Yamawaku; Jun

Patent Applications and Registrations

Patent applications and USPTO patent grants for Yamawaku; Jun.The latest application filed is for "plasma processing device".

Company Profile

10.64.63

Yamawaku; Jun - Yamanashi JP
YAMAWAKU; Jun - Nirasaki City Yamanashi
Yamawaku; Jun - Nirasaki JP
YAMAWAKU; Jun - Nirasaki-shi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Plasma processing apparatus Grant 11,443,920 - Yamawaku , et al. September 13, 2	2022-09-13
Plasma Processing Device App 20220277932 - YAMAWAKU; Jun	2022-09-01
Plasma Processing Device, And Plasma Processing Method App 20220165544 - KAGAYA; Munehito ; et al.	2022-05-26
Plasma processing apparatus and plasma processing method Grant 11,315,765 - Yamawaku , et al. April 26, 2	2022-04-26
Film-forming Device And Film-forming Method App 20210222296 - YAMAWAKU; Jun	2021-07-22
Plasma processing apparatus and plasma processing method Grant 10,937,631 - Yamawaku , et al. March 2, 2	2021-03-02
Substrate Processing Method App 20200373131 - Yamawaku; Jun ; et al.	2020-11-26
Plasma Processing Apparatus And Plasma Processing Method App 20200357606 - YAMAZAWA; Yohei ; et al.	2020-11-12
Plasma processing apparatus and plasma processing method Grant 10,804,076 - Yamazawa , et al. October 13, 2	2020-10-13
Film Forming Apparatus And Film Forming Method App 20200312626 - YAMAWAKU; Jun	2020-10-01
Substrate processing apparatus Grant 10,777,392 - Yamawaku , et al. Sept	2020-09-15
Plasma Processing Apparatus App 20200144026 - YAMAWAKU; Jun ; et al.	2020-05-07
Plasma Processing Apparatus App 20200058467 - YAMAZAWA; Yohei ; et al.	2020-02-20
Plasma Processing Apparatus And Plasma Processing Method App 20190221405 - YAMAWAKU; Jun ; et al.	2019-07-18
Plasma processing apparatus Grant 10,325,758 - Yamawaku , et al.	2019-06-18
Plasma processing apparatus and plasma processing method Grant 10,283,328 - Yamawaku , et al.	2019-05-07
Plasma Processing Apparatus And Plasma Processing Method App 20190115188 - YAMAWAKU; Jun ; et al.	2019-04-18
Plasma Processing Apparatus And Plasma Processing Method App 20190108975 - YAMAWAKU; Jun ; et al.	2019-04-11
Plasma processing apparatus and plasma processing method Grant 10,211,031 - Koshimizu , et al. Feb	2019-02-19
Transfer chamber and method for preventing adhesion of particle Grant 10,115,614 - Yamawaku , et al. October 30, 2	2018-10-30
Plasma Processing Apparatus And Plasma Processing Method App 20180308662 - YAMAZAWA; Yohei ; et al.	2018-10-25
Substrate Processing Apparatus App 20180218884 - Yamawaku; Jun ; et al.	2018-08-02
Plasma processing apparatus and plasma processing method Grant 9,997,332 - Yamazawa , et al. June 12, 2	2018-06-12
Plasma processing apparatus Grant 9,941,097 - Yamazawa , et al. April 10, 2	2018-04-10
Plasma processing apparatus Grant 9,899,191 - Yamazawa , et al. February 20, 2	2018-02-20
Film formation device, substrate processing device, and film formation method Grant 9,583,312 - Yamawaku , et al. February 28, 2	2017-02-28
Plasma processing apparatus and plasma processing method Grant 9,502,215 - Kato , et al. November 22, 2	2016-11-22
Transfer Chamber And Method For Preventing Adhesion Of Particle App 20160315001 - YAMAWAKU; Jun ; et al.	2016-10-27
Plasma Processing Apparatus And Plasma Processing Method App 20160203951 - YAMAZAWA; Yohei ; et al.	2016-07-14
Transfer chamber and method for preventing adhesion of particle Grant 9,385,015 - Yamawaku , et al. July 5, 2	2016-07-05
Plasma Processing Apparatus And Plasma Processing Method App 20160172160 - YAMAZAWA; Yohei ; et al.	2016-06-16
Substrate processing apparatus Grant 9,349,618 - Yamawaku , et al. May 24, 2	2016-05-24
Plasma Processing Apparatus App 20160126063 - YAMAWAKU; Jun ; et al.	2016-05-05
Plasma Processing Apparatus And Plasma Processing Method App 20160126064 - YAMAWAKU; Jun ; et al.	2016-05-05
Plasma Processing Apparatus App 20160126065 - YAMAWAKU; Jun ; et al.	2016-05-05
Plasma Processing Apparatus App 20160118222 - YAMAZAWA; Yohei ; et al.	2016-04-28
Plasma processing apparatus and plasma processing method Grant 9,313,872 - Yamazawa , et al. April 12, 2	2016-04-12
Plasma processing apparatus and plasma processing method Grant 9,253,867 - Yamazawa , et al. February 2, 2	2016-02-02
Plasma processing apparatus Grant 9,236,226 - Yamawaku , et al. January 12, 2	2016-01-12
Film deposition apparatus, substrate processing apparatus and film deposition method Grant 9,111,747 - Yamawaku , et al. August 18, 2	2015-08-18
Plasma Processing Apparatus And Plasma Processing Method App 20150179407 - KOSHIMIZU; Chishio ; et al.	2015-06-25
Plasma Processing Apparatus And Plasma Processing Method App 20150170882 - YAMAWAKU; Jun ; et al.	2015-06-18
Plasma Processing Apparatus And Plasma Processing Method App 20150132505 - KATO; Hitoshi ; et al.	2015-05-14
Method of measuring temperature of component in processing chamber of substrate processing apparatus Grant 9,028,139 - Yamawaku , et al. May 12, 2	2015-05-12
Temperature control system including sub-chiller Grant 9,019,505 - Yamawaku , et al. April 28, 2	2015-04-28
Substrate removing method and storage medium Grant 8,964,350 - Yamawaku , et al. February 24, 2	2015-02-24
Focus ring heating method, plasma etching apparatus, and plasma etching method Grant 8,858,753 - Koshimizu , et al. October 14, 2	2014-10-14
Substrate processing apparatus and substrate processing method Grant 8,845,853 - Yamawaku , et al. September 30, 2	2014-09-30
Temperature measuring method, storage medium, and program Grant 8,825,434 - Koshimizu , et al. September 2, 2	2014-09-02
Method for heating part in processing chamber of semiconductor manufacturing apparatus and semiconductor manufacturing apparatus Grant 8,824,875 - Yamawaku , et al. September 2, 2	2014-09-02
Substrate Processing Apparatus And Method Of Depositing A Film App 20140220260 - Yamawaku; Jun ; et al.	2014-08-07
Plasma Processing Apparatus App 20140216346 - YAMAZAWA; Yohei ; et al.	2014-08-07
Plasma Processing Apparatus App 20140216345 - YAMAZAWA; Yohei ; et al.	2014-08-07
Temperature measuring apparatus and temperature measuring method Grant 8,777,483 - Yamawaku , et al. July 15, 2	2014-07-15
Film Formation Device, Substrate Processing Device, And Film Formation Method App 20140170859 - YAMAWAKU; Jun ; et al.	2014-06-19
Plasma processing apparatus and plasma processing method Grant 8,741,097 - Yamazawa , et al. June 3, 2	2014-06-03
Film Deposition Apparatus, Substrate Processing Apparatus And Film Deposition Method App 20130337635 - YAMAWAKU; Jun ; et al.	2013-12-19
Plasma processing apparatus and plasma processing method Grant 8,608,903 - Yamazawa , et al. December 17, 2	2013-12-17
Substrate removing method and storage medium Grant 8,593,780 - Yamawaku , et al. November 26, 2	2013-11-26
Method Of Measuring Temperature Of Component In Processing Chamber Of Substrate Processing Apparatus App 20130308681 - YAMAWAKU; Jun ; et al.	2013-11-21
Substrate cleaning method Grant 8,585,831 - Matsui , et al. November 19, 2	2013-11-19
Focus Ring Heating Method, Plasma Etching Apparatus, And Plasma Etching Method App 20130299455 - KOSHIMIZU; Chishio ; et al.	2013-11-14
Component in processing chamber of substrate processing apparatus and method of measuring temperature of the component Grant 8,523,428 - Yamawaku , et al. September 3, 2	2013-09-03
Evacuation method and storage medium Grant 8,516,715 - Yamawaku , et al. August 27, 2	2013-08-27
Focus ring heating method, plasma etching apparatus, and plasma etching method Grant 8,486,221 - Koshimizu , et al. July 16, 2	2013-07-16
Substrate transfer device and substrate transfer method Grant 8,409,328 - Yamawaku , et al. April 2, 2	2013-04-02
Substrate processing apparatus and exhaust method therefor Grant 8,398,745 - Yamawaku , et al. March 19, 2	2013-03-19
Optical gas-analysis system and a gas flow cell Grant 8,384,902 - Akiyama , et al. February 26, 2	2013-02-26
Cleaning device and cleaning method of semiconductor manufacturing apparatus Grant 8,297,292 - Kokubo , et al. October 30, 2	2012-10-30
Substrate Removing Method And Storage Medium App 20120250213 - YAMAWAKU; Jun ; et al.	2012-10-04
Substrate Removing Method And Storage Medium App 20120250214 - YAMAWAKU; Jun ; et al.	2012-10-04
Plasma Processing Apparatus App 20120247954 - YAMAWAKU; Jun ; et al.	2012-10-04
Component In Processing Chamber Of Substrate Processing Apparatus And Method Of Measuring Temperature Of The Component App 20120251759 - YAMAWAKU; Jun ; et al.	2012-10-04
Plasma Processing Apparatus App 20120241092 - Yamawaku; Jun ; et al.	2012-09-27
Substrate transfer module and substrate processing system Grant 8,257,498 - Yamawaku , et al. September 4, 2	2012-09-04
Absorption spectrometric apparatus for semiconductor production process Grant 8,253,930 - Akiyama , et al. August 28, 2	2012-08-28
Focus Ring And Substrate Processing Apparatus Having Same App 20120176692 - Yamawaku; Jun ; et al.	2012-07-12
Substrate Processing Apparatus App 20120175063 - YAMAWAKU; Jun ; et al.	2012-07-12
Temperature Measuring Method, Storage Medium, And Program App 20120084045 - KOSHIMIZU; Chishio ; et al.	2012-04-05
Temperature Control System App 20120073781 - YAMAWAKU; Jun ; et al.	2012-03-29
Physical State Measuring Apparatus And Physical State Measuring Method App 20120062870 - YAMAWAKU; Jun ; et al.	2012-03-15
Temperature Measuring Apparatus And Temperature Measuring Method App 20120063486 - YAMAWAKU; Jun ; et al.	2012-03-15
Substrate Cleaning Method App 20120031434 - Matsui; Hidefumi ; et al.	2012-02-09
Turbo-molecular pump, substrate processing apparatus, and method for suppressing attachment of depositions to turbo-molecular pump Grant 8,052,376 - Yamawaku , et al. November 8, 2	2011-11-08
Substrate processing method and substrate processing apparatus Grant 8,034,720 - Nishimura , et al. October 11, 2	2011-10-11
Method For Heating Part In Processing Chamber Of Semiconductor Manufacturing Apparatus And Semiconductor Manufacturing Apparatus App 20110211817 - Yamawaku; Jun ; et al.	2011-09-01
Plasma Processing Apparatus And Plasma Processing Method App 20110104902 - Yamazawa; Yohei ; et al.	2011-05-05
Plasma Processing Apparatus And Plasma Processing Method App 20110094997 - Yamazawa; Yohei ; et al.	2011-04-28
Plasma Processing Apparatus And Plasma Processing Method App 20110094995 - Yamazawa; Yohei ; et al.	2011-04-28
Plasma Processing Apparatus And Plasma Processing Method App 20110094996 - YAMAZAWA; Yohei ; et al.	2011-04-28
Plasma Processing Apparatus App 20110094682 - Yamazawa; Yohei ; et al.	2011-04-28
Plasma Processing Apparatus App 20100243620 - Yamawaku; Jun ; et al.	2010-09-30
Optical Gas-analysis System And A Gas Flow Cell App 20100238446 - AKIYAMA; Osamu ; et al.	2010-09-23
Substrate Transfer Device And Substrate Transfer Method App 20100236405 - Yamawaku; Jun ; et al.	2010-09-23
Substrate Processing Apparatus And Exhaust Method Therefor App 20100236406 - Yamawaku; Jun ; et al.	2010-09-23
Focus Ring Heating Method, Plasma Etching Apparatus, And Plasma Etching Method App 20100213171 - Koshimizu; Chishio ; et al.	2010-08-26
Method For Charge-neutralizing Target Substrate And Substrate Processing Apparatus App 20100214712 - YAMAWAKU; Jun ; et al.	2010-08-26
Absorption Spectrometric Apparatus For Semiconductor Production Process App 20100214557 - Akiyama; Osamu ; et al.	2010-08-26
Transfer Chamber And Method For Preventing Adhesion Of Particle App 20100202093 - YAMAWAKU; Jun ; et al.	2010-08-12
Cleaning Device And Cleaning Method Of Semiconductor Manufacturing Apparatus App 20100018552 - Kokubo; Takayuki ; et al.	2010-01-28
Substrate Transfer Module And Substrate Processing System App 20090028672 - YAMAWAKU; Jun ; et al.	2009-01-29
Evacuation Method And Storage Medium App 20080301972 - Yamawaku; Jun ; et al.	2008-12-11
Substrate Transfer Member Cleaning Method, Substrate Transfer Apparatus, And Substrate Processing System App 20080273893 - YAMAWAKU; Jun ; et al.	2008-11-06
Turbo-molecular Pump, Substrate Processing Apparatus, And Method For Suppressing Attachment Of Depositions To Turbo-molecular Pump App 20080240910 - YAMAWAKU; Jun ; et al.	2008-10-02
Substrate Processing Apparatus And Substrate Processing Method App 20080237182 - YAMAWAKU; Jun ; et al.	2008-10-02
Substrate Processing Method And Substrate Processing Apparatus App 20080179292 - Nishimura; Eiichi ; et al.	2008-07-31