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Patent applications and USPTO patent grants for YAMAMOTO; Nobuhiko.The latest application filed is for "plasma processing method and plasma processing device".
Patent | Date |
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Plasma Processing Method And Plasma Processing Device App 20220199369 - KAMATA; Eiki ;   et al. | 2022-06-23 |
Array Antenna And Plasma Processing Apparatus App 20210225612 - KAMATA; Eiki ;   et al. | 2021-07-22 |
Plasma Processing Apparatus And Plasma Processing Method App 20210134560 - KAMATA; Eiki ;   et al. | 2021-05-06 |
Plasma Processing Apparatus And Plasma Processing Method App 20210082727 - IKEDA; Taro ;   et al. | 2021-03-18 |
Heating Apparatus, Heating Method, And Substrate Processing Apparatus App 20200411340 - IKEDA; Taro ;   et al. | 2020-12-31 |
Microwave plasma source and plasma processing apparatus Grant 10,319,567 - Ikeda , et al. | 2019-06-11 |
Acquisition method for S-parameters in microwave introduction modules, and malfunction detection method Grant 9,702,913 - Ikeda , et al. July 11, 2 | 2017-07-11 |
Microwave Plasma Source And Plasma Processing Apparatus App 20160284516 - IKEDA; Taro ;   et al. | 2016-09-29 |
Acquisition Method For S-parameters In Microwave Introduction Modules, And Malfunction Detection Method App 20150212127 - Ikeda; Taro ;   et al. | 2015-07-30 |
Microwave Heating Apparatus App 20140291318 - SHIMOMURA; Kouji ;   et al. | 2014-10-02 |
Microwave Heating Apparatus And Processing Method App 20140117009 - YAMAMOTO; Nobuhiko | 2014-05-01 |
Microwave Irradiation Apparatus App 20140034636 - YAMAMOTO; Nobuhiko ;   et al. | 2014-02-06 |
Plasma processing apparatus and plasma processing method Grant 8,267,040 - Ishibashi , et al. September 18, 2 | 2012-09-18 |
Plasma oxidizing method, plasma processing apparatus, and storage medium Grant 7,910,495 - Shiozawa , et al. March 22, 2 | 2011-03-22 |
Plasma Oxidizing Method, Plasma Processing Apparatus, And Storage Medium App 20100015815 - Shiozawa; Toshihiko ;   et al. | 2010-01-21 |
Microwave Plasma Processing Apparatus App 20080190560 - Tian; Caizhong ;   et al. | 2008-08-14 |
Plasma Processing Apparatus and Plasma Processing Method App 20070264441 - Ishibashi; Kiyotaka ;   et al. | 2007-11-15 |
Plasma processing apparatus Grant 7,226,524 - Kasai , et al. June 5, 2 | 2007-06-05 |
Plasma processor App 20050034815 - Kasai, Shigeru ;   et al. | 2005-02-17 |
Pressurized fluid supply hose and method of manufacturing the same Grant 5,749,396 - Takahashi , et al. May 12, 1 | 1998-05-12 |
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