Patent | Date |
---|
Interposer And Manufacturing Method For The Same App 20120085655 - Kagawa; Kenichi ;   et al. | 2012-04-12 |
Displacement measurement apparatus for microstructure and displcement measurement method thereof Grant 8,141,426 - Ikeuchi , et al. March 27, 2 | 2012-03-27 |
Pressure wave generator and temperature controlling method thereof Grant 8,130,593 - Hayashi , et al. March 6, 2 | 2012-03-06 |
Switch array Grant 7,994,443 - Hayashi , et al. August 9, 2 | 2011-08-09 |
Interposer, Probe Card And Method For Manufacturing The Interposer App 20110109338 - Yakabe; Masami ;   et al. | 2011-05-12 |
Method for manufacturing an interposer Grant 7,891,090 - Yakabe , et al. February 22, 2 | 2011-02-22 |
Through substrate, interposer and manufacturing method of through substrate Grant 7,866,038 - Yakabe , et al. January 11, 2 | 2011-01-11 |
Device, method and program for inspecting microstructure Grant 7,726,190 - Matsumoto , et al. June 1, 2 | 2010-06-01 |
Pressure Wave Generator And Temperature Controlling Method Thereof App 20100025145 - Hayashi; Masato ;   et al. | 2010-02-04 |
Capacitance detection circuit and capacitance detection method Grant 7,557,590 - Yakabe July 7, 2 | 2009-07-07 |
Displacement Measurement apparatus for microstructure and displcement measurement method thereof App 20090145230 - Ikeuchi; Naoki ;   et al. | 2009-06-11 |
Microstructure Probe Card, and Microstructure Inspecting Device, Method, and Computer Program App 20090128171 - Okumura; Katsuya ;   et al. | 2009-05-21 |
Switch Array App 20090045039 - Hayashi; Masato ;   et al. | 2009-02-19 |
Microstructure Inspecting Apparatus And Microstructure Inspecting Method App 20090039908 - Ikeuchi; Naoki ;   et al. | 2009-02-12 |
Microstructure Inspecting Apparatus and Microstructure Inspecting Method App 20080302185 - Yakabe; Masami ;   et al. | 2008-12-11 |
Minute structure inspection device, inspection method, and inspection program App 20080223136 - Yakabe; Masami ;   et al. | 2008-09-18 |
Device, Method and Program for Inspecting Microstructure App 20080190206 - Matsumoto; Toshiyuki ;   et al. | 2008-08-14 |
Interposer, Probe Card and Method for Manufacturing the Interposer App 20080171452 - Yakabe; Masami ;   et al. | 2008-07-17 |
Capacitance Detection Circuit and and Capacitance Detection Method App 20080150553 - Yakabe; Masami | 2008-06-26 |
Device for inspecting micro structure, method for inspecting micro structure and program for inspecting micro structure Grant 7,383,732 - Okumura , et al. June 10, 2 | 2008-06-10 |
Potential fixing device and potential fixing method Grant 7,368,920 - Yakabe May 6, 2 | 2008-05-06 |
Probing card and inspection apparatus for microstructure Grant 7,348,788 - Yakabe , et al. March 25, 2 | 2008-03-25 |
Interposer And Manufacturing Method For The Same App 20080067073 - Kagawa; Kenichi ;   et al. | 2008-03-20 |
Semiconductor Device App 20070278650 - Kagawa; Kenichi ;   et al. | 2007-12-06 |
Probe App 20070257692 - Yakabe; Masami ;   et al. | 2007-11-08 |
Through Substrate, Interposer and Manufacturing Method of Through Substrate App 20070246253 - Yakabe; Masami ;   et al. | 2007-10-25 |
Capacity detection type sensor element App 20070193358 - Kagawa; Kenichi ;   et al. | 2007-08-23 |
Probing card and inspection apparatus for microstructure App 20070069746 - Yakabe; Masami ;   et al. | 2007-03-29 |
Sensor capacity sensing apparatus and sensor capacity sensing method Grant 7,088,112 - Yakabe August 8, 2 | 2006-08-08 |
Potential fixing device, potential fixing method, and capacitance measuring instrument Grant 7,046,016 - Yakabe , et al. May 16, 2 | 2006-05-16 |
Electrostatic capacitance detection circuit and microphone device Grant 7,034,551 - Yakabe , et al. April 25, 2 | 2006-04-25 |
Impedance measuring circuit and capacitance measuring circuit Grant 7,023,223 - Yakabe , et al. April 4, 2 | 2006-04-04 |
Electrostatic capacitance detection circuit and microphone device Grant 7,019,540 - Yakabe , et al. March 28, 2 | 2006-03-28 |
Circuit and method for impedance detection Grant 7,005,865 - Yakabe , et al. February 28, 2 | 2006-02-28 |
Device for inspecting micro structure, method for inspecting micro structure and program for inspecting micro structure App 20050279170 - Okumura, Katsuya ;   et al. | 2005-12-22 |
Potential fixing device, potential fixing method, and capacitance mearuing instrument App 20050116700 - Yakabe, Masami ;   et al. | 2005-06-02 |
Logarithmic digital to analog converter having multipliers coupled to reference voltages Grant 6,900,751 - Yakabe May 31, 2 | 2005-05-31 |
Capacitance measuring circuit, capacitance measuring instrument, and microphone device App 20050040833 - Yakabe, Masami ;   et al. | 2005-02-24 |
Sensor capacity sensing apparatus and sensor capacity sensing method App 20050036271 - Yakabe, Masami | 2005-02-17 |
Impedance measuring circuit, it's method, and capacitance measuring circuit App 20050035771 - Yakabe, Masami ;   et al. | 2005-02-17 |
Impedance measuring circuit and capacitance measuring circuit App 20050030046 - Yakabe, Masami ;   et al. | 2005-02-10 |
Potential fixing device and potential fixing method App 20050030679 - Yakabe, Masami | 2005-02-10 |
Capacitance measuring circuit capacitance measuring instrument and microphone device App 20050017737 - Yakabe, Masami ;   et al. | 2005-01-27 |
Logarithmic A/D converter, a logarithmic A/D conversion method, a logarithmic D/A converter, a logarithmic D/A conversion method, and a physical quantity measuring system App 20040263371 - Yakabe, Masami | 2004-12-30 |
Impedance detection circuit, impedance detection device, and impedance detection method Grant 6,756,790 - Yakabe , et al. June 29, 2 | 2004-06-29 |
Logarithmic a/d converter, method of logarithmic a/d conversion logarithmic d/a converter, method of logarithmic d/a conversion, and system for measuring physical quantity Grant 6,633,247 - Yakabe October 14, 2 | 2003-10-14 |
Logarithmic a/d converter, method of logarithmic a/d conversion logarithmic d/a converter, method of logarithmic d/a conversion, and system for measuring physical quantity App 20020181257 - Yakabe, Masami | 2002-12-05 |
Impedance detection circuit, impedance detector and method of impedance detection App 20020171454 - Yakabe, Masami ;   et al. | 2002-11-21 |