YANAI; Hidehiro

Patent Applications and Registrations

Patent applications and USPTO patent grants for YANAI; Hidehiro.The latest application filed is for "substrate processing apparatus, method of manufacturing semiconductor device, and non-transitory computer-readable recording medium".

Company Profile

7.21.22

YANAI; Hidehiro - Toyama-shi JP
YANAI; Hidehiro - Toyama-shi TOYAMA JP
Yanai; Hidehiro - Toyama JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Substrate Processing Apparatus, Method Of Manufacturing Semiconductor Device, And Non-transitory Computer-readable Recording Medium App 20220189801 - YANAI; Hidehiro ; et al.	2022-06-16
Substrate Processing Apparatus, Method Of Manufacturing Semiconductor Device, And Baffle Structure Of The Substrate Processing Apparatus App 20210343507 - YANAI; Hidehiro ; et al.	2021-11-04
Substrate processing apparatus, method of manufacturing semiconductor device, and baffle structure of the substrate processing apparatus Grant 11,101,111 - Yanai , et al. August 24, 2	2021-08-24
Substrate Processing Apparatus, Method Of Manufacturing Semiconductor Device And Non-transitory Computer-readable Recording Medium App 20210079525 - OHASHI; Naofumi ; et al.	2021-03-18
Substrate Processing Apparatus App 20210071297 - YANAI; Hidehiro ; et al.	2021-03-11
Substrate Processing Apparatus, Method Of Manufacturing Semiconductor Device, And Baffle Structure Of The Substrate Processing Apparatus App 20200381221 - YANAI; Hidehiro ; et al.	2020-12-03
Substrate processing apparatus, method of manufacturing semiconductor device, and baffle structure of the substrate processing apparatus Grant 10,763,084 - Yanai , et al. Sep	2020-09-01
Plasma processing apparatus and method of manufacturing semiconductor device Grant 10,403,478 - Yanai , et al. Sep	2019-09-03
Substrate processing apparatus Grant 10,287,684 - Yanai	2019-05-14
Substrate Processing Apparatus, Method Of Manufacturing Semiconductor Device, And Baffle Structure Of The Substrate Processing Apparatus App 20180144908 - YANAI; Hidehiro ; et al.	2018-05-24
Substrate processing apparatus, method of manufacturing semiconductor device, and baffle structure of the substrate processing apparatus Grant 9,911,580 - Yanai , et al. March 6, 2	2018-03-06
Substrate processing apparatus and method of manufacturing semiconductor device Grant 9,659,767 - Yanai , et al. May 23, 2	2017-05-23
Substrate Processing Apparatus App 20160379848 - YANAGISAWA; Yoshihiko ; et al.	2016-12-29
Method of manufacturing semiconductor device Grant 9,508,546 - Toyoda , et al. November 29, 2	2016-11-29
Substrate processing apparatus and substrate processing method Grant 9,378,991 - Takahashi , et al. June 28, 2	2016-06-28
Substrate Processing Apparatus, Method Of Manufacturing Semiconductor Device And Non-transitory Computer-readable Recording Medium App 20160079101 - YANAI; Hidehiro ; et al.	2016-03-17
Substrate Processing Apparatus App 20160024650 - TOYODA; Kazuyuki ; et al.	2016-01-28
Substrate Processing Apparatus App 20160010210 - YANAI; Hidehiro	2016-01-14
Plasma Processing Apparatus And Method Of Manufacturing Semiconductor Device App 20150371832 - YANAI; Hidehiro ; et al.	2015-12-24
Method Of Manufacturing Semiconductor Device App 20150221503 - TOYODA; Kazuyuki ; et al.	2015-08-06
Method Of Manufacturing Semiconductor Device App 20150214044 - YANAI; Hidehiro ; et al.	2015-07-30
Substrate processing apparatus and method of manufacturing semiconductor device Grant 9,082,797 - Aburatani , et al. July 14, 2	2015-07-14
Substrate processing apparatus, substrate supporter and method of manufacturing semiconductor device Grant 9,076,644 - Sakata , et al. July 7, 2	2015-07-07
Substrate processing apparatus and method of manufacturing semiconductor device Grant 8,986,450 - Yanai , et al. March 24, 2	2015-03-24
Substrate processing apparatus and method of manufacturing semiconductor device Grant 8,925,562 - Toyoda , et al. January 6, 2	2015-01-06
Substrate Processing Apparatus, Substrate Supporter And Method Of Manufacturing Semiconductor Device App 20140004710 - Sakata; Masakazu ; et al.	2014-01-02
Substrate processing apparatus Grant 8,444,363 - Sakata , et al. May 21, 2	2013-05-21
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device App 20130012035 - Aburatani; Yukinori ; et al.	2013-01-10
Substrate Placement Stage, Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device App 20120329290 - Shimada; Toshiya ; et al.	2012-12-27
Substrate Processing Apparatus, Method Of Manufacturing Semiconductor Device, And Baffle Structure Of The Substrate Processing Apparatus App 20120132228 - Yanai; Hidehiro ; et al.	2012-05-31
Substrate processing apparatus and substrate processing method Grant 7,923,380 - Yanai , et al. April 12, 2	2011-04-12
Substrate Processing Apparatus App 20100150687 - SAKATA; Masakazu ; et al.	2010-06-17
Substrate processing apparatus and substrate processing method App 20100068895 - Yanai; Hidehiro ; et al.	2010-03-18
Substrate processing apparatus and substrate processing method App 20100068414 - Takahashi; Akira ; et al.	2010-03-18
Substrate processing apparatus, and method for manufacturing semiconductor device Grant 7,648,578 - Itatani , et al. January 19, 2	2010-01-19
Substrate processing apparatus and method of manufacturing semiconductor device Grant 7,579,276 - Itatani , et al. August 25, 2	2009-08-25
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device App 20070264840 - Itatani; Hideharu ; et al.	2007-11-15

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