Yamanishi; Kenichiro
Patent Applications and Registrations
Patent applications and USPTO patent grants for Yamanishi; Kenichiro.The latest application filed is for "semiconductor producing apparatus, and wafer vacuum chucking device, gas cleaning method and nitride film forming method in semiconductor producing apparatus".
- Yamanishi; Kenichiro - Amagasaki JP
- Yamanishi; Kenichiro - Hyogo JP
| Patent | Date |
|---|---|
| Semiconductor producing apparatus, and wafer vacuum chucking device, gas cleaning method and nitride film forming method in semiconductor producing apparatus Grant 5,976,260 - Kinoshita , et al. November 2, 1 | 1999-11-02 |
| Semiconductor producing apparatus comprising wafer vacuum chucking device Grant 5,534,073 - Kinoshita , et al. July 9, 1 | 1996-07-09 |
| Thin film deposition apparatus Grant 5,525,158 - Tsukazaki , et al. June 11, 1 | 1996-06-11 |
| Cluster beam thin film deposition apparatus with thermionic electron control Grant 5,099,791 - Tsukazaki , et al. March 31, 1 | 1992-03-31 |
| Evaporation source with a shaped nozzle Grant 4,812,326 - Tsukazaki , et al. March 14, 1 | 1989-03-14 |
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