| Patent | Date |
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Graphene spectral purity filter
Grant 10,481,510 - Yakunin , et al. Nov | 2019-11-19 |
Membranes for use within a lithographic apparatus and a lithographic apparatus comprising such a membrane
Grant 10,228,615 - Nikipelov , et al. | 2019-03-12 |
Pellicle For Reticle And Multilayer Mirror
App 20180259846 - YAKUNIN; Andrei Mikhailovich ; et al. | 2018-09-13 |
Lithographic apparatus
Grant 10,031,422 - Nikipelov , et al. July 24, 2 | 2018-07-24 |
Lithographic apparatus, spectral purity filter and device manufacturing method
Grant 10,001,709 - Banine , et al. June 19, 2 | 2018-06-19 |
Lithographic system
Grant 9,989,863 - Van Schoot , et al. June 5, 2 | 2018-06-05 |
Method and apparatus for generating radiation
Grant 9,986,628 - Loopstra , et al. May 29, 2 | 2018-05-29 |
Optical element comprising oriented carbon nanotube sheet and lithographic apparatus comprising such optical element
Grant 9,897,930 - Sjmaenok , et al. February 20, 2 | 2018-02-20 |
Radiation source
Grant 9,860,966 - Van Schoot , et al. January 2, 2 | 2018-01-02 |
Spectral purity filter
Grant 9,726,989 - Soer , et al. August 8, 2 | 2017-08-08 |
Membranes For Use Within A Lithographic Apparatus And A Lithographic Apparatus Comprising Such A Membrane
App 20170205704 - NIKIPELOV; Andrey Alexandrovich ; et al. | 2017-07-20 |
Lithographic Apparatus, Spectral Purity Filter and Device Manufacturing Method
App 20170160646 - BANINE; Vadim Yevgenyevich ; et al. | 2017-06-08 |
Radiation source
Grant 9,632,419 - Van Schoot , et al. April 25, 2 | 2017-04-25 |
Lithographic apparatus and method of manufacturing a device
Grant 9,606,445 - Banine , et al. March 28, 2 | 2017-03-28 |
Lithographic apparatus, spectral purity filter and device manufacturing method
Grant 9,594,306 - Banine , et al. March 14, 2 | 2017-03-14 |
Lithographic System
App 20170052456 - VAN SCHOOT; Jan Bernard Plechelmus ; et al. | 2017-02-23 |
Pellicle For Reticle And Multilayer Mirror
App 20170017150 - YAKUNIN; Andrei Mikhailovich ; et al. | 2017-01-19 |
Radiation source, lithographic apparatus, and device manufacturing method
Grant 9,529,283 - Yakunin , et al. December 27, 2 | 2016-12-27 |
Pellicle for reticle and multilayer mirror
Grant 9,482,960 - Yakunin , et al. November 1, 2 | 2016-11-01 |
Multilayer mirror, method of producing a multilayer mirror and lithographic apparatus
Grant 9,448,492 - Yakunin , et al. September 20, 2 | 2016-09-20 |
Method and apparatus for generating radiation
Grant 9,442,380 - Badie , et al. September 13, 2 | 2016-09-13 |
Source-collector device, lithographic apparatus, and device manufacturing method
Grant 9,411,238 - Yakunin , et al. August 9, 2 | 2016-08-09 |
Lithographic apparatus and method
Grant 9,395,630 - Yakunin , et al. July 19, 2 | 2016-07-19 |
Grazing incidence reflectors, lithographic apparatus, methods for manufacturing a grazing incidence reflector and methods for manufacturing a device
Grant 9,377,695 - Yakunin , et al. June 28, 2 | 2016-06-28 |
Radiation source
Grant 9,366,967 - Yakunin , et al. June 14, 2 | 2016-06-14 |
Multilayer mirror
Grant 9,329,503 - Timoshkov , et al. May 3, 2 | 2016-05-03 |
Radiation source apparatus, lithographic apparatus, method of generating and delivering radiation and method for manufacturing a device
Grant 9,298,110 - Steinhoff , et al. March 29, 2 | 2016-03-29 |
Mirror, lithographic apparatus and device manufacturing method
Grant 9,285,690 - Banine , et al. March 15, 2 | 2016-03-15 |
Lithographic patterning process and resists to use therein
Grant 9,261,784 - Wuister , et al. February 16, 2 | 2016-02-16 |
Spectral purity filter, lithographic apparatus, and method for manufacturing a spectral purity filter
Grant 9,195,152 - Soer , et al. November 24, 2 | 2015-11-24 |
Spectral purity filter, radiation source, lithographic apparatus, and device manufacturing method
Grant 9,195,144 - Jak , et al. November 24, 2 | 2015-11-24 |
Method and Apparatus for Generating Radiation
App 20150296602 - Loopstra; Erik Roelof ; et al. | 2015-10-15 |
Lithographic Apparatus
App 20150286145 - Nikipelov; Andrey ; et al. | 2015-10-08 |
Method and Apparatus for Generating Radiation
App 20150268559 - Badie; Ramin ; et al. | 2015-09-24 |
Lithographic Apparatus and Method of Manufacturing a Device
App 20150192861 - Banine; Vadim Yevgenyevich ; et al. | 2015-07-09 |
Multilayer mirror and lithographic apparatus
Grant 9,046,780 - Yakunin June 2, 2 | 2015-06-02 |
Radiation Source
App 20150146182 - Van Schoot; Jan Bernard Plechelmus ; et al. | 2015-05-28 |
Spectral purity filter
Grant 9,007,565 - Yakunin , et al. April 14, 2 | 2015-04-14 |
Source-collector Device, Lithographic Apparatus, And Device Manufacturing Method
App 20140375974 - Yakunin; Andrei Mikhailovich ; et al. | 2014-12-25 |
Radiation Source
App 20140368802 - Yakunin; Andrei Mikhailovich ; et al. | 2014-12-18 |
Radiation Source
App 20140253894 - Van Schoot; Jan Bernard Plechelmus ; et al. | 2014-09-11 |
Lithographic Patterning Process And Resists To Use Therein
App 20140212819 - Wuister; Sander Frederik ; et al. | 2014-07-31 |
Multilayer Mirror, Method Of Producing A Multilayer Mirror And Lithographic Apparatus
App 20140198306 - Yakunin; Andrei Mikhailovich ; et al. | 2014-07-17 |
Radiation source and lithographic apparatus
Grant 8,755,032 - Yakunin , et al. June 17, 2 | 2014-06-17 |
Pellicle For Reticle And Multilayer Mirror
App 20140160455 - YAKUNIN; Andrei Mikhailovich ; et al. | 2014-06-12 |
Lithographic Apparatus, Spectral Purity Filter and Device Manufacturing Method
App 20140085619 - Banine; Vadim Yevgenyevich ; et al. | 2014-03-27 |
Grazing Incidence Reflectors, Lithographic Apparatus, Methods for Manufacturing a Grazing Incidence Reflector and Methods for Manufacturing a Device
App 20140078486 - Yakunin; Andrei Mikhailovich ; et al. | 2014-03-20 |
Imprint lithography
Grant 8,454,849 - Wuister , et al. June 4, 2 | 2013-06-04 |
Lithographic Apparatus And Method
App 20130088699 - Yakunin; Andrei Mikhailovich ; et al. | 2013-04-11 |
Methods To Control Euv Exposure Dose And Euv Lithographic Methods And Apparatus Using Such Methods
App 20130077073 - VAN SCHOOT; Jan Bernard Plechelmus ; et al. | 2013-03-28 |
System For Removing Contaminant Particles, Lithographic Apparatus, Method For Removing Contaminant Particles And Method For Manufacturing A Device
App 20130070218 - Ivanov; Vladimir Vitalevich ; et al. | 2013-03-21 |
Multilayer Mirror
App 20130057840 - Timoshkov; Vadim Iourievich ; et al. | 2013-03-07 |
Spectral Purity Filter
App 20130038926 - Soer; Wouter Anthon ; et al. | 2013-02-14 |
Radiation system and lithographic apparatus
Grant 8,368,040 - Loopstra , et al. February 5, 2 | 2013-02-05 |
EUV Radiation Source and EUV Radiation Generation Method
App 20130015373 - Yakunin; Andrei Mikhailovich ; et al. | 2013-01-17 |
Lithographic Apparatus And Spectral Purity Filter
App 20130010275 - Medvedev; Viacheslav ; et al. | 2013-01-10 |
Optical element, lithographic apparatus including such an optical element, device manufacturing method, and device manufactured thereby
Grant 8,345,223 - Soer , et al. January 1, 2 | 2013-01-01 |
Radiation Source, Lithographic Apparatus and Device Manufacturing Method
App 20120327381 - Labetski; Dzmitry ; et al. | 2012-12-27 |
Multilayer Mirror And Lithographic Apparatus
App 20120320354 - YAKUNIN; Andrei Mikhailovich | 2012-12-20 |
Spectral Purity Filter
App 20120307224 - Yakunin; Andrei Mikhailovich ; et al. | 2012-12-06 |
Multilayer Mirror, Lithograpic Apparatus, And Methods For Manufacturing A Multilayer Mirror And A Product
App 20120229785 - Krivtsun; Vladimir Mihailovitch ; et al. | 2012-09-13 |
Spectral Purity Filter, Lithographic Apparatus, And Device Manufacturing Method
App 20120182537 - Yakunin; Andrei Mikhailovich ; et al. | 2012-07-19 |
Spectral Purity Filter, Lithographic Apparatus, Method For Manufacturing A Spectral Purity Filter And Method Of Manufacturing A Device Using Lithographic Apparatus
App 20120170015 - Yakunin; Andrei Mikhailovich ; et al. | 2012-07-05 |
Optical Element For A Lithographic Apparatus, Lithographic Apparatus Comprising Such Optical Element And Method For Making The Optical Element
App 20110249243 - Sjmaenok; Leonid Aizikovitch ; et al. | 2011-10-13 |
Imprint Lithography
App 20110226735 - Wuister; Sander Frederik ; et al. | 2011-09-22 |
Mirror, Lithographic Apparatus and Device Manufacturing Method
App 20110228243 - Banine; Vadim Yevgenyevich ; et al. | 2011-09-22 |
Radiation Source Apparatus, Lithographic Apparatus, Method Of Generating And Delivering Radiation And Method For Manufacturing A Device
App 20110222040 - STEINHOFF; Jens Arno ; et al. | 2011-09-15 |
Spectral Purity Filter, Radiation Source, Lithographic Apparatus, and Device Manufacturing Method
App 20110211185 - Jak; Martin Jacobus Johan ; et al. | 2011-09-01 |
Lithographic Apparatus and Device Manufacturing Method
App 20110170083 - Scaccabarozzi; Luigi ; et al. | 2011-07-14 |
Spectral Purity Filter, Lithographic Apparatus, And Method For Manufacturing A Spectral Purity Filter
App 20110164237 - Soer; Wouter Anthon ; et al. | 2011-07-07 |
Radiation Source And Lithographic Apparatus
App 20110164236 - Yakunin; Andrei Mikhailovich ; et al. | 2011-07-07 |
Radiation Source, Lithographic Apparatus, And Device Manufacturing Method
App 20110143269 - Yakunin; Andrei Mikhailovich ; et al. | 2011-06-16 |
Source Module Of An Euv Lithographic Apparatus, Lithographic Apparatus, And Method For Manufacturing A Device
App 20110109892 - Van Herpen; Maarten Marinus Johannes Wilhelmus ; et al. | 2011-05-12 |
Spectral Purity Filters For Use In A Lithographic Apparatus
App 20110043782 - Soer; Wouter Anthon ; et al. | 2011-02-24 |
Optical Element, Lithographic Apparatus Including Such An Optical Element, Device Manufacturing Method, And Device Manufactured Thereby
App 20110019174 - Soer; Wouter Anthon ; et al. | 2011-01-27 |
Radiation System And Lithographic Apparatus
App 20110013166 - Loopstra; Erik Roelof ; et al. | 2011-01-20 |
Spectral Purity Filter, Lithographic Apparatus, And Method For Manufacturing A Spectral Purity Filter
App 20100328639 - Jak; Martin Jacobus Johan ; et al. | 2010-12-30 |
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