Yanagawa; Hidehiro

Patent Applications and Registrations

Patent applications and USPTO patent grants for Yanagawa; Hidehiro.The latest application filed is for "substrate processing apparatus".

Company Profile

0.5.4

Yanagawa; Hidehiro - Tokyo JP
YANAGAWA; Hidehiro - Toyama-shi JP
Yanagawa; Hidehiro - Toyama JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Dual loading port semiconductor processing equipment Grant RE43,023 - Nakashima , et al. December 13, 2	2011-12-13
Substrate Processing Apparatus App 20100154711 - ISHIBASHI; Kiyohisa ; et al.	2010-06-24
Semiconductor device producing apparatus and producing method of semiconductor device Grant 7,198,447 - Morimitsu , et al. April 3, 2	2007-04-03
Semiconductor device producing apparatus and producing method of semiconductor device App 20040052618 - Matsunaga, Tatsuhisa ; et al.	2004-03-18
Dual loading port semiconductor processing equipment Grant 6,641,350 - Nakashima , et al. November 4, 2	2003-11-04
Substrate processing apparatus and method for manufacturing a semiconductor device App 20020012581 - Odake, Shigeru ; et al.	2002-01-31
Dual loading port semiconductor processing equipment App 20010038783 - Nakashima, Takanobu ; et al.	2001-11-08
Vertical furnace of a semiconductor manufacturing apparatus and a boat cover thereof Grant 5,902,103 - Maeda , et al. May 11, 1	1999-05-11
Method for supplying and discharging gas to and from semiconductor manufacturing equipment and system for executing the same Grant 5,277,215 - Yanagawa , et al. January 11, 1	1994-01-11

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