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Mask blank substrate processing device, mask blank substrate processing method, mask blank substrate fabrication method, mask blank fabrication method, and transfer mask fabrication method Grant 10,481,488 - Yamada , et al. Nov | 2019-11-19 |
Method for manufacturing mask blank substrate, method for manufacturing mask blank and method for manufacturing transfer mask Grant 10,310,373 - Yamada , et al. | 2019-06-04 |
Mask Blank Substrate Processing Device, Mask Blank Substrate Processing Method, Mask Blank Substrate Fabrication Method, Mask Blank Fabrication Method, And Transfer Mask Fabrication Method App 20150370160 - YAMADA; Takeyuki ;   et al. | 2015-12-24 |
Method For Manufacturing Mask Blank Substrate, Method For Manufacturing Mask Blank And Method For Manufacturing Transfer Mask App 20150355537 - YAMADA; Takeyuki ;   et al. | 2015-12-10 |
Mask blank, method of manufacturing the same, and transfer mask Grant 9,104,112 - Sakai , et al. August 11, 2 | 2015-08-11 |
Mask Blank And Method Of Manufacturing A Transfer Mask App 20150111134 - Suzuki; Toshiyuki ;   et al. | 2015-04-23 |
Mask Blank And Method Of Manufacturing A Transfer Mask App 20150079502 - Suzuki; Toshiyuki ;   et al. | 2015-03-19 |
Method Of Cleaning Substrate App 20140230848 - YAMAUCHI; Kazuto ;   et al. | 2014-08-21 |
Surface treatment method for a mask blank, method of manufacturing a mask blank, and method of manufacturing a mask Grant 8,802,334 - Yamada , et al. August 12, 2 | 2014-08-12 |
Method of cleaning substrate Grant 8,748,062 - Yamauchi , et al. June 10, 2 | 2014-06-10 |
Photomask blank and production method thereof, and photomask production method, and semiconductor device production method Grant 8,697,315 - Yamada , et al. April 15, 2 | 2014-04-15 |
Mask Blank, Method Of Manufacturing The Same, And Transfer Mask App 20130177841 - Sakai; Kazuya ;   et al. | 2013-07-11 |
Method Of Cleaning Substrate App 20120276474 - YAMAUCHI; Kazuto ;   et al. | 2012-11-01 |
Surface Treatment Method For A Mask Blank, Method Of Manufacturing A Mask Blank, And Method Of Manufacturing A Mask App 20120258388 - YAMADA; Takeyuki ;   et al. | 2012-10-11 |
Photomask Blank And Production Method Thereof, And Photomask Production Method, And Semiconductor Device Production Method App 20120129084 - Yamada; Takeyuki ;   et al. | 2012-05-24 |
Photomask blank and production method thereof, and photomask production method, and semiconductor device production method Grant 8,114,556 - Yamada , et al. February 14, 2 | 2012-02-14 |
Multilayer reflective film coated substrate, manufacturing method thereof, reflective mask blank, and reflective mask Grant 8,081,384 - Hosoya , et al. December 20, 2 | 2011-12-20 |
Photomask blank and method of producing the same, method of producing photomask, and method of producing semiconductor device Grant 7,901,842 - Yamada , et al. March 8, 2 | 2011-03-08 |
Multilayer reflective film coated substrate, manufacturing method thereof, reflective mask blank, and reflective mask Grant 7,804,648 - Hosoya , et al. September 28, 2 | 2010-09-28 |
Photomask Blank And Method Of Producing The Same, Method Of Producing Photomask, And Method Of Producing Semiconductor Device App 20090233182 - Yamada; Takeyuki ;   et al. | 2009-09-17 |
Photomask Blank And Production Method Thereof, And Photomask Production Method, And Semiconductor Device Production Method App 20090155698 - Yamada; Takeyuki ;   et al. | 2009-06-18 |
Photomask Blank, Photomask Manufacturing Method and Semiconductor Device Manufacturing Method App 20080305406 - Kominato; Atsushi ;   et al. | 2008-12-11 |
Multilayer reflective film coated substrate, manufacturing method thereof, reflective mask blank, and reflective mask App 20070091421 - Hosoya; Mario ;   et al. | 2007-04-26 |
Multilayer reflective film coated substrate, manufacturing method thereof, reflective mask blank, and reflective mask App 20070091420 - Hosoya; Morio ;   et al. | 2007-04-26 |