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Gas for plasma reaction, process for producing the same, and use thereof
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Gas for plasma reaction and process for producing thereof
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Dry Etching Gas and Method of Dry Etching
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Gas for plasma reaction, process for producing the same, and use thereof
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Gas for plasma reaction, process for producing the same, and use
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Semiconductor device, method for manufacturing semiconductor device and gas for plasma cvd
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2-Oxabicyclo[3.3.0]octane compounds, process for producing the same, optical resolver, method of separating diastereomer mixture, and method of optically resolving alcohol
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Ethylene-alpha-olefin copolymer, resin composition containing same and biaxially stretched film thereof
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Method of dry etching, dry etching gas and process for producing perfluoro-2-pentyne
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Gas for plasma reaction and process for producing thereof
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Gas for plasma reaction, process for producing the same, and use
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Gas for plasma reaction and method for production thereof
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Porous calcium fluoride, its producing method, catalyst for hydrogenation reaction, and method for producing trihydrofluorocarbon
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Ethylene-alpha-olefin copolymer, resin composition containing same and biaxially stretched film thereof
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