Yamazawa; Yohei
Patent Applications and Registrations
Patent applications and USPTO patent grants for Yamazawa; Yohei.The latest application filed is for "filter circuit".
Company Profile
13.81.89
- Yamazawa; Yohei - Tokyo JP
- YAMAZAWA; Yohei - Miyagi JP
- Yamazawa; Yohei - Yamanashi JP
- YAMAZAWA; Yohei - Nirasaki-shi JP
- Yamazawa; Yohei - Nirasaki JP
- YAMAZAWA; Yohei - Nirasaki City JP
- YAMAZAWA; Yohei - Niraak-shi JP
Patent Activity
| Patent | Date |
|---|---|
| RF measurement system and method Grant 11,410,832 - Funk , et al. August 9, 2 | 2022-08-09 |
| Filter Circuit App 20220148854 - YAMAZAWA; Yohei | 2022-05-12 |
| Plasma Processing Apparatus And Plasma Processing Coil App 20220108871 - Yamazawa; Yohei ; et al. | 2022-04-07 |
| RF Measurement System and Method App 20210407771 - Funk; Merritt ; et al. | 2021-12-30 |
| RF Voltage and Current (V-I) Sensors and Measurement Methods App 20210407775 - Moses; Justin ; et al. | 2021-12-30 |
| RF Voltage and Current (V-I) Sensors and Measurement Methods App 20210407770 - Moses; Justin ; et al. | 2021-12-30 |
| Plasma processing apparatus Grant 11,037,762 - Yamazawa , et al. June 15, 2 | 2021-06-15 |
| Plasma Processing Apparatus And Method App 20210082669 - KOSHIISHI; Akira ; et al. | 2021-03-18 |
| Plasma processing apparatus Grant 10,916,410 - Yamazawa , et al. February 9, 2 | 2021-02-09 |
| Plasma processing apparatus and method Grant 10,854,431 - Koshiishi , et al. December 1, 2 | 2020-12-01 |
| Plasma Processing Apparatus And Plasma Processing Method App 20200357606 - YAMAZAWA; Yohei ; et al. | 2020-11-12 |
| Plasma processing apparatus and plasma processing method Grant 10,804,076 - Yamazawa , et al. October 13, 2 | 2020-10-13 |
| Plasma processing apparatus Grant 10,679,867 - Yamazawa | 2020-06-09 |
| Plasma Processing Apparatus And Method App 20200111645 - KOSHIISHI; Akira ; et al. | 2020-04-09 |
| Plasma processing apparatus Grant 10,593,517 - Yamazawa | 2020-03-17 |
| Plasma Processing Apparatus App 20200058467 - YAMAZAWA; Yohei ; et al. | 2020-02-20 |
| Plasma processing apparatus and method Grant 10,546,727 - Koshiishi , et al. Ja | 2020-01-28 |
| Plasma processing apparatus and method Grant 10,529,539 - Koshiishi , et al. J | 2020-01-07 |
| Transformer, plasma processing apparatus, and plasma processing method Grant 10,381,197 - Yamazawa A | 2019-08-13 |
| Plasma Processing Apparatus App 20190098740 - YAMAZAWA; Yohei ; et al. | 2019-03-28 |
| Plasma Processing Apparatus App 20190019653 - YAMAZAWA; Yohei ; et al. | 2019-01-17 |
| Plasma Processing Apparatus And Plasma Processing Method App 20180308662 - YAMAZAWA; Yohei ; et al. | 2018-10-25 |
| Plasma processing apparatus Grant 10,020,167 - Yamazawa July 10, 2 | 2018-07-10 |
| Plasma processing apparatus and plasma processing method Grant 9,997,332 - Yamazawa , et al. June 12, 2 | 2018-06-12 |
| Plasma processing method Grant 9,953,811 - Yamazawa April 24, 2 | 2018-04-24 |
| Plasma processing apparatus Grant 9,941,097 - Yamazawa , et al. April 10, 2 | 2018-04-10 |
| Plasma Processing Apparatus App 20180053635 - Yamazawa; Yohei ; et al. | 2018-02-22 |
| Plasma processing apparatus Grant 9,899,191 - Yamazawa , et al. February 20, 2 | 2018-02-20 |
| Plasma Processing Apparatus App 20170338081 - YAMAZAWA; Yohei | 2017-11-23 |
| Plasma Processing Apparatus App 20170330772 - YAMAZAWA; Yohei | 2017-11-16 |
| Transformer, Plasma Processing Apparatus, And Plasma Processing Method App 20170316948 - YAMAZAWA; Yohei | 2017-11-02 |
| Plasma processing apparatus Grant 9,627,181 - Yamazawa April 18, 2 | 2017-04-18 |
| Film formation device, substrate processing device, and film formation method Grant 9,583,312 - Yamawaku , et al. February 28, 2 | 2017-02-28 |
| Plasma Processing Apparatus And Method App 20170032936 - KOSHIISHI; Akira ; et al. | 2017-02-02 |
| Plasma Processing Apparatus And Method App 20160379805 - KOSHIISHI; Akira ; et al. | 2016-12-29 |
| Plasma Processing Apparatus And Method App 20160358753 - KOSHIISHI; Akira ; et al. | 2016-12-08 |
| Plasma processing apparatus and plasma processing method Grant 9,502,215 - Kato , et al. November 22, 2 | 2016-11-22 |
| Plasma processing apparatus and method Grant 9,490,105 - Koshiishi , et al. November 8, 2 | 2016-11-08 |
| Plasma Processing Apparatus And Plasma Processing Method App 20160203951 - YAMAZAWA; Yohei ; et al. | 2016-07-14 |
| Plasma Processing Apparatus And Plasma Processing Method App 20160172160 - YAMAZAWA; Yohei ; et al. | 2016-06-16 |
| Plasma Processing Apparatus App 20160155613 - Yamazawa; Yohei | 2016-06-02 |
| Plasma processing apparatus Grant 9,351,389 - Yamazawa May 24, 2 | 2016-05-24 |
| Plasma Processing Apparatus App 20160118222 - YAMAZAWA; Yohei ; et al. | 2016-04-28 |
| Plasma processing apparatus and plasma processing method Grant 9,313,872 - Yamazawa , et al. April 12, 2 | 2016-04-12 |
| Plasma processing apparatus Grant 9,293,299 - Yamazawa March 22, 2 | 2016-03-22 |
| Plasma processing apparatus Grant 9,275,837 - Yamazawa , et al. March 1, 2 | 2016-03-01 |
| Plasma processing apparatus and plasma processing method Grant 9,253,867 - Yamazawa , et al. February 2, 2 | 2016-02-02 |
| Plasma processing apparatus and plasma processing method Grant 9,218,943 - Yamazawa December 22, 2 | 2015-12-22 |
| Plasma processing apparatus, plasma generating apparatus, antenna structure and plasma generating method Grant 9,167,680 - Yamazawa , et al. October 20, 2 | 2015-10-20 |
| Plasma processing apparatus and plasma processing method Grant 9,119,282 - Yamazawa August 25, 2 | 2015-08-25 |
| Plasma Processing Apparatus And Plasma Processing Method App 20150132505 - KATO; Hitoshi ; et al. | 2015-05-14 |
| Substrate removing method and storage medium Grant 8,964,350 - Yamawaku , et al. February 24, 2 | 2015-02-24 |
| Plasma Processing Method App 20150014276 - YAMAZAWA; Yohei | 2015-01-15 |
| Plasma processing apparatus and plasma processing method Grant 8,894,806 - Koshimizu , et al. November 25, 2 | 2014-11-25 |
| Plasma Processing Apparatus And Method App 20140326409 - KOSHIISHI; Akira ; et al. | 2014-11-06 |
| Plasma Processing Apparatus App 20140216345 - YAMAZAWA; Yohei ; et al. | 2014-08-07 |
| Plasma Processing Apparatus App 20140216346 - YAMAZAWA; Yohei ; et al. | 2014-08-07 |
| Plasma processing apparatus and method Grant 8,790,490 - Koshiishi , et al. July 29, 2 | 2014-07-29 |
| Film Formation Device, Substrate Processing Device, And Film Formation Method App 20140170859 - YAMAWAKU; Jun ; et al. | 2014-06-19 |
| Plasma processing apparatus and plasma processing method Grant 8,741,097 - Yamazawa , et al. June 3, 2 | 2014-06-03 |
| Plasma Processing Apparatus And Method App 20140124139 - KOSHIISHI; Akira ; et al. | 2014-05-08 |
| Plasma processor Grant 8,689,733 - Koshimizu , et al. April 8, 2 | 2014-04-08 |
| Plasma Processing Apparatus, Plasma Generating Apparatus, Antenna Structure And Plasma Generating Method App 20140062296 - YAMAZAWA; Yohei ; et al. | 2014-03-06 |
| Plasma Processing Apparatus App 20140048211 - YAMAZAWA; Yohei | 2014-02-20 |
| Cleaning substrate and cleaning method Grant 8,647,442 - Yamazawa , et al. February 11, 2 | 2014-02-11 |
| Plasma Processing Apparatus App 20130340937 - Yamazawa; Yohei ; et al. | 2013-12-26 |
| Plasma processing apparatus and plasma processing method Grant 8,608,903 - Yamazawa , et al. December 17, 2 | 2013-12-17 |
| Plasma processing apparatus and method Grant 8,603,293 - Koshiishi , et al. December 10, 2 | 2013-12-10 |
| Substrate removing method and storage medium Grant 8,593,780 - Yamawaku , et al. November 26, 2 | 2013-11-26 |
| Plasma processing apparatus Grant 8,529,730 - Yamazawa September 10, 2 | 2013-09-10 |
| Plasma processing apparatus and method Grant 8,431,035 - Iwata , et al. April 30, 2 | 2013-04-30 |
| Plasma processing apparatus and plasma processing method Grant 8,415,885 - Yamazawa April 9, 2 | 2013-04-09 |
| Plasma processing apparatus Grant 8,398,815 - Yamazawa , et al. March 19, 2 | 2013-03-19 |
| Plasma Processing Apparatus App 20120247679 - Yamazawa; Yohei | 2012-10-04 |
| Substrate Removing Method And Storage Medium App 20120250214 - YAMAWAKU; Jun ; et al. | 2012-10-04 |
| Plasma Processing Apparatus And Plasma Processing Method App 20120248066 - YAMAZAWA; Yohei | 2012-10-04 |
| Substrate Removing Method And Storage Medium App 20120250213 - YAMAWAKU; Jun ; et al. | 2012-10-04 |
| Plasma processing apparatus Grant 8,261,691 - Yamazawa September 11, 2 | 2012-09-11 |
| Plasma Processing Apparatus And Plasma Processing Method App 20120223060 - Yamazawa; Yohei | 2012-09-06 |
| Plasma processing apparatus Grant 8,251,011 - Yamazawa , et al. August 28, 2 | 2012-08-28 |
| Cleaning Substrate And Cleaning Method App 20120204904 - YAMAZAWA; Yohei ; et al. | 2012-08-16 |
| Plasma Processing Apparatus App 20120168083 - YAMAZAWA; YOHEI | 2012-07-05 |
| Plasma Processing Apparatus And Method App 20120145324 - Koshiishi; Akira ; et al. | 2012-06-14 |
| Plasma processing apparatus Grant 8,157,953 - Yamazawa April 17, 2 | 2012-04-17 |
| Plasma Processing Apparatus And Plasma Processing Method App 20120074100 - Yamazawa; Yohei | 2012-03-29 |
| Plasma Processing Apparatus App 20120073757 - Yamazawa; Yohei | 2012-03-29 |
| Plasma Processing Apparatus App 20120073756 - Yamazawa; Yohei | 2012-03-29 |
| Plasma processing apparatus and method Grant 8,137,471 - Koshiishi , et al. March 20, 2 | 2012-03-20 |
| Plasma Processing Apparatus And Method App 20110272097 - Koshiishi; Akira ; et al. | 2011-11-10 |
| Plasma Processing Apparatus And Plasma Processing Method App 20110233170 - YAMAZAWA; Yohei | 2011-09-29 |
| Plasma Processing Apparatus And Method App 20110214815 - Koshiishi; Akira ; et al. | 2011-09-08 |
| Plasma processing apparatus and method of measuring amount of radio-frequency current in plasma Grant 7,993,487 - Yamazawa August 9, 2 | 2011-08-09 |
| Plasma processing apparatus and method Grant 7,988,816 - Koshiishi , et al. August 2, 2 | 2011-08-02 |
| Plasma Processing Apparatus App 20110174440 - YAMAZAWA; Yohei | 2011-07-21 |
| Plasma Processing Apparatus App 20110126765 - Yamazawa; Yohei ; et al. | 2011-06-02 |
| Plasma processing apparatus and method Grant 7,951,262 - Koshiishi , et al. May 31, 2 | 2011-05-31 |
| Plasma Processing Apparatus And Plasma Processing Method App 20110104902 - Yamazawa; Yohei ; et al. | 2011-05-05 |
| Plasma Processing Apparatus And Plasma Processing Method App 20110094996 - YAMAZAWA; Yohei ; et al. | 2011-04-28 |
| Plasma Processing Apparatus And Plasma Processing Method App 20110094995 - Yamazawa; Yohei ; et al. | 2011-04-28 |
| Plasma Processing Apparatus And Plasma Processing Method App 20110094997 - Yamazawa; Yohei ; et al. | 2011-04-28 |
| Plasma Processing Apparatus App 20110094682 - Yamazawa; Yohei ; et al. | 2011-04-28 |
| Measuring system Grant 7,915,900 - Yamazawa March 29, 2 | 2011-03-29 |
| Plasma Processing Apparatus And Method App 20100252198 - Yamazawa; Yohei ; et al. | 2010-10-07 |
| Plasma Processing Apparatus And Plasma Processing Method App 20100243606 - KOSHIMIZU; Chishio ; et al. | 2010-09-30 |
| Plasma Processing Apparatus And Plasma Processing Method App 20100243609 - Yamazawa; Yohei ; et al. | 2010-09-30 |
| Plasma processing apparatus and method Grant 7,758,929 - Yamazawa , et al. July 20, 2 | 2010-07-20 |
| Plasma processing apparatus and method Grant 7,740,737 - Koshiishi , et al. June 22, 2 | 2010-06-22 |
| Method and apparatus for inspecting process performance for use in a plasma processing apparatus Grant 7,737,706 - Yamazawa June 15, 2 | 2010-06-15 |
| Plasma Processing Apparatus And Method App 20100126668 - KOSHIISHI; Akira ; et al. | 2010-05-27 |
| Plasma processing apparatus with filter circuit Grant 7,712,436 - Yamazawa May 11, 2 | 2010-05-11 |
| Plasma processing apparatus Grant 7,655,110 - Yamazawa February 2, 2 | 2010-02-02 |
| Plasma processing apparatus having impedance varying electrodes Grant 7,611,603 - Yamazawa November 3, 2 | 2009-11-03 |
| Cleaning Substrate And Cleaning Method App 20090241992 - Yamazawa; Yohei ; et al. | 2009-10-01 |
| Substrate For Observation And Observation System App 20090237496 - YAMAZAWA; Yohei ; et al. | 2009-09-24 |
| Plasma Processing Apparatus And Method App 20090223933 - Iwata; Manabu ; et al. | 2009-09-10 |
| Method and apparatus for measuring electron density of plasma and plasma processing apparatus Grant 7,582,182 - Matsumoto , et al. September 1, 2 | 2009-09-01 |
| Plasma Processing Apparatus App 20090133839 - YAMAZAWA; Yohei ; et al. | 2009-05-28 |
| Plasma Processing Apparatus App 20090126634 - YAMAZAWA; Yohei | 2009-05-21 |
| Plasma Processing Apparatus App 20090126871 - YAMAZAWA; Yohei | 2009-05-21 |
| Plasma processing apparatus Grant 7,527,016 - Yamazawa , et al. May 5, 2 | 2009-05-05 |
| Method and apparatus for measuring electron density of plasma and plasma processing apparatus Grant 7,462,293 - Matsumoto , et al. December 9, 2 | 2008-12-09 |
| Plasma Processor App 20080277062 - Koshimizu; Chishio ; et al. | 2008-11-13 |
| Plasma processing apparatus Grant 7,432,467 - Yamazawa October 7, 2 | 2008-10-07 |
| Measuring System App 20080238440 - YAMAZAWA; Yohei | 2008-10-02 |
| Plasma Processing Apparatus App 20080236492 - YAMAZAWA; Yohei | 2008-10-02 |
| Plasma Processing Apparatus App 20080236753 - YAMAZAWA; Yohei | 2008-10-02 |
| Plasma processor Grant 7,415,940 - Koshimizu , et al. August 26, 2 | 2008-08-26 |
| Plasma Processing Apparatus App 20080197780 - YAMAZAWA; Yohei | 2008-08-21 |
| Method And Apparatus For Inspecting Process Performance For Use In A Plasma Processing Apparatus App 20080174324 - YAMAZAWA; Yohei | 2008-07-24 |
| Method and apparatus for measuring electron density of plasma and plasma processing apparatus Grant 7,339,656 - Matsumoto , et al. March 4, 2 | 2008-03-04 |
| Method And Apparatus For Measuring Electron Density Of Plasma And Plasma Processing Apparatus App 20070284044 - MATSUMOTO; Naoki ; et al. | 2007-12-13 |
| Plasma Processing Apparatus App 20070235420 - YAMAZAWA; Yohei | 2007-10-11 |
| Plasma Processing Apparatus App 20070236148 - Yamazawa; Yohei ; et al. | 2007-10-11 |
| Plasma Processing Apparatus App 20070227662 - Yamazawa; Yohei | 2007-10-04 |
| Plasma Processing Apparatus And Method App 20070227449 - YAMAZAWA; Yohei | 2007-10-04 |
| Plasma Processing Apparatus And Method App 20070228009 - YAMAZAWA; Yohei ; et al. | 2007-10-04 |
| Plasma Processing Apparatus And Method Of Measuring Amount Of Radio-frequency Current In Plasma App 20070227667 - YAMAZAWA; Yohei | 2007-10-04 |
| Plasma Processing Apparatus App 20070227657 - YAMAZAWA; Yohei | 2007-10-04 |
| Substrate Processing Apparatus, Deposit Monitoring Apparatus, And Deposit Monitoring Method App 20070215043 - YAMAZAWA; Yohei ; et al. | 2007-09-20 |
| Substrate Processing Apparatus, Deposit Monitoring Apparatus, And Deposit Monitoring Method App 20070215044 - YAMAZAWA; Yohei | 2007-09-20 |
| Method And Apparatus For Measuring Electron Density Of Plasma And Plasma Processing Apparatus App 20070193514 - Matsumoto; Naoki ; et al. | 2007-08-23 |
| Plasma processing apparatus and method App 20060066247 - Koshiishi; Akira ; et al. | 2006-03-30 |
| Plasma processing apparatus and method App 20060037701 - Koshiishi; Akira ; et al. | 2006-02-23 |
| Plasma Processing apparatus and method App 20060037704 - Iwata; Manabu ; et al. | 2006-02-23 |
| Plasma processing apparatus and method App 20060037703 - Koshiishi; Akira ; et al. | 2006-02-23 |
| Method and apparatus for measuring electron density of plasma and plasma processing apparatus App 20050009347 - Matsumoto, Naoki ; et al. | 2005-01-13 |
| Plasma processor App 20040149221 - Koshimizu, Chishio ; et al. | 2004-08-05 |
| Plasma processing apparatus App 20040035365 - Yamazawa, Yohei ; et al. | 2004-02-26 |
| Method of detecting etching depth App 20010010939 - Yamazawa, Yohei ; et al. | 2001-08-02 |
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