loadpatents
Patent applications and USPTO patent grants for Yang; Chan-Lon.The latest application filed is for "power rails for stacked semiconductor device".
Patent | Date |
---|---|
Epitaxial growth methods and structures thereof Grant 11,456,360 - Ueno , et al. September 27, 2 | 2022-09-27 |
Field effect transistors with negative capacitance layers Grant 11,437,371 - Yang , et al. September 6, 2 | 2022-09-06 |
Power Rails For Stacked Semiconductor Device App 20220270935 - YANG; Chansyun David ;   et al. | 2022-08-25 |
Plasma-assisted Etching Of Metal Oxides App 20220216064 - YANG; Chansyun David ;   et al. | 2022-07-07 |
Radical-activated Etching Of Metal Oxides App 20220199457 - YANG; Chansyun David ;   et al. | 2022-06-23 |
Power rails for stacked semiconductor device Grant 11,335,606 - Yang , et al. May 17, 2 | 2022-05-17 |
Plasma-assisted etching of metal oxides Grant 11,282,711 - Yang , et al. March 22, 2 | 2022-03-22 |
Radical-activated etching of metal oxides Grant 11,276,604 - Yang , et al. March 15, 2 | 2022-03-15 |
Power Rails For Stacked Semiconductor Device App 20220059414 - YANG; Chansyun David ;   et al. | 2022-02-24 |
Laser Interference Fringe Control For Higher Euv Light Source And Euv Throughput App 20220035253 - YANG; Chansyun David ;   et al. | 2022-02-03 |
Plasma-assisted Etching Of Metal Oxides App 20220037163 - YANG; Chansyun David ;   et al. | 2022-02-03 |
Field Effect Transistors With Negative Capacitance Layers App 20220013652 - Yang; Chansyun David ;   et al. | 2022-01-13 |
Field Effect Transistor With Negative Capacitance Dielectric Structures App 20210384323 - YANG; Chansyun David ;   et al. | 2021-12-09 |
Stacked Semiconductor Device App 20210376137 - YANG; Chansyun David ;   et al. | 2021-12-02 |
Laser interference fringe control for higher EUV light source and EUV throughput Grant 11,150,559 - Yang , et al. October 19, 2 | 2021-10-19 |
Semiconductor Device And Manufacturing Method Thereof App 20210305409 - WU; Zhi-Qiang ;   et al. | 2021-09-30 |
Field effect transistor with negative capacitance dieletric structures Grant 11,114,547 - Yang , et al. September 7, 2 | 2021-09-07 |
Semiconductor structure and fabrication method thereof Grant 11,075,282 - Liu , et al. July 27, 2 | 2021-07-27 |
Laser Interference Fringe Control For Higher Euv Light Source And Euv Throughput App 20210200102 - YANG; Chansyun David ;   et al. | 2021-07-01 |
Semiconductor device and manufacturing method thereof Grant 11,024,721 - Wu , et al. June 1, 2 | 2021-06-01 |
Field Effect Transistor With Negative Capacitance Dieletric Structures App 20210083074 - YANG; Chansyun David ;   et al. | 2021-03-18 |
Method For Manufacturing Semiconductor Device App 20210050451 - LIN; Che-Yu ;   et al. | 2021-02-18 |
Semiconductor Device And Manufacturing Method Thereof App 20210036154 - LI; Kun-Mu ;   et al. | 2021-02-04 |
Controlling profiles of replacement gates Grant 10,868,139 - Lin , et al. December 15, 2 | 2020-12-15 |
Semiconductor device having fins Grant 10,811,537 - Lin , et al. October 20, 2 | 2020-10-20 |
Epitaxial Growth Methods And Structures Thereof App 20200279920 - UENO; Tetsuji ;   et al. | 2020-09-03 |
Semiconductor device and manufacturing method thereof Grant 10,749,029 - Li , et al. A | 2020-08-18 |
Controlling profiles of replacement gates Grant 10,658,491 - Lin , et al. | 2020-05-19 |
Epitaxial growth methods and structures thereof Grant 10,658,468 - Ueno , et al. | 2020-05-19 |
Semiconductor Structure And Fabrication Method Thereof App 20200111893 - LIU; Kuo-An ;   et al. | 2020-04-09 |
Semiconductor Device And Manufacturing Method Thereof App 20200098890 - WU; Zhi-Qiang ;   et al. | 2020-03-26 |
Controlling Profiles of Replacement Gates App 20200006527 - Lin; Chih-Han ;   et al. | 2020-01-02 |
Semiconductor Structure And Fabrication Method Thereof App 20190386114 - LIU; Kuo-An ;   et al. | 2019-12-19 |
Controlling Profiles of Replacement Gates App 20190386115 - Lin; Chih-Han ;   et al. | 2019-12-19 |
Semiconductor structure and fabrication method thereof Grant 10,510,866 - Liu , et al. Dec | 2019-12-17 |
Epitaxial growth methods and structures thereof Grant 10,453,925 - Ueno , et al. Oc | 2019-10-22 |
Semiconductor Device And Manufacturing Method Thereof App 20190123201 - LI; Kun-Mu ;   et al. | 2019-04-25 |
Multiple gate field effect transistors having oxygen-scavenged gate stack Grant 10,263,091 - Yeo , et al. | 2019-04-16 |
Epitaxial Growth Methods And Structures Thereof App 20190109194 - Ueno; Tetsuji ;   et al. | 2019-04-11 |
Semiconductor device and manufacturing method thereof Grant 10,164,096 - Li , et al. Dec | 2018-12-25 |
Semiconductor Device Having Fins App 20180342621 - LIN; Che-Yu ;   et al. | 2018-11-29 |
Fin structure of semiconductor device, manufacturing method thereof, and manufacturing method of active region of semiconductor device Grant 10,026,843 - Lin , et al. July 17, 2 | 2018-07-17 |
Epitaxial Growth Methods And Structures Thereof App 20170221709 - Ueno; Tetsuji ;   et al. | 2017-08-03 |
Fin Structure Of Semiconductor Device, Manufacturing Method Thereof, And Manufacturing Method Of Active Region Of Semiconductor Device App 20170154996 - LIN; Che-Yu ;   et al. | 2017-06-01 |
Multiple gate field-effect transistors having oxygen-scavenged gate stack Grant 9,659,780 - Yeo , et al. May 23, 2 | 2017-05-23 |
Multiple Gate Field Effect Transistors Having Oxygen-Scavenged Gate Stack App 20170092732 - Yeo; Yee-Chia ;   et al. | 2017-03-30 |
Semiconductor Device And Manufacturing Method Thereof App 20170054023 - LI; Kun-Mu ;   et al. | 2017-02-23 |
Multiple gate field-effect transistors having oxygen-scavenged gate stack Grant 9,564,489 - Yeo , et al. February 7, 2 | 2017-02-07 |
Multi-Gate Field Effect Transistors Having Oxygen-Scavenged Gate Stack App 20160379831 - Yeo; Yee-Chia ;   et al. | 2016-12-29 |
Multiple Gate Field-effect Transistors Having Oxygen-scavenged Gate Stack App 20160380056 - Yeo; Yee-Chia ;   et al. | 2016-12-29 |
Metal Gate Structure And Manufacturing Method Thereof App 20150380512 - Yang; Chan-Lon ;   et al. | 2015-12-31 |
Metal gate structure and manufacturing method thereof Grant 9,166,020 - Yang , et al. October 20, 2 | 2015-10-20 |
Semiconductor Process App 20150104914 - Yang; Chan-Lon ;   et al. | 2015-04-16 |
Semiconductor device having metal gate and manufacturing method thereof Grant 8,999,830 - Liao , et al. April 7, 2 | 2015-04-07 |
Metal gate transistor and method for fabricating the same Grant 8,980,753 - Wang , et al. March 17, 2 | 2015-03-17 |
Semiconductor device having metal gate and manufacturing method thereof Grant 8,952,451 - Liao , et al. February 10, 2 | 2015-02-10 |
Polysilicon Layer App 20150021776 - Lin; Chien-Liang ;   et al. | 2015-01-22 |
Semiconductor process Grant 8,921,206 - Yang , et al. December 30, 2 | 2014-12-30 |
Semiconductor process Grant 08921206 - | 2014-12-30 |
Polysilicon layer and method of forming the same Grant 8,895,435 - Lin , et al. November 25, 2 | 2014-11-25 |
Strained silicon channel semiconductor structure Grant 8,853,740 - Yang , et al. October 7, 2 | 2014-10-07 |
Method of manufacturing semiconductor device having metal gates Grant 8,802,524 - Liao , et al. August 12, 2 | 2014-08-12 |
Semiconductor process Grant 8,765,588 - Huang , et al. July 1, 2 | 2014-07-01 |
Semiconductor Device Having Metal Gate And Manufacturing Method Thereof App 20140127892 - Liao; Po-Jui ;   et al. | 2014-05-08 |
Semiconductor device having metal gate and manufacturing method thereof Grant 8,704,294 - Liao , et al. April 22, 2 | 2014-04-22 |
Semiconductor Device Having Metal Gate And Manufacturing Method Thereof App 20140103443 - Liao; Po-Jui ;   et al. | 2014-04-17 |
Semiconductor Process App 20130337622 - Yang; Chan-Lon ;   et al. | 2013-12-19 |
Method of manufacturing semiconductor device having metal gate Grant 8,574,990 - Liao , et al. November 5, 2 | 2013-11-05 |
Semiconductor device and manufacturing method thereof Grant 8,575,043 - Yang , et al. November 5, 2 | 2013-11-05 |
Strained Silicon Channel Semiconductor Structure App 20130256701 - Yang; Chan-Lon ;   et al. | 2013-10-03 |
Semiconductor process Grant 8,536,072 - Yang , et al. September 17, 2 | 2013-09-17 |
Semiconductor Process App 20130203226 - Yang; Chan-Lon ;   et al. | 2013-08-08 |
Method of making strained silicon channel semiconductor structure Grant 8,476,169 - Yang , et al. July 2, 2 | 2013-07-02 |
Semiconductor Process App 20130137243 - Yang; Chan-Lon ;   et al. | 2013-05-30 |
Strained Silicon Channel Semiconductor Structure and Method of Making the Same App 20130092954 - Yang; Chan-Lon ;   et al. | 2013-04-18 |
Semiconductor Process App 20130078792 - Huang; Pong-Wey ;   et al. | 2013-03-28 |
Method of fabricating complementary metal-oxide-semiconductor (CMOS) device Grant 8,404,591 - Yeh , et al. March 26, 2 | 2013-03-26 |
Semiconductor Device And Manufacturing Method Thereof App 20130026543 - Yang; Chan-Lon ;   et al. | 2013-01-31 |
Method For Fabricating Semiconductor Device By Using Stress Memorization Technique App 20130023103 - YANG; Chan-Lon ;   et al. | 2013-01-24 |
Fabricating Method Of Mos Transistor, Fin Field-effect Transistor And Fabrication Method Thereof App 20130001707 - Lin; Chien-Liang ;   et al. | 2013-01-03 |
Semiconductor Device Having Metal Gate And Manufacturing Method Thereof App 20120313178 - Liao; Po-Jui ;   et al. | 2012-12-13 |
Method For Fabricating Semiconductor Device App 20120315734 - Yang; Chan-Lon ;   et al. | 2012-12-13 |
Semiconductor process having dielectric layer including metal oxide and MOS transistor process Grant 8,329,597 - Yang , et al. December 11, 2 | 2012-12-11 |
Method For Fabricating Semiconductor Device App 20120309171 - Lu; Tsuo-Wen ;   et al. | 2012-12-06 |
Method of fabricating a semiconductor structure Grant 8,324,059 - Guo , et al. December 4, 2 | 2012-12-04 |
Method of etching sacrificial layer Grant 8,298,950 - Yang , et al. October 30, 2 | 2012-10-30 |
Method Of Fabricating A Semiconductor Structure App 20120270377 - Guo; Ted Ming-Lang ;   et al. | 2012-10-25 |
Method of Manufacturing Semiconductor Device Having Metal Gates App 20120244669 - Liao; Po-Jui ;   et al. | 2012-09-27 |
Method Of Fabricating Complementary Metal-oxide-semiconductor (cmos) Device App 20120238065 - YEH; Chiu-Hsien ;   et al. | 2012-09-20 |
Semiconductor Process Having Dielectric Layer Including Metal Oxide And Mos Transistor Process App 20120231600 - Yang; Chan-Lon ;   et al. | 2012-09-13 |
Metal Gate Structure And Manufacturing Method Thereof App 20120223397 - Yang; Chan-Lon ;   et al. | 2012-09-06 |
Method of Manufacturing Semiconductor Device Having Metal Gate App 20120220113 - Liao; Po-Jui ;   et al. | 2012-08-30 |
Method for removing photoresist Grant 8,252,515 - Chien , et al. August 28, 2 | 2012-08-28 |
Polysilicon Layer And Method Of Forming The Same App 20120193796 - Lin; Chien-Liang ;   et al. | 2012-08-02 |
Method of fabricating complementary metal-oxide-semiconductor (CMOS) device Grant 8,211,801 - Yeh , et al. July 3, 2 | 2012-07-03 |
Metal Gate Transistor And Method For Fabricating The Same App 20120070995 - Wang; Yeng-Peng ;   et al. | 2012-03-22 |
Method Of Fabricating Complementary Metal-oxide-semiconductor (cmos) Device App 20120058634 - YEH; Chiu-Hsien ;   et al. | 2012-03-08 |
Method Of Etching Sacrificial Layer App 20120003835 - YANG; Chan-Lon ;   et al. | 2012-01-05 |
Self-aligned contact set Grant 8,058,733 - Yang November 15, 2 | 2011-11-15 |
Thermal Process App 20110177665 - Yang; Chan-Lon ;   et al. | 2011-07-21 |
Method For Removing Photoresist App 20110086499 - Chien; Chin-Cheng ;   et al. | 2011-04-14 |
Self-aligned Contact App 20100264550 - YANG; Chan-Lon | 2010-10-21 |
Thermal Processing Method App 20100255666 - YANG; Chan-Lon ;   et al. | 2010-10-07 |
Method of fabricating self-aligned contact Grant 7,772,064 - Yang August 10, 2 | 2010-08-10 |
Method Of Fabricating Self-aligned Contact App 20080217788 - Yang; Chan-Lon | 2008-09-11 |
Rapid Thermal Process Method And Rapid Thermal Process Device App 20080210667 - Yang; Chan-lon ;   et al. | 2008-09-04 |
Methods for cleaning contact openings to reduce contact resistance Grant 7,253,094 - Zhang , et al. August 7, 2 | 2007-08-07 |
Gate etch process Grant 7,112,834 - Schwarz , et al. September 26, 2 | 2006-09-26 |
In situ hard mask approach for self-aligned contact etch Grant 7,078,334 - Chowdhury , et al. July 18, 2 | 2006-07-18 |
Aluminum-filled via structure with barrier layer Grant 6,977,217 - Ben-Tzur , et al. December 20, 2 | 2005-12-20 |
Methods of forming semiconductor structures having reduced defects, and articles and devices formed thereby Grant 6,890,859 - Bamnolker , et al. May 10, 2 | 2005-05-10 |
Gate etch process Grant 6,699,795 - Schwarz , et al. March 2, 2 | 2004-03-02 |
Method of cleaning a dual damascene structure Grant 6,635,565 - Wu , et al. October 21, 2 | 2003-10-21 |
Plasma reactor using inductive RF coupling, and processes Grant 6,545,420 - Collins , et al. April 8, 2 | 2003-04-08 |
Method of forming dual damascene structure Grant 6,528,428 - Chen , et al. March 4, 2 | 2003-03-04 |
Plasma reactor using inductive RF coupling, and processes Grant 6,518,195 - Collins , et al. February 11, 2 | 2003-02-11 |
Magnetic confinement in a plasma reactor having an RF bias electrode Grant 6,488,807 - Collins , et al. December 3, 2 | 2002-12-03 |
Structure and method for making a notched transistor with spacers Grant 6,461,904 - Jin , et al. October 8, 2 | 2002-10-08 |
Method for processing substrates using gaseous silicon scavenger Grant 6,444,137 - Collins , et al. September 3, 2 | 2002-09-03 |
Method for avoiding erosion of conductor structure during removing etching residues App 20020115296 - Wu, Chih-Ning ;   et al. | 2002-08-22 |
Method of cleaning a dual damascene structure App 20020115284 - Wu, Chih-Ning ;   et al. | 2002-08-22 |
Method for removing etching residues App 20020113037 - Wu, Chih-Ning ;   et al. | 2002-08-22 |
Post Metal Etch Cleaning Method App 20020111033 - Wu, Chih-Ning ;   et al. | 2002-08-15 |
Method for raising etching selectivity of oxide to photoresist App 20020102500 - Hung, Lian-Fa ;   et al. | 2002-08-01 |
Plasma etching method Grant 6,406,640 - Yang , et al. June 18, 2 | 2002-06-18 |
High temperature silicon surface providing high selectivity in an oxide etch process Grant 6,399,514 - Marks , et al. June 4, 2 | 2002-06-04 |
Shrinking equal effect critical dimension of mask by in situ polymer deposition and etching Grant 6,368,974 - Tsai , et al. April 9, 2 | 2002-04-09 |
Processes Used In An Inductively Coupled Plasma Reactor App 20020004309 - COLLINS, KENNETH S. ;   et al. | 2002-01-10 |
Method for high-density plasma etching Grant 6,307,174 - Yang , et al. October 23, 2 | 2001-10-23 |
Method for cleaning the surface of a semiconductor wafer Grant 6,303,482 - Wu , et al. October 16, 2 | 2001-10-16 |
Method For Controlling Critical Dimension Of Contact Opening App 20010023132 - CHEN, TONG-YU ;   et al. | 2001-09-20 |
Method Of Manufacturing Metallic Interconnects App 20010014529 - CHEN, TONG-YU ;   et al. | 2001-08-16 |
Method for removing photoresist layer App 20010005638 - Yang, Chan-Lon ;   et al. | 2001-06-28 |
Eliminating etching microloading effect by in situ deposition and etching Grant 6,251,791 - Tsai , et al. June 26, 2 | 2001-06-26 |
Plasma etch processes Grant 6,251,792 - Collins , et al. June 26, 2 | 2001-06-26 |
Method of cleaning the polymer from within holes on a semiconductor wafer Grant 6,221,772 - Yang , et al. April 24, 2 | 2001-04-24 |
Method for removing photoresist layer Grant 6,218,084 - Yang , et al. April 17, 2 | 2001-04-17 |
Method and apparatus for depositing an etch stop layer Grant 6,209,484 - Huang , et al. April 3, 2 | 2001-04-03 |
Oxide etch process with high selectivity to nitride suitable for use on surfaces of uneven topography Grant 6,194,325 - Yang , et al. February 27, 2 | 2001-02-27 |
Process for low k organic dielectric film etch Grant 6,184,142 - Chung , et al. February 6, 2 | 2001-02-06 |
Oxide etch process with high selectivity to nitride suitable for use on surfaces of uneven topography Grant 6,184,150 - Yang , et al. February 6, 2 | 2001-02-06 |
Method and apparatus for depositing an etch stop layer Grant 6,127,262 - Huang , et al. October 3, 2 | 2000-10-03 |
Process used in an RF coupled plasma reactor Grant 6,068,784 - Collins , et al. May 30, 2 | 2000-05-30 |
Plasma reactor with heated source of a polymer-hardening precursor material Grant 6,036,877 - Collins , et al. March 14, 2 | 2000-03-14 |
Plasma reactor with heated source of a polymer-hardening precursor material Grant 6,024,826 - Collins , et al. February 15, 2 | 2000-02-15 |
Plasma reactor and processes using RF inductive coupling and scavenger temperature control Grant 5,888,414 - Collins , et al. March 30, 1 | 1999-03-30 |
Silicon scavenger in an inductively coupled RF plasma reactor Grant 5,556,501 - Collins , et al. September 17, 1 | 1996-09-17 |
Selectivity for etching an oxide over a nitride Grant 5,423,945 - Marks , et al. June 13, 1 | 1995-06-13 |
Method for plasma processing using magnetically enhanced plasma chemical vapor deposition Grant 5,312,778 - Collins , et al. May 17, 1 | 1994-05-17 |
UHF/VHF plasma for use in forming integrated circuit structures on semiconductor wafers Grant 5,300,460 - Collins , et al. April 5, 1 | 1994-04-05 |
VHF/UHF reactor system Grant 5,210,466 - Collins , et al. May 11, 1 | 1993-05-11 |
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