loadpatents
Patent applications and USPTO patent grants for Yamada; Takakazu.The latest application filed is for "thin film formation method".
Patent | Date |
---|---|
Thin film formation method Grant 11,189,482 - Hatanaka , et al. November 30, 2 | 2021-11-30 |
Thin Film Formation Method App 20190355576 - HATANAKA; Masanobu ;   et al. | 2019-11-21 |
Thin film production apparatus and inner block for thin film production apparatus Grant 8,747,555 - Yamada , et al. June 10, 2 | 2014-06-10 |
Apparatus for the preparation of film Grant 8,591,655 - Masuda , et al. November 26, 2 | 2013-11-26 |
Shower head, device and method for manufacturing thin films Grant 8,262,798 - Yamada , et al. September 11, 2 | 2012-09-11 |
Gas head and thin-film manufacturing apparatus Grant 8,197,599 - Yamada , et al. June 12, 2 | 2012-06-12 |
Film-forming apparatus and film-forming method Grant 8,168,001 - Uchida , et al. May 1, 2 | 2012-05-01 |
Mixing box, and apparatus and method for producing films Grant 8,118,935 - Yamada , et al. February 21, 2 | 2012-02-21 |
Method For Forming Tantalum Nitride Film And Film-forming Apparatus For Forming The Same App 20110318505 - Yamamoto; Akiko ;   et al. | 2011-12-29 |
Film Forming Method And Film Forming Apparatus App 20100000673 - Masuda; Takeshi ;   et al. | 2010-01-07 |
Film Forming Method And Film Forming Apparatus App 20090311417 - Masuda; Takeshi ;   et al. | 2009-12-17 |
Device and method for manufacturing thin films Grant 7,618,493 - Yamada , et al. November 17, 2 | 2009-11-17 |
Gas Head and Thin-Film Manufacturing Apparatus App 20090250004 - Yamada; Takakazu ;   et al. | 2009-10-08 |
Thin Film Production Apparatus And Inner Block For Thin Film Production Apparatus App 20090159006 - Yamada; Takakazu ;   et al. | 2009-06-25 |
Apparatus for preparing oxide thin film and method for preparing the same App 20070054472 - Nishioka; Yutaka ;   et al. | 2007-03-08 |
Mixing box, and apparatus and method for producing films App 20050211168 - Yamada, Takakazu ;   et al. | 2005-09-29 |
Apparatus for the preparation of film App 20050199182 - Masuda, Takeshi ;   et al. | 2005-09-15 |
Mixer, and device and method for manufacturing thin-film Grant 6,933,010 - Yamada , et al. August 23, 2 | 2005-08-23 |
Shower head, device and method for manufacturing thin films App 20050056217 - Yamada, Takakazu ;   et al. | 2005-03-17 |
Device and method for manufacturing thin films App 20050059246 - Yamada, Takakazu ;   et al. | 2005-03-17 |
Mixer, and device and method for manufacturing thin-film App 20040089235 - Yamada, Takakazu ;   et al. | 2004-05-13 |
Film-forming apparatus and film-forming method App 20030198741 - Uchida, Hiroto ;   et al. | 2003-10-23 |
Vacuum processing apparatus and multi-chamber vacuum processing apparatus App 20020000197 - Masuda, Takeshi ;   et al. | 2002-01-03 |
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