Patent | Date |
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Digital Isolator App 20220285490 - YAMADA; Nobuhide | 2022-09-08 |
Interferometer And Optical Instrument App 20220196381 - Yamada; Nobuhide | 2022-06-23 |
Film forming apparatus and film forming method Grant 11,098,405 - Masuda , et al. August 24, 2 | 2021-08-24 |
Film Forming Apparatus And Film Forming Method App 20190085453 - MASUDA; Hideaki ;   et al. | 2019-03-21 |
Image processing apparatus with improved slide printout based on layout data Grant 9,953,829 - Masuda , et al. April 24, 2 | 2018-04-24 |
Semiconductor device and method for manufacturing the same Grant 9,780,116 - Masuda , et al. October 3, 2 | 2017-10-03 |
Semiconductor device and method for manufacturing the same App 20170104003 - MASUDA; Hideaki ;   et al. | 2017-04-13 |
Image processing apparatus with improved slide printout based on layout data App 20170062202 - MASUDA; Hideaki ;   et al. | 2017-03-02 |
Semiconductor Device And Method For Manufacturing The Same App 20160268299 - MASUDA; Hideaki ;   et al. | 2016-09-15 |
Substrate Processing Apparatus App 20160042985 - YAMADA; NOBUHIDE | 2016-02-11 |
Method of manufacturing semiconductor device and apparatus for manufacturing semiconductor device Grant 9,190,262 - Hizawa , et al. November 17, 2 | 2015-11-17 |
Piping Joint And Semiconductor Manufacturing Apparatus App 20140202946 - ASAMI; Noriyuki ;   et al. | 2014-07-24 |
Method Of Manufacturing Semiconductor Device And Apparatus For Manufacturing Semiconductor Device App 20140014142 - Hizawa; Takeshi ;   et al. | 2014-01-16 |
Method of manufacturing semiconductor device and apparatus for manufacturing semiconductor device Grant 8,557,705 - Hizawa , et al. October 15, 2 | 2013-10-15 |
Method Of Manufacturing Semiconductor Device And Apparatus For Manufacturing Semiconductor Device App 20120094493 - Hizawa; Takeshi ;   et al. | 2012-04-19 |
Film forming method, film forming apparatus, pattern forming method, and manufacturing method of semiconductor apparatus Grant 8,071,157 - Ito , et al. December 6, 2 | 2011-12-06 |
Film Forming Method, Film Forming Apparatus, Pattern Forming Method, And Manufacturing Method Of Semiconductor Apparatus App 20110212255 - Ito; Shinichi ;   et al. | 2011-09-01 |
Method of manufacturing semiconductor device Grant 8,008,190 - Yamada , et al. August 30, 2 | 2011-08-30 |
Composition for film formation, insulating film, semiconductor device, and process for producing the semiconductor device Grant 7,999,356 - Nakasaki , et al. August 16, 2 | 2011-08-16 |
Method of fabricating semiconductor device and the semiconductor device Grant 7,902,036 - Yamada March 8, 2 | 2011-03-08 |
Film Forming Method, Film Forming Apparatus, Pattern Forming Method, And Manufacturing Method Of Semiconductor Apparatus App 20110008545 - ITO; Shinichi ;   et al. | 2011-01-13 |
Manufacturing method for semiconductor device Grant 7,785,984 - Yamada , et al. August 31, 2 | 2010-08-31 |
Method Of Fabricating Semiconductor Device And The Semiconductor Device App 20100155791 - YAMADA; Nobuhide | 2010-06-24 |
Composition For Film Formation, Insulating Film, Semiconductor Device, And Process For Producing The Semiconductor Device App 20100072581 - Nakasaki; Yasushi ;   et al. | 2010-03-25 |
Film forming method, film forming apparatus, pattern forming method, and manufacturing method of semiconductor apparatus Grant 7,604,832 - Ito , et al. October 20, 2 | 2009-10-20 |
Method Of Manufacturing Semiconductor Device App 20080318408 - YAMADA; Nobuhide ;   et al. | 2008-12-25 |
Film forming method, film forming apparatus, pattern forming method, and manufacturing method of semiconductor apparatus App 20080090001 - Ito; Shinichi ;   et al. | 2008-04-17 |
Method of forming silicon oxide layer App 20080009143 - Yamada; Nobuhide ;   et al. | 2008-01-10 |
Manufacturing method for semiconductor device App 20080003775 - Yamada; Nobuhide ;   et al. | 2008-01-03 |
Film forming method, film forming apparatus, pattern forming method, and manufacturing method of semiconductor apparatus Grant 7,312,018 - Ito , et al. December 25, 2 | 2007-12-25 |
Film forming method, film forming apparatus, pattern forming method, and manufacturing method of semiconductor apparatus App 20050022732 - Ito, Shinichi ;   et al. | 2005-02-03 |
Film forming method, film forming apparatus, pattern forming method, and manufacturing method of semiconductor apparatus App 20050026456 - Ito, Shinichi ;   et al. | 2005-02-03 |
Film forming method, film forming apparatus, pattern forming method, and manufacturing method of semiconductor apparatus Grant 6,800,569 - Ito , et al. October 5, 2 | 2004-10-05 |
Method of manufacturing semiconductor device Grant 6,737,363 - Miyajima , et al. May 18, 2 | 2004-05-18 |
Film forming method, film forming apparatus, pattern forming method, and manufacturing method of semiconductor apparatus App 20030211756 - Ito, Shinichi ;   et al. | 2003-11-13 |
Method of forming coating film, method of manufacturing semiconductor device and coating solution Grant 6,645,881 - Yamada , et al. November 11, 2 | 2003-11-11 |
Method of forming coating film, method of manufacturing semiconductor device and coating solution App 20030139063 - Yamada, Nobuhide ;   et al. | 2003-07-24 |
Method of forming insulating film and process for producing semiconductor device App 20020086169 - Nakata, Rempei ;   et al. | 2002-07-04 |
Method of manufacturing semiconductor device App 20020061657 - Miyajima, Hideshi ;   et al. | 2002-05-23 |