Yamada; Takeyuki

Patent Applications and Registrations

Patent applications and USPTO patent grants for Yamada; Takeyuki.The latest application filed is for "mask blank substrate processing device, mask blank substrate processing method, mask blank substrate fabrication method, mask blank fabrication method, and transfer mask fabrication method".

Company Profile

2.14.15

Yamada; Takeyuki - Tokyo JP
Yamada; Takeyuki - Shinjuku-ku JP
Yamada; Takeyuki - Yamanashi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Mask blank substrate processing device, mask blank substrate processing method, mask blank substrate fabrication method, mask blank fabrication method, and transfer mask fabrication method Grant 10,481,488 - Yamada , et al. Nov	2019-11-19
Method for manufacturing mask blank substrate, method for manufacturing mask blank and method for manufacturing transfer mask Grant 10,310,373 - Yamada , et al.	2019-06-04
Mask Blank Substrate Processing Device, Mask Blank Substrate Processing Method, Mask Blank Substrate Fabrication Method, Mask Blank Fabrication Method, And Transfer Mask Fabrication Method App 20150370160 - YAMADA; Takeyuki ; et al.	2015-12-24
Method For Manufacturing Mask Blank Substrate, Method For Manufacturing Mask Blank And Method For Manufacturing Transfer Mask App 20150355537 - YAMADA; Takeyuki ; et al.	2015-12-10
Mask blank, method of manufacturing the same, and transfer mask Grant 9,104,112 - Sakai , et al. August 11, 2	2015-08-11
Mask Blank And Method Of Manufacturing A Transfer Mask App 20150111134 - Suzuki; Toshiyuki ; et al.	2015-04-23
Mask Blank And Method Of Manufacturing A Transfer Mask App 20150079502 - Suzuki; Toshiyuki ; et al.	2015-03-19
Method Of Cleaning Substrate App 20140230848 - YAMAUCHI; Kazuto ; et al.	2014-08-21
Surface treatment method for a mask blank, method of manufacturing a mask blank, and method of manufacturing a mask Grant 8,802,334 - Yamada , et al. August 12, 2	2014-08-12
Method of cleaning substrate Grant 8,748,062 - Yamauchi , et al. June 10, 2	2014-06-10
Photomask blank and production method thereof, and photomask production method, and semiconductor device production method Grant 8,697,315 - Yamada , et al. April 15, 2	2014-04-15
Mask Blank, Method Of Manufacturing The Same, And Transfer Mask App 20130177841 - Sakai; Kazuya ; et al.	2013-07-11
Method Of Cleaning Substrate App 20120276474 - YAMAUCHI; Kazuto ; et al.	2012-11-01
Surface Treatment Method For A Mask Blank, Method Of Manufacturing A Mask Blank, And Method Of Manufacturing A Mask App 20120258388 - YAMADA; Takeyuki ; et al.	2012-10-11
Photomask Blank And Production Method Thereof, And Photomask Production Method, And Semiconductor Device Production Method App 20120129084 - Yamada; Takeyuki ; et al.	2012-05-24
Photomask blank and production method thereof, and photomask production method, and semiconductor device production method Grant 8,114,556 - Yamada , et al. February 14, 2	2012-02-14
Multilayer reflective film coated substrate, manufacturing method thereof, reflective mask blank, and reflective mask Grant 8,081,384 - Hosoya , et al. December 20, 2	2011-12-20
Photomask blank and method of producing the same, method of producing photomask, and method of producing semiconductor device Grant 7,901,842 - Yamada , et al. March 8, 2	2011-03-08
Multilayer reflective film coated substrate, manufacturing method thereof, reflective mask blank, and reflective mask Grant 7,804,648 - Hosoya , et al. September 28, 2	2010-09-28
Photomask Blank And Method Of Producing The Same, Method Of Producing Photomask, And Method Of Producing Semiconductor Device App 20090233182 - Yamada; Takeyuki ; et al.	2009-09-17
Photomask Blank And Production Method Thereof, And Photomask Production Method, And Semiconductor Device Production Method App 20090155698 - Yamada; Takeyuki ; et al.	2009-06-18
Photomask Blank, Photomask Manufacturing Method and Semiconductor Device Manufacturing Method App 20080305406 - Kominato; Atsushi ; et al.	2008-12-11
Multilayer reflective film coated substrate, manufacturing method thereof, reflective mask blank, and reflective mask App 20070091421 - Hosoya; Mario ; et al.	2007-04-26
Multilayer reflective film coated substrate, manufacturing method thereof, reflective mask blank, and reflective mask App 20070091420 - Hosoya; Morio ; et al.	2007-04-26

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