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Patent applications and USPTO patent grants for Yair; Itzak.The latest application filed is for "system and method for temperature control of a semiconductor wafer".
Patent | Date |
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System and method for temperature control of a semiconductor wafer Grant 9,111,971 - Shavit , et al. August 18, 2 | 2015-08-18 |
Conductive element for electrically coupling an EUVL mask to a supporting chuck Grant 8,772,737 - July 8, 2 | 2014-07-08 |
System And Method For Temperature Control Of A Semiconductor Wafer App 20140027437 - Shavit; Lavy ;   et al. | 2014-01-30 |
Conductive Element For Electrically Coupling An Euvl Mask To A Supporting Chuck App 20130075605 - Krivts (Krayvitz); Igor ;   et al. | 2013-03-28 |
Method and apparatus for cleaning an analytical instrument while operating the analytical instrument Grant 6,667,475 - Parran , et al. December 23, 2 | 2003-12-23 |
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