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Apparatus and method for measuring energy spectrum of backscattered electrons Grant 11,322,332 - Kato , et al. May 3, 2 | 2022-05-03 |
Perfume composition, food and beverage, and method for producing food and beverage Grant 11,291,230 - Yamazaki , et al. April 5, 2 | 2022-04-05 |
Apparatus And Method For Measuring Energy Spectrum Of Backscattered Electrons App 20210012999 - KATO; Makoto ;   et al. | 2021-01-14 |
Beverage And Food App 20200154747 - YAMAZAKI; Yuichiro ;   et al. | 2020-05-21 |
Secondary particle detection system of scanning electron microscope Grant 10,515,778 - Sasaki , et al. Dec | 2019-12-24 |
Perfume Composition, Food And Beverage, And Method For Producing Food And Beverage App 20190174805 - YAMAZAKI; Yuichiro ;   et al. | 2019-06-13 |
Hybrid vehicle and control method therfor Grant 9,862,376 - Yamazaki January 9, 2 | 2018-01-09 |
Scanning Electron Microscope App 20180005797 - KATO; Makoto ;   et al. | 2018-01-04 |
Light-transmitting Laminate For Optical Use App 20170314323 - INUDUKA; Masataka ;   et al. | 2017-11-02 |
Secondary Particle Detection System Of Scanning Electron Microscope App 20170271124 - SASAKI; Sumio ;   et al. | 2017-09-21 |
Hybrid vehicle and method for controlling same Grant 9,457,798 - Futatsudera , et al. October 4, 2 | 2016-10-04 |
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 9,368,314 - Nakasuji , et al. June 14, 2 | 2016-06-14 |
Hybrid Vehicle And Method For Controlling Same App 20150353075 - Futatsudera; Akio ;   et al. | 2015-12-10 |
Hybrid Vehicle And Control Method Therfor App 20150336565 - Yamazaki; Yuichiro | 2015-11-26 |
Hybrid-vehicle Control Device And Control Method App 20150336558 - YAMAZAKI; Yuichiro | 2015-11-26 |
Inspection System By Charged Particle Beam And Method Of Manufacturing Devices Using The System App 20140319346 - Nakasuji; Mamoru ;   et al. | 2014-10-30 |
Control unit for hybrid vehicle Grant 8,831,811 - Yamazaki September 9, 2 | 2014-09-09 |
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 8,803,103 - Nakasuji , et al. August 12, 2 | 2014-08-12 |
Defect Inspection Apparatus, Defect Inspection Method And Non-transitory Computer Readable Recording Medium App 20140061461 - HAYASHI; Hiroyuki ;   et al. | 2014-03-06 |
Pattern inspection apparatus and pattern inspection method Grant 8,649,591 - Kaneko , et al. February 11, 2 | 2014-02-11 |
Inspection System By Charged Particle Beam And Method Of Manufacturing Devices Using The System App 20140034831 - Nakasuji; Mamoru ;   et al. | 2014-02-06 |
Pattern Inspection Apparatus And Method App 20130063721 - FUJII; Takayoshi ;   et al. | 2013-03-14 |
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 8,368,031 - Nakasuji , et al. February 5, 2 | 2013-02-05 |
Control Unit For Hybrid Vehicle App 20130018540 - Yamazaki; Yuichiro | 2013-01-17 |
Pattern Inspection Apparatus And Pattern Inspection Method App 20120242985 - WATABIKI; Mitsutoshi ;   et al. | 2012-09-27 |
Pattern Inspection Apparatus And Pattern Inspection Method App 20120242995 - KONNO; Yusaku ;   et al. | 2012-09-27 |
Pattern Inspection Apparatus And Pattern Inspection Method App 20120243770 - KANEKO; Makoto ;   et al. | 2012-09-27 |
Mapping-projection-type electron beam apparatus for inspecting sample by using electrons emitted from the sample Grant 8,124,933 - Watanabe , et al. February 28, 2 | 2012-02-28 |
Inspection System By Charged Particle Beam And Method Of Manufacturing Devices Using The System App 20120032079 - Nakasuji; Mamoru ;   et al. | 2012-02-09 |
Electron beam apparatus Grant 8,067,732 - Nakasuji , et al. November 29, 2 | 2011-11-29 |
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 8,053,726 - Nakasuji , et al. November 8, 2 | 2011-11-08 |
Projection electron beam apparatus and defect inspection system using the apparatus Grant 8,035,082 - Yamazaki , et al. October 11, 2 | 2011-10-11 |
Pattern matching method, program and semiconductor device manufacturing method Grant 8,036,445 - Onishi , et al. October 11, 2 | 2011-10-11 |
Flavor composition or fragrance composition, product containing the flavor composition or fragrance composition, and novel ester compound Grant 8,026,277 - Aida , et al. September 27, 2 | 2011-09-27 |
Storage device, processor or storage device, and computer program product for providing parameter adjustment during read/write operations Grant 8,000,046 - Yamazaki August 16, 2 | 2011-08-16 |
Process for producing optically active theaspirane Grant 7,964,637 - Harada , et al. June 21, 2 | 2011-06-21 |
Structure inspection method, pattern formation method, process condition determination method and resist pattern evaluation apparatus Grant 7,903,264 - Hayasaki , et al. March 8, 2 | 2011-03-08 |
Electron beam apparatus and an aberration correction optical apparatus Grant 7,863,580 - Hatakeyama , et al. January 4, 2 | 2011-01-04 |
Substrate inspection apparatus, substrate inspection method and method of manufacturing semiconductor device Grant 7,847,250 - Nagahama , et al. December 7, 2 | 2010-12-07 |
Magnetic disk device testing method and testing device Grant 7,777,979 - Suzuki , et al. August 17, 2 | 2010-08-17 |
Storage Device, Processor Or Storage Device, And Computer Program Product App 20100103561 - Yamazaki; Yuichiro | 2010-04-29 |
Projection Electron Beam Apparatus And Defect Inspection System Using The Apparatus App 20100096550 - YAMAZAKI; Yuichiro ;   et al. | 2010-04-22 |
Flavor Composition Or Fragrance Composition, Product Containing The Flavor Composition Or Fragrance Composition, And Novel Ester Compound App 20100081725 - Aida; Takashi ;   et al. | 2010-04-01 |
Mask pattern inspection method, exposure condition verification method, and manufacturing method of semiconductor device Grant 7,674,570 - Nagahama , et al. March 9, 2 | 2010-03-09 |
Mapping-projection-type Electron Beam Apparatus For Inspecting Sample By Using Electrons Emitted From The Sample App 20100019149 - WATANABE; Kenji ;   et al. | 2010-01-28 |
Substrate inspection method, method of manufacturing semiconductor device, and substrate inspection apparatus Grant 7,645,988 - Nagahama , et al. January 12, 2 | 2010-01-12 |
Process for Producing Optically Active Theaspirane App 20090270516 - Harada; Makoto ;   et al. | 2009-10-29 |
Information storage device, write current adjustment method for the information storage device, and write control circuit Grant 7,609,470 - Yamazaki October 27, 2 | 2009-10-27 |
Mapping-projection-type electron beam apparatus for inspecting sample by using electrons reflected from the sample Grant 7,592,586 - Watanabe , et al. September 22, 2 | 2009-09-22 |
Magnetic Disk Device Testing Method And Testing Device App 20090231744 - Suzuki; Katsuji ;   et al. | 2009-09-17 |
Electron beam inspection system and inspection method and method of manufacturing devices using the system Grant 7,569,838 - Watanabe , et al. August 4, 2 | 2009-08-04 |
Substrate inspection apparatus, substrate inspection method and method of manufacturing semiconductor device App 20090072139 - Nagahama; Ichirota ;   et al. | 2009-03-19 |
Substrate inspection method, manufacturing method of semiconductor device and substrate inspection apparatus Grant 7,504,625 - Yamazaki March 17, 2 | 2009-03-17 |
Inspection system by charged particle beam and method of manufacturing devices using the system App 20090032708 - Nakasuji; Mamoru ;   et al. | 2009-02-05 |
Structure inspection method, pattern formation method, process condition determination method and resist pattern evaluation apparatus Grant 7,483,155 - Hayasaki , et al. January 27, 2 | 2009-01-27 |
Structure Inspection Method, Pattern Formation Method, Process Condition Determination Method And Resist Pattern Evaluation Apparatus App 20090002722 - HAYASAKI; KEI ;   et al. | 2009-01-01 |
Substrate inspection apparatus, substrate inspection method and method of manufacturing semiconductor device Grant 7,462,829 - Nagahama , et al. December 9, 2 | 2008-12-09 |
Detecting apparatus and device manufacturing method Grant 7,449,691 - Hatakeyama , et al. November 11, 2 | 2008-11-11 |
Magnetic recording device Grant 7,417,814 - Yamazaki August 26, 2 | 2008-08-26 |
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 7,411,191 - Nakasuji , et al. August 12, 2 | 2008-08-12 |
Electron beam inspection system and inspection method and method of manufacturing devices using the system App 20080173814 - Watanabe; Kenji ;   et al. | 2008-07-24 |
Electron beam inspection system and inspection method and method of manufacturing devices using the system Grant 7,351,969 - Watanabe , et al. April 1, 2 | 2008-04-01 |
Electron beam apparatus with detailed observation function and sample inspecting and observing method using electron beam apparatus Grant 7,352,195 - Watanabe , et al. April 1, 2 | 2008-04-01 |
Magnetic recording and reproducing device App 20080074772 - Yamasaki; Nobuyoshi ;   et al. | 2008-03-27 |
Magnetic recording and reproducing device App 20080024894 - Yamazaki; Yuichiro | 2008-01-31 |
Defect inspection method, defect inspection apparatus, and semiconductor device manufacturing method App 20080013824 - Yamaguchi; Shinji ;   et al. | 2008-01-17 |
Inspection system by charged particle beam and method of manufacturing devices using the same App 20070235644 - Nakasuji; Mamoru ;   et al. | 2007-10-11 |
Information storage device, write current adjustment method for the information storage device, and write control circuit App 20070211365 - Yamazaki; Yuichiro | 2007-09-13 |
Electron beam apparatus with detailed observation function and sample inspecting and observing method using electron beam apparatus App 20070200569 - Watanabe; Kenji ;   et al. | 2007-08-30 |
Substrate inspection apparatus, substrate inspection method and semiconductor device manufacturing method App 20070194232 - Nagahama; Ichirota ;   et al. | 2007-08-23 |
Substrate inspection apparatus, substrate inspection method and method of manufacturing semiconductor device App 20070187600 - Nagahama; Ichirota ;   et al. | 2007-08-16 |
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 7,241,993 - Nakasuji , et al. July 10, 2 | 2007-07-10 |
Substrate inspection apparatus, substrate inspection method and method of manufacturing semiconductor device Grant 7,211,796 - Nagahama , et al. May 1, 2 | 2007-05-01 |
Electron beam apparatus with detailed observation function and sample inspecting and observing method using electron beam apparatus Grant 7,212,017 - Watanabe , et al. May 1, 2 | 2007-05-01 |
Mask pattern inspection method, exposure condition verification method, and manufacturing method of semiconductor device App 20070009811 - Nagahama; Ichirota ;   et al. | 2007-01-11 |
Defect inspection apparatus, program, and manufacturing method of semiconductor device Grant 7,148,479 - Onishi , et al. December 12, 2 | 2006-12-12 |
Substrate inspection method, manufacturing method of semiconductor device and substrate inspection apparatus App 20060243907 - Yamazaki; Yuichiro | 2006-11-02 |
Mapping-projection-type electron beam apparatus for inspecting sample by using electrons reflected from the sample App 20060237646 - Watanabe; Kenji ;   et al. | 2006-10-26 |
Detecting apparatus and device manufacturing method App 20060219909 - Hatakeyama; Masahiro ;   et al. | 2006-10-05 |
Magnetic recording device App 20060209443 - Yamazaki; Yuichiro | 2006-09-21 |
Electron beam apparatus and device manufacturing method using same Grant 7,098,457 - Nagahama , et al. August 29, 2 | 2006-08-29 |
Substrate inspection apparatus, substrate inspection method, method of manufacturing semiconductor device and recording medium Grant 7,081,756 - Hayashi , et al. July 25, 2 | 2006-07-25 |
Detecting apparatus and device manufacturing method Grant 7,075,072 - Hatakeyama , et al. July 11, 2 | 2006-07-11 |
Electron beam inspection system and inspection method and method of manufacturing devices using the system App 20060118719 - Watanabe; Kenji ;   et al. | 2006-06-08 |
Pattern matching method, program and semiconductor device manufacturing method App 20060110042 - Onishi; Atsushi ;   et al. | 2006-05-25 |
Magnetic disk apparatus, read gate optimization method and program Grant 7,009,793 - Yamazaki March 7, 2 | 2006-03-07 |
Electron beam inspection system and inspection method and method of manufacturing devices using the system Grant 6,992,290 - Watanabe , et al. January 31, 2 | 2006-01-31 |
Photomask repair method and apparatus Grant 6,991,878 - Kanamitsu , et al. January 31, 2 | 2006-01-31 |
Substrate inspection method, method of manufacturing semiconductor device, and substrate inspection apparatus App 20050263701 - Nagahama, Ichirota ;   et al. | 2005-12-01 |
Defect inspection apparatus, program, and manufacturing method of semiconductor device App 20050230618 - Onishi, Atsushi ;   et al. | 2005-10-20 |
Electron beam apparatus and device manufacturing method using same App 20050205783 - Nagahama, Ichirota ;   et al. | 2005-09-22 |
Electron beam apparatus with detailed observation function and sample inspecting and observing method using electron beam apparatus App 20050199807 - Watanabe, Kenji ;   et al. | 2005-09-15 |
Charged particle beam lithography system, lithography method using charged particle beam, method of controlling charged particle beam, and method of manufacturing semiconductor device Grant 6,940,080 - Nagano , et al. September 6, 2 | 2005-09-06 |
Structure inspection method, pattern formation method, process condition determination method and resist pattern evaluation apparatus App 20050168758 - Hayasaki, Kei ;   et al. | 2005-08-04 |
Electron beam apparatus and device manufacturing method using same Grant 6,909,092 - Nagahama , et al. June 21, 2 | 2005-06-21 |
Substrate inspection apparatus, substrate inspection method, method of manufacturing semiconductor device and recording medium App 20050114745 - Hayashi, Hiroyuki ;   et al. | 2005-05-26 |
Substrate inspection apparatus, substrate inspection method and method of manufacturing semiconductor device App 20050029451 - Nagahama, Ichirota ;   et al. | 2005-02-10 |
Magnetic disk apparatus, read gate optimization method and program App 20040228021 - Yamazaki, Yuichiro | 2004-11-18 |
Charged particle beam exposure system Grant 6,815,698 - Nagano , et al. November 9, 2 | 2004-11-09 |
Substrate inspection system and method for controlling same Grant 6,768,112 - Yamazaki , et al. July 27, 2 | 2004-07-27 |
Charged particle beam lithography system, lithography method using charged particle beam, method of controlling charged particle beam, and method of manufacturing semiconductor device App 20040029046 - Nagano, Osamu ;   et al. | 2004-02-12 |
Disk storage device and parameter transfer method Grant 6,690,529 - Toshikawa , et al. February 10, 2 | 2004-02-10 |
Photomask repair method and apparatus App 20030215722 - Kanamitsu, Shingo ;   et al. | 2003-11-20 |
Electron beam apparatus and device manufacturing method using same App 20030213893 - Nagahama, Ichirota ;   et al. | 2003-11-20 |
Eddy current loss measuring sensor, thickness measuring system, thickness measuring method, and recorded medium Grant 6,563,308 - Nagano , et al. May 13, 2 | 2003-05-13 |
Eddy Current Loss Measuring Sensor, Thickness Measuring System, Thickness Measuring Method, And Recorded Medium App 20030067298 - Nagano, Osamu ;   et al. | 2003-04-10 |
Charged particle beam system and pattern slant observing method Grant 6,534,766 - Abe , et al. March 18, 2 | 2003-03-18 |
Detecting apparatus and device manufacturing method App 20030047682 - Hatakeyama, Masahiro ;   et al. | 2003-03-13 |
Electron beam lithography system and pattern writing method Grant 6,525,328 - Miyoshi , et al. February 25, 2 | 2003-02-25 |
Charged beam drawing apparatus Grant 6,495,841 - Ando , et al. December 17, 2 | 2002-12-17 |
System and method for assisting planning of environment symbiosis district App 20020156545 - Sekino, Hideo ;   et al. | 2002-10-24 |
Electron beam inspection system and inspection method and method of manufacturing devices using the system App 20020088940 - Watanabe, Kenji ;   et al. | 2002-07-11 |
Substrate inspection system and method for controlling same App 20020084411 - Yamazaki, Yuichiro ;   et al. | 2002-07-04 |
Charged beam exposure method and charged beam exposure apparatus App 20020072012 - Nakasugi, Tetsuro ;   et al. | 2002-06-13 |
Charged particle beam exposure system App 20020033458 - Nagano, Osamu ;   et al. | 2002-03-21 |
Inspection system by charged particle beam and method of manufacturing devices using the system App 20020028399 - Nakasuji, Mamoru ;   et al. | 2002-03-07 |
Charged particle beam system and pattern slant observing method App 20010025925 - Abe, Hideaki ;   et al. | 2001-10-04 |
Inspection method and apparatus using electron beam Grant 6,265,719 - Yamazaki , et al. July 24, 2 | 2001-07-24 |
Electron beam inspection method and apparatus Grant 6,259,094 - Nagai , et al. July 10, 2 | 2001-07-10 |
Substrate inspecting apparatus, substrate inspecting system having the same apparatus and substrate inspecting method Grant 6,038,018 - Yamazaki , et al. March 14, 2 | 2000-03-14 |
Focused ion beam deposition using TMCTS Grant 5,639,699 - Nakamura , et al. June 17, 1 | 1997-06-17 |
Plasma apparatus Grant 5,639,308 - Yamazaki , et al. June 17, 1 | 1997-06-17 |
Wafer pattern defect detection method and apparatus therefor Grant 5,576,833 - Miyoshi , et al. November 19, 1 | 1996-11-19 |
Magnetic field immersion type electron gun Grant 5,548,183 - Miyoshi , et al. August 20, 1 | 1996-08-20 |
Charged beam apparatus having cleaning function and method of cleaning charged beam apparatus Grant 5,539,211 - Ohtoshi , et al. July 23, 1 | 1996-07-23 |
Electrostatic lens and method for producing the same Grant 5,444,256 - Nagai , et al. August 22, 1 | 1995-08-22 |
Plasma processing apparatus Grant 5,413,663 - Shimizu , et al. May 9, 1 | 1995-05-09 |
Surface inspection method and apparatus therefor Grant 4,902,131 - Yamazaki , et al. February 20, 1 | 1990-02-20 |