Yamagami; Atsushi

Patent Applications and Registrations

Patent applications and USPTO patent grants for Yamagami; Atsushi.The latest application filed is for "plasma cvd apparatus and plasma processing method".

Company Profile

0.13.0

Yamagami; Atsushi - Kawasaki JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Plasma CVD apparatus and plasma processing method Grant 6,435,130 - Takaki , et al. August 20, 2	2002-08-20
High-frequency introducing means, plasma treatment apparatus, and plasma treatment method Grant 6,152,071 - Akiyama , et al. November 28, 2	2000-11-28
Plasma processing apparatus and processing method Grant 6,145,469 - Teranishi , et al. November 14, 2	2000-11-14
Plasma process apparatus and plasma process method Grant 6,065,425 - Takaki , et al. May 23, 2	2000-05-23
Plasma processing apparatus Grant 5,970,907 - Takai , et al. October 26, 1	1999-10-26
Process for forming high-quality deposited film utilizing plasma CVD Grant 5,846,612 - Takaki , et al. December 8, 1	1998-12-08
Plasma processing apparatus Grant 5,728,278 - Okamura , et al. March 17, 1	1998-03-17
Diamond crystal forming method Grant 5,607,560 - Hirabayashi , et al. March 4, 1	1997-03-04
Plasma CVD process using a very-high-frequency and plasma CVD apparatus Grant 5,540,781 - Yamagami , et al. July 30, 1	1996-07-30
Plasma CVD process using a very-high-frequency and plasma CVD apparatus Grant 5,534,070 - Okamura , et al. July 9, 1	1996-07-09
Method for forming a functional deposited film by bias sputtering process at a relatively low substrate temperature Grant 5,510,011 - Okamura , et al. April 23, 1	1996-04-23
Plasma processing apparatus Grant 5,316,645 - Yamagami , et al. May 31, 1	1994-05-31
Process for the formation of a functional deposited film by hydrogen radical-assisted cvd method utilizing hydrogen gas plasma in sheet-like state Grant 5,178,905 - Kanai , et al. January 12, 1	1993-01-12

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