Yamakawa; Haruyoshi

Patent Applications and Registrations

Patent applications and USPTO patent grants for Yamakawa; Haruyoshi.The latest application filed is for "method for measuring overall concentration of oxidizing substances, substrate cleaning method, and substrate cleaning system".

Company Profile

0.8.14

Yamakawa; Haruyoshi - Tokyo JP
YAMAKAWA; Haruyoshi - US
Yamakawa; Haruyoshi - Shinjuku-ku JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method for measuring overall concentration of oxidizing substances, substrate cleaning method, and substrate cleaning system Grant 10,056,248 - Yamakawa August 21, 2	2018-08-21
Method and system for cleaning semiconductor substrate Grant 10,032,623 - Ogawa , et al. July 24, 2	2018-07-24
Semiconductor substrate cleaning method and cleaning system Grant 10,026,628 - Ogawa , et al. July 17, 2	2018-07-17
Liquid heater Grant 9,791,169 - Uchida , et al. October 17, 2	2017-10-17
Sulfuric acid recycling type cleaning system and a sulfuric acid recycling type persulfuric acid supply apparatus Grant 9,593,424 - Nagai , et al. March 14, 2	2017-03-14
Method For Measuring Overall Concentration Of Oxidizing Substances, Substrate Cleaning Method, And Substrate Cleaning System App 20160172185 - YAMAKAWA; Haruyoshi	2016-06-16
Semiconductor Substrate Cleaning Method and Cleaning System App 20150279703 - Ogawa; Yuichi ; et al.	2015-10-01
Method And System For Cleaning Semiconductor Substrate App 20150262811 - Ogawa; Yuichi ; et al.	2015-09-17
Method For Cleaning Metal Gate Semiconductor App 20140116464 - Nagai; Tatsuo ; et al.	2014-05-01
Liquid Heater App 20140079377 - UCHIDA; Minoru ; et al.	2014-03-20
Supply System And Supply Method For Functional Solution App 20130092553 - Yamakawa; Haruyoshi ; et al.	2013-04-18
Method Of Cleaning Electronic Material And Cleaning System App 20130068260 - Yamakawa; Haruyoshi ; et al.	2013-03-21
Sulfuric Acid Recycling Type Cleaning System and a Sulfuric Acid Recycling Type Persulfuric Acid Supply Apparatus App 20080251108 - Nagai; Tatsuo ; et al.	2008-10-16

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