| Patent | Date |
|---|
Apparatus for sensing and three dimensional haptic
Grant 11,281,295 - Yee , et al. March 22, 2 | 2022-03-22 |
Faulty pressure sensor determination of a portable communication device touch display
Grant 11,209,929 - Rocznik , et al. December 28, 2 | 2021-12-28 |
Electrochemical sequencing of DNA using an edge electrode
Grant 11,131,646 - Johnson , et al. September 28, 2 | 2021-09-28 |
Faulty Pressure Sensor Determination Of A Portable Communication Device Touch Display
App 20210255751 - Rocznik; Thomas ; et al. | 2021-08-19 |
Apparatus For Sensing And Three Dimensional Haptic
App 20210191515 - YEE; Seow Yuen ; et al. | 2021-06-24 |
System and method for utilizing pressure sensors in an electric device
Grant 10,999,421 - Yama , et al. May 4, 2 | 2021-05-04 |
Modular deformable platform
Grant 10,631,401 - Yee , et al. | 2020-04-21 |
System and method for maintaining a smoothed and anti-stiction surface on a MEMS device
Grant 10,501,314 - Stehle , et al. Dec | 2019-12-10 |
System and method for maintaining a smoothed surface on a MEMS device
Grant 10,494,253 - Stehle , et al. De | 2019-12-03 |
Flexible disposable MEMS pressure sensor
Grant 10,479,677 - Yee , et al. Nov | 2019-11-19 |
Laser carbonization of polymer coatings in an open-air environment
Grant 10,440,830 - Yee , et al. O | 2019-10-08 |
Methods to combine radiation-based temperature sensor and inertial sensor and/or camera output in a handheld/mobile device
Grant 10,298,858 - Feyh , et al. | 2019-05-21 |
Electrochemical Sequencing Of Dna Using An Edge Electrode
App 20190137435 - Johnson; Christopher ; et al. | 2019-05-09 |
Laser Carbonization Of Polymer Coatings In An Open-air Environment
App 20190082540 - Yee; Seow Yuen ; et al. | 2019-03-14 |
System and Method for Maintaining a Smoothed and Anti-Stiction Surface on a MEMS Device
App 20190016592 - Stehle; Jochen ; et al. | 2019-01-17 |
Epi-poly etch stop for out of plane spacer defined electrode
Grant 10,173,887 - Graham , et al. J | 2019-01-08 |
Trench based capacitive humidity sensor
Grant 10,175,188 - O'Brien , et al. J | 2019-01-08 |
Bolometer fluid flow sensor
Grant 10,168,349 - Yee , et al. J | 2019-01-01 |
System and Method for Maintaining a Smoothed Surface on a MEMS Device
App 20180362338 - Stehle; Jochen ; et al. | 2018-12-20 |
MEMS structure with graphene component
Grant 10,053,358 - Yama , et al. August 21, 2 | 2018-08-21 |
Method to modulate the sensitivity of a bolometer via negative interference
Grant 10,006,810 - Rocznik , et al. June 26, 2 | 2018-06-26 |
Resistive switching for MEMS devices
Grant 9,945,727 - Samarao , et al. April 17, 2 | 2018-04-17 |
Bolometer fluid flow and temperature sensor
Grant 9,933,312 - Yee , et al. April 3, 2 | 2018-04-03 |
Bolometer Fluid Flow And Temperature Sensor
App 20180066994 - Yee; Seow Yuen ; et al. | 2018-03-08 |
Bolometer Fluid Flow Sensor
App 20180067143 - Yee; Seow Yuen ; et al. | 2018-03-08 |
MEMS Structure with Graphene Component
App 20180057351 - Yama; Gary ; et al. | 2018-03-01 |
Titanium nitride for MEMS bolometers
Grant 9,903,763 - Samarao , et al. February 27, 2 | 2018-02-27 |
Semiconductor sensor having a suspended structure and method of forming a semiconductor sensor having a suspended structure
Grant 9,863,901 - Feyh , et al. January 9, 2 | 2018-01-09 |
Resistive Switching for MEMS Devices
App 20170363478 - Samarao; Ashwin K. ; et al. | 2017-12-21 |
Flexible Diposable MEMS Pressure Sensor
App 20170362083 - Yee; Seow Yuen ; et al. | 2017-12-21 |
Modular Deformable Platform
App 20170367172 - Yee; Seow Yuen ; et al. | 2017-12-21 |
Method To Modulate The Sensitivity Of A Bolometer Via Negative Interference
App 20170314995 - Rocznik; Thomas ; et al. | 2017-11-02 |
Epi-Poly Etch Stop for Out of Plane Spacer Defined Electrode
App 20170297896 - Graham; Andrew ; et al. | 2017-10-19 |
Atomic Layer Deposition Layer for a Microelectromechanical system (MEMS) Device
App 20170275154 - Yee; Seow Yuen ; et al. | 2017-09-28 |
CMOS bolometer
Grant 9,698,281 - Yama , et al. July 4, 2 | 2017-07-04 |
Portable device with temperature sensing
Grant 9,677,950 - Feyh , et al. June 13, 2 | 2017-06-13 |
Trench Based Capacitive Humidity Sensor
App 20170082567 - O'Brien; Gary ; et al. | 2017-03-23 |
Resistive MEMS humidity sensor
Grant 9,588,073 - Feyh , et al. March 7, 2 | 2017-03-07 |
Portable device with temperature sensing
Grant 9,557,222 - Feyh , et al. January 31, 2 | 2017-01-31 |
MEMS device having a getter
Grant 9,511,998 - Samarao , et al. December 6, 2 | 2016-12-06 |
Epi-poly etch stop for out of plane spacer defined electrode
Grant 9,469,522 - Graham , et al. October 18, 2 | 2016-10-18 |
Substrate with multiple encapsulated devices
Grant 9,455,353 - Chen , et al. September 27, 2 | 2016-09-27 |
MEMS infrared sensor including a plasmonic lens
Grant 9,423,303 - Samarao , et al. August 23, 2 | 2016-08-23 |
Titanium Nitride for MEMS Bolometers
App 20160223404 - Samarao; Ashwin K. ; et al. | 2016-08-04 |
Serpentine IR sensor
Grant 9,368,658 - Purkl , et al. June 14, 2 | 2016-06-14 |
Mems Device Having A Getter
App 20160137493 - Samarao; Ashwin ; et al. | 2016-05-19 |
Epi-Poly Etch Stop for Out of Plane Spacer Defined Electrode
App 20160137485 - Graham; Andrew ; et al. | 2016-05-19 |
Suspension and absorber structure for bolometer
Grant 9,257,587 - Purkl , et al. February 9, 2 | 2016-02-09 |
Metamaterial and method for forming a metamaterial using atomic layer deposition
Grant 9,255,328 - Purkl , et al. February 9, 2 | 2016-02-09 |
MEMS infrared sensor including a plasmonic lens
Grant 9,236,522 - Samarao , et al. January 12, 2 | 2016-01-12 |
Passivation layer for harsh environments and methods of fabrication thereof
Grant 9,233,842 - Feyh , et al. January 12, 2 | 2016-01-12 |
Thermally shorted bolometer
Grant 9,199,838 - O'Brien , et al. December 1, 2 | 2015-12-01 |
Anisotropic conductor and method of fabrication thereof
Grant 9,187,314 - Feyh , et al. November 17, 2 | 2015-11-17 |
Bolometer having absorber with pillar structure for thermal shorting
Grant 9,130,081 - Yama , et al. September 8, 2 | 2015-09-08 |
Multi-stack film bolometer
Grant 9,093,594 - Feyh , et al. July 28, 2 | 2015-07-28 |
Structured gap for a MEMS pressure sensor
Grant 9,073,749 - Graham , et al. July 7, 2 | 2015-07-07 |
Method of manufacturing a sensor device having a porous thin-film metal electrode
Grant 9,064,800 - Feyh , et al. June 23, 2 | 2015-06-23 |
Thin-film encapsulated infrared sensor
Grant 9,064,982 - Purkl , et al. June 23, 2 | 2015-06-23 |
Semiconductor Sensor Having a Suspended Structure and Method of Forming a Semiconductor Sensor Having a Suspended Structure
App 20150160145 - Feyh; Ando ; et al. | 2015-06-11 |
Thermally Shorted Bolometer
App 20150115160 - O'Brien; Gary ; et al. | 2015-04-30 |
Metal Oxide Semiconductor Sensor and Method of Forming a Metal Oxide Semiconductor Sensor Using Atomic Layer Deposition
App 20150118111 - Samarao; Ashwin K. ; et al. | 2015-04-30 |
Tri-axis accelerometer having a single proof mass and fully differential output signals
Grant 9,003,885 - Pan , et al. April 14, 2 | 2015-04-14 |
Wafer with spacer including horizontal member
Grant 8,933,535 - Graham , et al. January 13, 2 | 2015-01-13 |
Method of forming membranes with modified stress characteristics
Grant 8,906,730 - Graham , et al. December 9, 2 | 2014-12-09 |
Atomic layer deposition strengthening members and method of manufacture
Grant 8,900,906 - Yama , et al. December 2, 2 | 2014-12-02 |
Wafer with recessed plug
Grant 8,890,283 - Graham , et al. November 18, 2 | 2014-11-18 |
MEMS package or sensor package with intra-cap electrical via and method thereof
Grant 8,878,314 - Graham , et al. November 4, 2 | 2014-11-04 |
Portable Device With Temperature Sensing
App 20140314120 - Feyh; Ando ; et al. | 2014-10-23 |
Mems Infrared Sensor Including A Plasmonic Lens
App 20140294043 - Samarao; Ashwin ; et al. | 2014-10-02 |
Portable Device with Temperature Sensing
App 20140269827 - Feyh; Ando Lars ; et al. | 2014-09-18 |
Metamaterial and Method for Forming a Metamaterial Using Atomic Layer Deposition
App 20140272333 - Purkl; Fabian ; et al. | 2014-09-18 |
Passivation Layer For Harsh Environments And Methods Of Fabrication Thereof
App 20140264781 - Feyh; Ando Lars ; et al. | 2014-09-18 |
Anisotropic Conductor And Method Of Fabrication Thereof
App 20140264900 - Feyh; Ando Lars ; et al. | 2014-09-18 |
Thin-film Encapsulated Infrared Sensor
App 20140248735 - Purkl; Fabian ; et al. | 2014-09-04 |
Out-of-Plane Spacer Defined Electrode
App 20140197713 - Graham; Andrew B. ; et al. | 2014-07-17 |
Method of Manufacturing a Sensor Device Having a Porous Thin-Film Metal Electrode
App 20140175523 - Feyh; Ando ; et al. | 2014-06-26 |
Bolometer Having Absorber With Pillar Structure For Thermal Shorting
App 20140175285 - Yama; Gary ; et al. | 2014-06-26 |
Suspension And Absorber Structure For Bolometer
App 20140175588 - Purkl; Fabian ; et al. | 2014-06-26 |
Resistive MEMS Humidity Sensor
App 20140167791 - Feyh; Ando ; et al. | 2014-06-19 |
Wafer with Recessed Plug
App 20140151855 - Graham; Andrew B. ; et al. | 2014-06-05 |
Methods To Combine Radiation-based Temperature Sensor And Inertial Sensor And/or Camera Output In A Handheld/mobile Device
App 20140152772 - Feyh; Ando ; et al. | 2014-06-05 |
Structured Gap for a MEMS Pressure Sensor
App 20140151822 - Graham; Andrew B. ; et al. | 2014-06-05 |
MEMS Infrared Sensor Including a Plasmonic Lens
App 20140151834 - Samarao; Ashwin K. ; et al. | 2014-06-05 |
Tri-axis Accelerometer Having A Single Proof Mass And Fully Differential Output Signals
App 20140102194 - PAN; Zhiyu ; et al. | 2014-04-17 |
Multi-stack Film Bolometer
App 20140103210 - Feyh; Ando Lars ; et al. | 2014-04-17 |
Out-of-plane spacer defined electrode
Grant 8,673,756 - Graham , et al. March 18, 2 | 2014-03-18 |
Serpentine Ir Sensor
App 20140061845 - Purkl; Fabian ; et al. | 2014-03-06 |
Cmos Bolometer
App 20140054740 - Yama; Gary ; et al. | 2014-02-27 |
Wafer with recessed plug
Grant 8,647,930 - Graham , et al. February 11, 2 | 2014-02-11 |
Substrate with Multiple Encapsulated Devices
App 20140035071 - Chen; Po-Jui ; et al. | 2014-02-06 |
Method of forming non-planar membranes using CMP
Grant 8,580,691 - Graham , et al. November 12, 2 | 2013-11-12 |
Atomic Layer Deposition Strengthening Members and Method of Manufacture
App 20130234270 - Yama; Gary ; et al. | 2013-09-12 |
Wafer with Spacer including Horizontal Member
App 20130234281 - Graham; Andrew B. ; et al. | 2013-09-12 |
Wafer with spacer including horizontal member
Grant 8,426,289 - Graham , et al. April 23, 2 | 2013-04-23 |
Tri-axis accelerometer having a single proof mass and fully differential output signals
Grant 8,418,559 - Pan , et al. April 16, 2 | 2013-04-16 |
Method of manufacturing a planar electrode with large surface area
Grant 8,317,882 - Chen , et al. November 27, 2 | 2012-11-27 |
Out-of-Plane Spacer Defined Electrode
App 20120261822 - Graham; Andrew B. ; et al. | 2012-10-18 |
Mems Package Or Sensor Package With Intra-cap Electrical Via And Method Thereof
App 20120261774 - Graham; Andrew B. ; et al. | 2012-10-18 |
Wafer with Spacer Including Horizontal Member
App 20120261789 - Graham; Andrew B. ; et al. | 2012-10-18 |
Method Of Forming Non-planar Membranes Using Cmp
App 20120264301 - Graham; Andrew B. ; et al. | 2012-10-18 |
Method Of Forming Membranes With Modified Stress Characteristics
App 20120264250 - Graham; Andrew B. ; et al. | 2012-10-18 |
Wafer With Recessed Plug
App 20120261800 - Graham; Andrew B. ; et al. | 2012-10-18 |
Device formed using a hard mask and etch stop layer
Grant 8,232,143 - Yama July 31, 2 | 2012-07-31 |
Method of epitaxially growing piezoresistors
Grant 8,187,903 - Yama , et al. May 29, 2 | 2012-05-29 |
Device Formed Hard Mask And Etch Stop Layer
App 20110254020 - Yama; Gary | 2011-10-20 |
Method of etching a device using a hard mask and etch stop layer
Grant 7,981,308 - Yama July 19, 2 | 2011-07-19 |
Microelectromechanical devices and fabrication methods
Grant 7,956,428 - Yama June 7, 2 | 2011-06-07 |
Method Of Manufacturing A Planar Electrode With Large Surface Area
App 20110019337 - Chen; Po-Jui ; et al. | 2011-01-27 |
Substrate with multiple encapsulated pressures
Grant 7,875,482 - Candler , et al. January 25, 2 | 2011-01-25 |
Tri-axis Accelerometer Having A Single Proof Mass And Fully Differential Output Signals
App 20100263447 - Pan; Zhiyu ; et al. | 2010-10-21 |
Substrate With Multiple Encapsulated Pressures
App 20100240163 - Candler; Robert N. ; et al. | 2010-09-23 |
Tri-axis accelerometer having a single proof mass and fully differential output signals
Grant 7,757,555 - Pan , et al. July 20, 2 | 2010-07-20 |
Method Of Epitaxially Growing Piezoresistors
App 20100176465 - Yama; Gary ; et al. | 2010-07-15 |
Multi-ring resonator system and method
Grant 7,750,758 - Zhiyu , et al. July 6, 2 | 2010-07-06 |
Microelectromechanical devices and fabrication methods
Grant 7,671,515 - Metz , et al. March 2, 2 | 2010-03-02 |
Anti-stiction technique for electromechanical systems and electromechanical device employing same
Grant 7,625,773 - Lutz , et al. December 1, 2 | 2009-12-01 |
Method of Etching a device using a hard mask and etch stop layer
App 20090166330 - Yama; Gary | 2009-07-02 |
Anti-stiction technique for electromechanical systems and electromechanical device employing same
App 20090065928 - Lutz; Markus ; et al. | 2009-03-12 |
Multi-Ring Resonator System and Method
App 20090058561 - Pan; Zhiyu ; et al. | 2009-03-05 |
Anti-stiction technique for electromechanical systems and electromechanical device employing same
Grant 7,449,355 - Lutz , et al. November 11, 2 | 2008-11-11 |
Dual-axis yaw rate sensing unit having a tuning fork gyroscope arrangement
Grant 7,401,517 - Pan , et al. July 22, 2 | 2008-07-22 |
Microelectromechanical devices and fabrication methods
App 20080122020 - Metz; Matthias ; et al. | 2008-05-29 |
Tri-axis accelerometer having a single proof mass and fully differential output signals
App 20080053228 - Pan; Zhiyu ; et al. | 2008-03-06 |
Dual-axis yaw rate sensing unit having a tuning fork gyroscope arrangment
App 20080041155 - Pan; Zhiyu ; et al. | 2008-02-21 |
In-plane mechanically coupled microelectromechanical tuning fork resonators
Grant 7,319,372 - Pan , et al. January 15, 2 | 2008-01-15 |
Microelectromechanical devices and fabrication methods
App 20070042521 - Yama; Gary | 2007-02-22 |
In-plane mechanically coupled microelectromechanical tuning fork resonators
App 20070013464 - Pan; Zhiyu ; et al. | 2007-01-18 |
Anti-stiction technique for electromechanical systems and electromechanical device employing same
App 20060246631 - Lutz; Markus ; et al. | 2006-11-02 |
Method for manufacturing a microsystem
App 20050054134 - Frey, Wilhelm ; et al. | 2005-03-10 |
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