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Patent applications and USPTO patent grants for YANAGAWA; Takuya.The latest application filed is for "imaging apparatus, imaging system, and imaging method".
Patent | Date |
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Imaging Apparatus, Imaging System, And Imaging Method App 20200026316 - IKEHARA; Yuzuru ;   et al. | 2020-01-23 |
Substrate Carrier Device, Substrate Carrying Method, Substrate Supporting Member, Substrate Holding Device, Exposure Apparatus, Exposure Method And Device Manufacturing Method App 20110141448 - AOKI; Yasuo ;   et al. | 2011-06-16 |
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