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Near-field exposure photoresist and fine pattern forming method using the same App 20070141483 - Yamaguchi; Takako ;   et al. | 2007-06-21 |
Communication Terminal, And Dial Registration Method And Dial Registration Program Therefor App 20070123232 - Houmura; Toshikazu ;   et al. | 2007-05-31 |
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Method of detecting relative position of exposure mask and object to be exposed, alignment method, and exposure method using the same App 20060152703 - Yamaguchi; Takako ;   et al. | 2006-07-13 |
Near-field exposure photoresist and fine pattern forming method using the same App 20060078818 - Yamaguchi; Takako ;   et al. | 2006-04-13 |
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Semiconductor device and bump formation method App 20040229425 - Yamaguchi, Katsumi ;   et al. | 2004-11-18 |
Near field light probe, near field optical microscope, near field light lithography apparatus, and near field light storage apparatus that have the near field light probe Grant 6,785,445 - Kuroda , et al. August 31, 2 | 2004-08-31 |
Photomask for near-field exposure, near-field exposure method, and near-field exposure apparatus App 20040166421 - Yamaguchi, Takako ;   et al. | 2004-08-26 |
Exposure method and exposure apparatus using near-field light and exposure mask Grant 6,720,115 - Inao , et al. April 13, 2 | 2004-04-13 |
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Pattern-forming method using photomask, and pattern-forming apparatus Grant 6,632,593 - Yamaguchi , et al. October 14, 2 | 2003-10-14 |
Light modulation apparatus and optical switch, movement detecting device and distance measuring device, alignment device and semiconductor aligner, and processes thereof Grant 6,628,392 - Kuroda , et al. September 30, 2 | 2003-09-30 |
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Near field light probe, near field optical microscope, near field light lithography apparatus, and near field light storage apparatus that have the near field light probe App 20020154859 - Kuroda, Ryo ;   et al. | 2002-10-24 |
Semiconductor device and bump formation method App 20020149118 - Yamaguchi, Katsumi ;   et al. | 2002-10-17 |
Near-field Optical Probe Having Surface Plasmon Polariton Waveguide And Method Of Preparing The Same As Well As Microscope, Recording/regeneration Apparatus And Micro-fabrication Apparatus Using The Same Grant 6,408,123 - Kuroda , et al. June 18, 2 | 2002-06-18 |
Pattern forming apparatus and pattern forming method App 20020044268 - Yamaguchi, Takako ;   et al. | 2002-04-18 |
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