Yamamoto; Sumitada
Patent Applications and Registrations
Patent applications and USPTO patent grants for Yamamoto; Sumitada.The latest application filed is for "optical element, exposure apparatus, and device manufacturing method".
- Yamamoto; Sumitada - Utsunomiya JP
- Yamamoto; Sumitada - Utsunomiya-shi JP
- Yamamoto, Sumitada - Tochigi JP
| Patent | Date |
|---|---|
| Optical instrument, exposure apparatus, and device manufacturing method Grant 7,119,952 - Yamamoto October 10, 2 | 2006-10-10 |
| Optical element, exposure apparatus, and device manufacturing method App 20060221316 - Yamamoto; Sumitada | 2006-10-05 |
| Exposure apparatus and purging method for the same Grant 7,030,960 - Yamamoto April 18, 2 | 2006-04-18 |
| Exposure apparatus and purging method for the same App 20050162625 - Yamamoto, Sumitada | 2005-07-28 |
| Exposure apparatus and purging method for the same Grant 6,914,667 - Yamamoto July 5, 2 | 2005-07-05 |
| Optical instrument, exposure apparatus, and device manufacturing method App 20050117226 - Yamamoto, Sumitada | 2005-06-02 |
| Exposure apparatus and purging method for the same App 20040160584 - Yamamoto, Sumitada | 2004-08-19 |
| Device manufacturing-related apparatus, reticle, and device manufacturing method App 20030136512 - Yamamoto, Sumitada | 2003-07-24 |
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