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Patent applications and USPTO patent grants for Yamagata; Motoi.The latest application filed is for "mounting table structure, substrate processing apparatus, and method of controlling substrate processing apparatus".
Patent | Date |
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Stage device and processing apparatus Grant 11,417,504 - Nakagawasai , et al. August 16, 2 | 2022-08-16 |
Mounting Table Structure, Substrate Processing Apparatus, And Method Of Controlling Substrate Processing Apparatus App 20220238314 - YAMAGATA; Motoi ;   et al. | 2022-07-28 |
Method And Device For Substrate Processing App 20220220606 - TAKEYAMA; Tamaki ;   et al. | 2022-07-14 |
Method For Manufacturing Substrate With Sensor App 20220151078 - NAKAGAWASAI; Manabu ;   et al. | 2022-05-12 |
Substrate Processing Apparatus And Method App 20210280777 - NAKAGAWASAI; Manabu ;   et al. | 2021-09-09 |
Stage Device And Processing Apparatus App 20200135434 - NAKAGAWASAI; Manabu ;   et al. | 2020-04-30 |
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