Yamasaka; Miyako
Patent Applications and Registrations
Patent applications and USPTO patent grants for Yamasaka; Miyako.The latest application filed is for "substrate processing apparatus for resist film removal".
- Yamasaka; Miyako - Nagasaka-Cho JP
- Yamasaka; Miyako - Yamanashi-ken JP
- Yamasaka, Miyako - Nirasaki-shi JP
| Patent | Date |
|---|---|
| Substrate processing apparatus for resist film removal App 20070204885 - Toshima; Takayuki ; et al. | 2007-09-06 |
| Substrate processing apparatus for resist film removal Grant 7,191,785 - Toshima , et al. March 20, 2 | 2007-03-20 |
| Substrate processing method and apparatus App 20050011537 - Toshima, Takayuki ; et al. | 2005-01-20 |
| Substrate processing method and apparatus Grant 6,613,692 - Toshima , et al. September 2, 2 | 2003-09-02 |
| Method and apparatus of processing surface of substrate App 20020155709 - Toshima, Takayuki ; et al. | 2002-10-24 |
| Method for washing and drying substrates Grant 5,997,653 - Yamasaka December 7, 1 | 1999-12-07 |
| Liquid treatment method and apparatus Grant 5,922,138 - Shindo , et al. July 13, 1 | 1999-07-13 |
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