatus and method thereof Grant 10,763,117 - Cheng , et al. Sep | 2020-09-01 |
Method of planarizing a wafer Grant 10,668,592 - Lee , et al. | 2020-06-02 |
Method For Forming A Semiconductor Structure Using Dehydrating Chemical, And Method For Forming A Semiconductor Structure App 20200168508 - LEE; CHUNG-CHIEH ;   et al. | 2020-05-28 |
Optical Module App 20200150382 - YANG; Chi-Ming ;   et al. | 2020-05-14 |
3d Ic Bump Height Metrology Apc App 20200152495 - Cheng; Nai-Han ;   et al. | 2020-05-14 |
Apparatus And Method For Generating An Electromagnetic Radiation App 20200137863 - HSU; TZU JENG ;   et al. | 2020-04-30 |
Apparatus And Method For Generating An Electromagnetic Radiation App 20200117076 - LEE; CHUNG-CHIEH ;   et al. | 2020-04-16 |
Ellipsometer And Method For Estimating Thickness Of Film App 20200072598 - HSU; FENG YUAN ;   et al. | 2020-03-05 |
Metrology Method App 20200066606 - LIN; Su-Horng ;   et al. | 2020-02-27 |
Semiconductor Devices Employing a Barrier Layer App 20200066633 - Chang Chien; Ying-Hsueh ;   et al. | 2020-02-27 |
Light Generation System Using Metal-nonmetal Compound As Precursor And Related Light Generation Method App 20200045801 - HSU; CHING-HSIANG ;   et al. | 2020-02-06 |
Apparatus And Methods For Chemical Mechanical Polishing App 20200039019 - HWANG; JAMES JENG-JYI ;   et al. | 2020-02-06 |
Method Of Manufacturing Semiconductor Structure App 20200035524 - HSU; JYH-SHIOU ;   et al. | 2020-01-30 |
3D IC bump height metrology APC Grant 10,541,164 - Cheng , et al. Ja | 2020-01-21 |
Gigasonic cleaning techniques Grant 10,512,946 - Chien , et al. Dec | 2019-12-24 |
High throughput CMP platform Grant 10,513,006 - Wu , et al. Dec | 2019-12-24 |
Apparatus and method for generating an electromagnetic radiation Grant 10,509,311 - Lee , et al. Dec | 2019-12-17 |
Apparatus for particle cleaning Grant 10,507,498 - Chang Chien , et al. Dec | 2019-12-17 |
Semiconductor devices employing a barrier layer Grant 10,510,655 - Chang Chien , et al. Dec | 2019-12-17 |
Apparatus And Methods For Chemical Mechanical Polishing App 20190375071 - PENG; HE HUI ;   et al. | 2019-12-12 |
Apparatus And Method For Generating An Electromagnetic Radiation App 20190369481 - LEE; CHUNG-CHIEH ;   et al. | 2019-12-05 |
Flexible Framework For Secure Search App 20190364029 - Krishnaprasad; Muralidhar ;   et al. | 2019-11-28 |
Metrology device and metrology method thereof Grant 10,460,999 - Lin , et al. Oc | 2019-10-29 |
Flexible framework for secure search Grant 10,382,421 - Krishnaprasad , et al. A | 2019-08-13 |
3d Ic Bump Height Metrology Apc App 20190139800 - Cheng; Nai-Han ;   et al. | 2019-05-09 |
Method of selectively removing silicon nitride and single wafer etching apparatus thereof Grant 10,269,591 - Changchien , et al. | 2019-04-23 |
3D IC bump height metrology APC Grant 10,181,415 - Cheng , et al. Ja | 2019-01-15 |
Bottom-up PEALD proces Grant 10,121,653 - Wu , et al. November 6, 2 | 2018-11-06 |
Multi-zone temperature control for semiconductor wafer Grant 10,113,233 - Chang , et al. October 30, 2 | 2018-10-30 |
Multi-point chemical mechanical polishing end point detection system and method of using Grant 10,090,207 - Wu , et al. October 2, 2 | 2018-10-02 |
Chemical mechanical polishing (CMP) platform for local profile control Grant 10,065,288 - Wu , et al. September 4, 2 | 2018-09-04 |
Composition for chemical mechanical polishing and method for reducing chemical mechanical polishing surface defects Grant 10,066,127 - Yu , et al. September 4, 2 | 2018-09-04 |
pH-adjuster free chemical mechanical planarization slurry Grant 10,035,929 - Huang , et al. July 31, 2 | 2018-07-31 |
Fine temperature controllable wafer heating system Grant 10,020,209 - Chien , et al. July 10, 2 | 2018-07-10 |
Apparatus and process of electro-chemical plating Grant 10,011,918 - Changchien , et al. July 3, 2 | 2018-07-03 |
Semiconductor Manufacturing Apparatus And Method Thereof App 20180166291 - CHENG; NAI-HAN ;   et al. | 2018-06-14 |
Flexible Framework For Secure Search App 20180124031 - Krishnaprasad; Muralidhar ;   et al. | 2018-05-03 |
Method of identifying airborne molecular contamination source Grant 9,958,424 - Chuang , et al. May 1, 2 | 2018-05-01 |
3d Ic Bump Height Metrology Apc App 20180096872 - Cheng; Nai-Han ;   et al. | 2018-04-05 |
Defect inspection and repairing method and associated system and non-transitory computer readable medium Grant 9,929,045 - Cheng , et al. March 27, 2 | 2018-03-27 |
Wafer processing system using multi-zone chuck Grant 9,892,954 - Cheng , et al. February 13, 2 | 2018-02-13 |
Semiconductor manufacturing apparatus and method thereof Grant 9,892,931 - Cheng , et al. February 13, 2 | 2018-02-13 |
Defect Inspection And Repairing Method And Associated System And Non-transitory Computer Readable Medium App 20180019166 - CHENG; NAI-HAN ;   et al. | 2018-01-18 |
Composition For Chemical Mechanical Polishing And Method For Reducing Chemical Mechanical Polishing Surface Defects App 20180016467 - YU; AN-DIH ;   et al. | 2018-01-18 |
Solid precursor delivery method using liquid solvent for thin film deposition Grant 9,869,018 - Lee , et al. January 16, 2 | 2018-01-16 |
Ion implantation with charge and direction control Grant 9,865,429 - Hwang , et al. January 9, 2 | 2018-01-09 |
Pellicle and method for manufacturing the same Grant 9,864,270 - Ma , et al. January 9, 2 | 2018-01-09 |
3D IC bump height metrology APC Grant 9,859,139 - Cheng , et al. January 2, 2 | 2018-01-02 |
Flexible authentication framework Grant 9,853,962 - Krishnaprasad , et al. December 26, 2 | 2017-12-26 |
Apparatus For Particle Cleaning App 20170361361 - CHANG CHIEN; YING-HSUEH ;   et al. | 2017-12-21 |
Ion beam dimension control for ion implantation process and apparatus, and advanced process control Grant 9,805,913 - Hwang , et al. October 31, 2 | 2017-10-31 |
Solid Precursor Delivery Method Using Liquid Solvent for Thin Film Deposition App 20170306485 - Lee; Chung-Chieh ;   et al. | 2017-10-26 |
Method of selectively removing silicon nitride and etching apparatus thereof Grant 9,799,530 - Changchien , et al. October 24, 2 | 2017-10-24 |
Apparatus and methods for movable megasonic wafer probe Grant 9,764,364 - Chang Chien , et al. September 19, 2 | 2017-09-19 |
Hard mask removal scheme Grant 9,754,796 - Changchien , et al. September 5, 2 | 2017-09-05 |
Reactive radical treatment for polymer removal and workpiece cleaning Grant 9,741,585 - Lee , et al. August 22, 2 | 2017-08-22 |
Pellicle And Method For Manufacturing The Same App 20170205705 - Ma; Jeng-Shin ;   et al. | 2017-07-20 |
Apparatus and method of cleaning wafers Grant 9,691,641 - Huang , et al. June 27, 2 | 2017-06-27 |
pH-ADJUSTER FREE CHEMICAL MECHANICAL PLANARIZATION SLURRY App 20170152402 - Huang; Shu-Hao ;   et al. | 2017-06-01 |
Gigasonic Cleaning Techniques App 20170066021 - Chien; Ying-Hsueh Chang ;   et al. | 2017-03-09 |
System and method of cleaning FOUP Grant 9,579,697 - Hsu , et al. February 28, 2 | 2017-02-28 |
Flexible Authentication Framework App 20170039282 - Krishnaprasad; Muralidhar ;   et al. | 2017-02-09 |
Method of fabricating an integrated circuit device Grant 9,564,509 - Yeh , et al. February 7, 2 | 2017-02-07 |
Multi-zone Temperature Control For Semiconductor Wafer App 20170022611 - CHANG; Chun-Lin ;   et al. | 2017-01-26 |
3d Ic Bump Height Metrology Apc App 20170018445 - Cheng; Nai-Han ;   et al. | 2017-01-19 |
Device manufacturing cleaning process using vaporized solvent Grant 9,536,757 - Chen , et al. January 3, 2 | 2017-01-03 |
In-situ charging neutralization Grant 9,530,617 - Wu , et al. December 27, 2 | 2016-12-27 |
Flexible authentication framework Grant 9,479,494 - Krishnaprasad , et al. October 25, 2 | 2016-10-25 |
Flexible authentication framework Grant 9,467,437 - Krishnaprasad , et al. October 11, 2 | 2016-10-11 |
Systems and methods for fabricating and orienting semiconductor wafers Grant 9,449,864 - Lin , et al. September 20, 2 | 2016-09-20 |
Method for monitoring ion implantation Grant 9,449,889 - Chang , et al. September 20, 2 | 2016-09-20 |
Fine Temperature Controllable Wafer Heating System App 20160268147 - Chien; Ying-Hsueh Chang ;   et al. | 2016-09-15 |
Layer by layer electro chemical plating (ECP) process Grant 9,435,048 - Lin , et al. September 6, 2 | 2016-09-06 |
Methods for real-time error detection in CMP processing Grant 9,403,254 - Hwang , et al. August 2, 2 | 2016-08-02 |
Apparatus And Process Of Electro-chemical Plating App 20160177467 - CHANGCHIEN; Ying-Hsueh ;   et al. | 2016-06-23 |
Metal conductor chemical mechanical polish Grant 9,368,452 - Huang , et al. June 14, 2 | 2016-06-14 |
Hard Mask Removal Scheme App 20160155646 - CHANGCHIEN; Ying-Hsueh ;   et al. | 2016-06-02 |
Fine temperature controllable wafer heating system Grant 9,349,623 - Chien , et al. May 24, 2 | 2016-05-24 |
Method Of Planarizing A Wafer App 20160136776 - LEE; Bo-I ;   et al. | 2016-05-19 |
Flexible Authentication Framework App 20160119321 - Krishnaprasad; Muralidhar ;   et al. | 2016-04-28 |
Method and apparatus for controlling beam angle during ion implantation of a semiconductor wafer based upon pressure Grant 9,315,892 - Cheng , et al. April 19, 2 | 2016-04-19 |
Semiconductor device cleaning method and apparatus Grant 9,299,593 - Yeh , et al. March 29, 2 | 2016-03-29 |
Method Of Manufacturing Cerium Dioxide Powder And Cerium Dioxide Powder App 20160075564 - HUANG; Shu-Hao ;   et al. | 2016-03-17 |
Hard mask removal scheme Grant 9,287,133 - Changchien , et al. March 15, 2 | 2016-03-15 |
Flexible Authentication Framework App 20160055209 - Krishnaprasad; Muralidhar ;   et al. | 2016-02-25 |
Substrate rapid thermal heating system and methods Grant 9,239,192 - Cheng , et al. January 19, 2 | 2016-01-19 |
Bottom-up Peald Process App 20160013043 - Wu; Lin-Jung ;   et al. | 2016-01-14 |
Integration of bottom-up metal film deposition Grant 9,214,543 - Lin , et al. December 15, 2 | 2015-12-15 |
Chemical Mechanical Polishing (cmp) Platform For Local Profile Control App 20150352686 - Wu; Jiann Lih ;   et al. | 2015-12-10 |
Bottom-up PEALD process Grant 9,184,045 - Wu , et al. November 10, 2 | 2015-11-10 |
Flexible authentication framework Grant 9,177,124 - Krishnaprasad , et al. November 3, 2 | 2015-11-03 |
Method and structure for advanced semiconductor channel substrate materials Grant 9,165,835 - Yeh , et al. October 20, 2 | 2015-10-20 |
Ion Beam Dimension Control For Ion Implantation Process And Apparatus, And Advanced Process Control App 20150270103 - HWANG; Chih-Hong ;   et al. | 2015-09-24 |
CMP pad cleaning apparatus Grant 9,138,861 - Wu , et al. September 22, 2 | 2015-09-22 |
Hard Mask Removal Scheme App 20150255303 - CHANGCHIEN; YING-HSUEH ;   et al. | 2015-09-10 |
Method for Monitoring Ion Implantation App 20150221561 - Chang; Chun-Lin ;   et al. | 2015-08-06 |
Multi-zone Temperature Control For Semiconductor Wafer App 20150211122 - CHANG; Chun-Lin ;   et al. | 2015-07-30 |
Ion beam dimension control for ion implantation process and apparatus, and advanced process control Grant 9,070,534 - Hwang , et al. June 30, 2 | 2015-06-30 |
System and method of ion neutralization with multiple-zoned plasma flood gun Grant 9,053,907 - Chang , et al. June 9, 2 | 2015-06-09 |
Methods for forming integrated circuits Grant 9,048,186 - Huang , et al. June 2, 2 | 2015-06-02 |
Metrology Device And Metrology Method Thereof App 20150146841 - LIN; Su-Horng ;   et al. | 2015-05-28 |
Multi-factor advanced process control method and system for integrated circuit fabrication Grant 9,031,684 - Cheng , et al. May 12, 2 | 2015-05-12 |
Multi-zone temperature control for semiconductor wafer Grant 9,023,664 - Chang , et al. May 5, 2 | 2015-05-05 |
Method Of Fabricating An Integrated Circuit Device App 20150118807 - YEH; Ming-Hsi ;   et al. | 2015-04-30 |
Apparatus and Methods for Movable Megasonic Wafer Probe App 20150107634 - Chang Chien; Ying-Hsueh ;   et al. | 2015-04-23 |
Method Of Selectively Removing Silicon Nitride And Etching Apparatus Thereof App 20150111311 - CHANGCHIEN; Ying-Hsueh ;   et al. | 2015-04-23 |
Method Of Selectively Removing Silicon Nitride And Single Wafer Etching Apparatus Thereof App 20150111390 - CHANGCHIEN; Ying-Hsueh ;   et al. | 2015-04-23 |
Wafer Particle Removal App 20150107619 - Wu; Jiann Lih ;   et al. | 2015-04-23 |
Semiconductor Manufacturing Apparatus And Method Thereof App 20150104949 - CHENG; NAI-HAN ;   et al. | 2015-04-16 |
Apparatus for monitoring ion implantation Grant 9,006,676 - Chang , et al. April 14, 2 | 2015-04-14 |
Device Manufacturing Cleaning Process Using Vaporized Solvent App 20150068559 - Chen; Albert Po Chia ;   et al. | 2015-03-12 |
ION Implantation with Charge and Direction Control App 20150069913 - Hwang; Chih-Hong ;   et al. | 2015-03-12 |
N/P metal crystal orientation for high-k metal gate Vt modulation Grant 8,932,921 - Lin , et al. January 13, 2 | 2015-01-13 |
Systems And Methods For Fabricating And Orienting Semiconductor Wafers App 20150009499 - LIN; Chin-Ming ;   et al. | 2015-01-08 |
Apparatus and methods for movable megasonic wafer probe Grant 8,926,762 - Chien , et al. January 6, 2 | 2015-01-06 |
Semiconductor Devices Employing a Barrier Layer App 20150001723 - Chien; Ying-Hsueh Chang ;   et al. | 2015-01-01 |
Method of fabricating an integrated circuit device Grant 08921177 - | 2014-12-30 |
Ion implantation with charge and direction control Grant 8,922,122 - Hwang , et al. December 30, 2 | 2014-12-30 |
Ion implantation with charge and direction control Grant 08922122 - | 2014-12-30 |
Method of fabricating an integrated circuit device Grant 8,921,177 - Yeh , et al. December 30, 2 | 2014-12-30 |
Methods for fabricating and orienting semiconductor wafers Grant 8,871,605 - Lin , et al. October 28, 2 | 2014-10-28 |
Semiconductor devices and methods of manufacture thereof Grant 8,871,639 - Chien , et al. October 28, 2 | 2014-10-28 |
Beam Monitoring Device, Method, and System App 20140306119 - Hwang; Chih-Hong ;   et al. | 2014-10-16 |
Frame cell for shot layout flexibility Grant 8,843,860 - Lin , et al. September 23, 2 | 2014-09-23 |
Ion Implantation App 20140273420 - Cheng; Nai-Han ;   et al. | 2014-09-18 |
Fine Temperature Controllable Wafer Heating System App 20140273302 - Chien; Ying-Hsueh Chang ;   et al. | 2014-09-18 |
Layer by Layer Electro Chemical Plating (ECP) Process App 20140238864 - Lin; Su-Horng ;   et al. | 2014-08-28 |
Substrate Rapid Thermal Heating System And Methods App 20140235071 - CHENG; Nai-Han ;   et al. | 2014-08-21 |
Bottom-Up PEALD Process App 20140227861 - Wu; Lin-Jung ;   et al. | 2014-08-14 |
High Throughput Cmp Platform App 20140220863 - Wu; Jiann Lih ;   et al. | 2014-08-07 |
In-Situ Charging Neutralization App 20140210506 - Wu; Lin-Jung ;   et al. | 2014-07-31 |
Wafer Processing System Using Multi-zone Chuck App 20140202383 - CHENG; Nai-Han ;   et al. | 2014-07-24 |
Method And Device For Cleaning A Brush Surface Having A Contamination App 20140196744 - WU; Jiann-Lih ;   et al. | 2014-07-17 |
Semiconductor Devices and Methods of Manufacture Thereof App 20140191400 - Chien; Ying-Hsueh Chang ;   et al. | 2014-07-10 |
Beam monitoring device, method, and system Grant 8,766,207 - Hwang , et al. July 1, 2 | 2014-07-01 |
Finlike structures and methods of making same Grant 8,759,173 - Yeh , et al. June 24, 2 | 2014-06-24 |
Apparatus And Method Of Cleaning Wafers App 20140166055 - HUANG; Chia-Hung ;   et al. | 2014-06-19 |
Metal Conductor Chemical Mechanical Polish App 20140159243 - Huang; Soon-Kang ;   et al. | 2014-06-12 |
System And Method Of Cleaning Foup App 20140158172 - Hsu; Jyh-Shiou ;   et al. | 2014-06-12 |
N/P METAL CRYSTAL ORIENTATION FOR HIGH-K METAL GATE Vt MODULATION App 20140154848 - Lin; Su-Horng ;   et al. | 2014-06-05 |
Multi-point Chemical Mechanical Polishing End Point Detection System And Method Of Using App 20140148008 - WU; Jiann Lih ;   et al. | 2014-05-29 |
Wafer processing method and system using multi-zone chuck Grant 8,709,528 - Cheng , et al. April 29, 2 | 2014-04-29 |
Method Of Identifying Airborne Molecular Contamination Source App 20140095083 - Chuang; Tzu-Sou ;   et al. | 2014-04-03 |
N/P metal crystal orientation for high-K metal gate Vt modulation Grant 8,674,451 - Lin , et al. March 18, 2 | 2014-03-18 |
Metal conductor chemical mechanical polish Grant 8,673,783 - Kang , et al. March 18, 2 | 2014-03-18 |
System and method of ion beam source for semiconductor ion implantation Grant 8,664,622 - Hwang , et al. March 4, 2 | 2014-03-04 |
In-situ backside cleaning of semiconductor substrate Grant 8,657,963 - Yeh , et al. February 25, 2 | 2014-02-25 |
Finlike Structures And Methods Of Making Same App 20140024187 - Yeh; Ming-Hsi ;   et al. | 2014-01-23 |
Methods of fabricating metal hard masks Grant 8,623,468 - Lin , et al. January 7, 2 | 2014-01-07 |
Integrated apparatus to assure wafer quality and manufacturability Grant 8,616,821 - Ku , et al. December 31, 2 | 2013-12-31 |
Integrated apparatus to assure wafer quality and manufacturability Grant 08616821 - | 2013-12-31 |
Multi-ion beam implantation apparatus and method Grant 8,592,785 - Cheng , et al. November 26, 2 | 2013-11-26 |
Apparatus for monitoring ion implantation Grant 8,581,204 - Chang , et al. November 12, 2 | 2013-11-12 |
Ion Beam Dimension Control For Ion Implantation Process And Apparatus, And Advanced Process Control App 20130295753 - HWANG; Chih-Hong ;   et al. | 2013-11-07 |
Methods For Fabricating And Orienting Semiconductor Wafers App 20130280922 - LIN; Chin-Ming ;   et al. | 2013-10-24 |
Apparatus for Monitoring Ion Implantation App 20130280823 - Chang; Chun-Lin ;   et al. | 2013-10-24 |
Integration Of Bottom-up Metal Film Deposition App 20130270617 - LIN; Simon Su-Horng ;   et al. | 2013-10-17 |
System And Method Of Ion Beam Source For Semiconductor Ion Implantation App 20130270454 - HWANG; Chih-Hong ;   et al. | 2013-10-17 |
System And Method Of Ion Neutralization With Multiple-zoned Plasma Flood Gun App 20130264498 - CHANG; Chun-Lin ;   et al. | 2013-10-10 |
Finlike structures and methods of making same Grant 8,541,270 - Yeh , et al. September 24, 2 | 2013-09-24 |
Manufacture And Method Of Making The Same App 20130244552 - Lee; Bo-I ;   et al. | 2013-09-19 |
Cleaning process for semiconductor device fabrication Grant 8,518,634 - Yeh , et al. August 27, 2 | 2013-08-27 |
CMP Groove Depth and Conditioning Disk Monitoring App 20130217306 - Wu; Jiann Lih ;   et al. | 2013-08-22 |
Multiple Zone Temperature Control for CMP App 20130210173 - Wu; Jiann Lih ;   et al. | 2013-08-15 |
CMP Pad Cleaning Apparatus App 20130210323 - Wu; Jiann Lih ;   et al. | 2013-08-15 |
Metal Hard Mask Fabrication App 20130174982 - Lin; Su-Horng ;   et al. | 2013-07-11 |
Multi-zone Temperature Control For Semiconductor Wafer App 20130171746 - Chang; Chun-Lin ;   et al. | 2013-07-04 |
Wafer Processing Method And System Using Multi-zone Chuck App 20130171336 - CHENG; Nai-Han ;   et al. | 2013-07-04 |
Integration of bottom-up metal film deposition Grant 8,466,063 - Lin , et al. June 18, 2 | 2013-06-18 |
Ion Implantation With Charge And Direction Control App 20130140987 - Hwang; Chih-Hong ;   et al. | 2013-06-06 |
Multi-factor Advanced Process Control Method And System For Integrated Circuit Fabrication App 20130110276 - Cheng; Nai-Han ;   et al. | 2013-05-02 |
Finlike Structures and Methods of Making Same App 20130089958 - Yeh; Ming-Hsi ;   et al. | 2013-04-11 |
Multi-ion Beam Implantation Apparatus And Method App 20130075623 - CHENG; Nai-Han ;   et al. | 2013-03-28 |
In-situ Backside Cleaning Of Semiconductor Substrate App 20130074872 - Yeh; Ming-Hsi ;   et al. | 2013-03-28 |
Beam Monitoring Device, Method, And System App 20130075624 - Hwang; Chih-Hong ;   et al. | 2013-03-28 |
Method And Apparatus For Performing A Polishing Process In Semiconductor Fabrication App 20130078810 - Lee; Bo-I ;   et al. | 2013-03-28 |
Multi-surface Armrest App 20130076097 - CHEN; Yu-Ting ;   et al. | 2013-03-28 |
Multi-zone temperature control for semiconductor wafer Grant 8,404,572 - Chang , et al. March 26, 2 | 2013-03-26 |
Semiconductor Device Cleaning Method App 20130068248 - Yeh; Ming-Hsi ;   et al. | 2013-03-21 |
Apparatus for Monitoring Ion Implantation App 20130068960 - Chang; Chun-Lin ;   et al. | 2013-03-21 |
Apparatus and Methods for Movable Megasonic Wafer Probe App 20130056031 - Chien; Ying-Hsueh Chang ;   et al. | 2013-03-07 |
Method And Structure For Advanced Semiconductor Channel Substrate Materials App 20130052813 - YEH; Ming-Hsi ;   et al. | 2013-02-28 |
Apparatus and Methods for Real-Time Error Detection in CMP Processing App 20130044004 - Hwang; James Jeng-Jyi ;   et al. | 2013-02-21 |
Semiconductor Device Cleaning Method And Apparatus App 20130045606 - Yeh; Ming-Hsi ;   et al. | 2013-02-21 |
Chemical Dispersion Method And Device App 20130034966 - Yeh; Ming-Hsi ;   et al. | 2013-02-07 |
Method Of Fabricating An Integrated Circuit Device App 20130023094 - YEH; Ming-Hsi ;   et al. | 2013-01-24 |
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