Patent | Date |
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Method for manufacturing integrated circuit device Grant 9,887,098 - Yahashi February 6, 2 | 2018-02-06 |
Method for manufacturing semiconductor memory device Grant 9,570,461 - Hashimoto , et al. February 14, 2 | 2017-02-14 |
Method For Manufacturing Integrated Circuit Device App 20160379843 - YAHASHI; Katsunori | 2016-12-29 |
Method For Manufacturing Semiconductor Memory Device App 20150372007 - HASHIMOTO; Junichi ;   et al. | 2015-12-24 |
Plasma Etching Method And Plasma Etching Apparatus App 20140284308 - MATSUYAMA; Shoichiro ;   et al. | 2014-09-25 |
Nonvolatile semiconductor memory device, three-dimensional semiconductor device, and method of manufacturing the same Grant 8,648,404 - Ko , et al. February 11, 2 | 2014-02-11 |
Non-volatile memory device and manufacturing method of the same Grant 8,649,217 - Kuniya , et al. February 11, 2 | 2014-02-11 |
Method For Manufacturing Semiconductor Device And Semiconductor Device App 20130234232 - YAHASHI; Katsunori | 2013-09-12 |
Method For Manufacturing Semiconductor Memory Device And Semiconductor Memory Device App 20130234235 - MATSUDA; Toru ;   et al. | 2013-09-12 |
Semiconductor memory device and method for manufacturing same Grant 8,492,824 - Yahashi July 23, 2 | 2013-07-23 |
Semiconductor device and method for manufacturing same Grant 8,487,365 - Sasaki , et al. July 16, 2 | 2013-07-16 |
Semiconductor memory device and method of manufacturing the same Grant 8,460,997 - Omura , et al. June 11, 2 | 2013-06-11 |
Non-volatile Memory Device And Manufacturing Method Of The Same App 20130069029 - KUNIYA; Takuji ;   et al. | 2013-03-21 |
Nonvolatile Semiconductor Memory Device, Three-dimensional Semiconductor Device, And Method Of Manufacturing The Same App 20120319173 - KO; Nikka ;   et al. | 2012-12-20 |
Method for manufacturing semiconductor device Grant 8,313,998 - Satonaka , et al. November 20, 2 | 2012-11-20 |
Nonvolatile semiconductor memory device and method for manufacturing the same Grant 8,294,199 - Yahashi , et al. October 23, 2 | 2012-10-23 |
Semiconductor device manufacturing method including exposing electrode layers into a hole Grant 8,273,628 - Yahashi September 25, 2 | 2012-09-25 |
Semiconductor Memory Device And Method For Manufacturing Same App 20120211816 - YAHASHI; Katsunori | 2012-08-23 |
Method for manufacturing semiconductor device Grant 8,216,942 - Hasegawa , et al. July 10, 2 | 2012-07-10 |
Method for manufacturing semiconductor device including a patterned SiOC film as a mask Grant 8,211,783 - Sakurai , et al. July 3, 2 | 2012-07-03 |
Semiconductor device and method for manufacturing same Grant 8,178,913 - Murakoshi , et al. May 15, 2 | 2012-05-15 |
Nonvolatile Semiconductor Memory Device And Method For Manufacturing The Same App 20120018796 - Yahashi; Katsunori ;   et al. | 2012-01-26 |
Method of fabricating semiconductor device Grant 8,088,689 - Kikutani , et al. January 3, 2 | 2012-01-03 |
Nonvolatile semiconductor memory device and method for manufacturing same Grant 8,072,024 - Ishikawa , et al. December 6, 2 | 2011-12-06 |
Semiconductor Device And Method For Manufacturing Same App 20110291178 - SASAKI; Toshiyuki ;   et al. | 2011-12-01 |
Method of manufacturing semiconductor memory device, and semiconductor memory device Grant 8,062,940 - Ko , et al. November 22, 2 | 2011-11-22 |
Semiconductor device and method of fabricating the same Grant 8,062,938 - Nishiyama , et al. November 22, 2 | 2011-11-22 |
Method Of Fabricating A Semiconductor Device App 20110223769 - Ko; Nikka ;   et al. | 2011-09-15 |
Method For Manufacturing Semiconductor Device App 20110201167 - SATONAKA; Tomoya ;   et al. | 2011-08-18 |
Method For Manufacturing Semiconductor Device App 20110183497 - SAKURAI; Noriko ;   et al. | 2011-07-28 |
Method Of Manufacturing Semiconductor Memory Device And Semiconductor Memory Device App 20110147942 - YAHASHI; Katsunori ;   et al. | 2011-06-23 |
Semiconductor device having MISFETs and manufacturing method thereof Grant 7,939,891 - Matsuo , et al. May 10, 2 | 2011-05-10 |
Semiconductor memory device and method of manufacturing the same App 20110097888 - Omura; Mitsuhiro ;   et al. | 2011-04-28 |
Semiconductor device and method for manufacturing same Grant 7,928,483 - Murakoshi , et al. April 19, 2 | 2011-04-19 |
Semiconductor device and method for manufacturing same App 20110079833 - Murakoshi; Atsushi ;   et al. | 2011-04-07 |
Semiconductor Device Manufacturing Method And Semiconductor Device App 20110049607 - YAHASHI; Katsunori | 2011-03-03 |
Method For Manufacturing Semiconductor Device App 20100323505 - ISHIKAWA; Masao ;   et al. | 2010-12-23 |
Method Of Manufacturing Semiconductor Memory Device, And Semiconductor Memory Device App 20100176368 - KO; Nikka ;   et al. | 2010-07-15 |
Semiconductor device and method of fabricating the same App 20100151645 - Nishiyama; Nobuyasu ;   et al. | 2010-06-17 |
Semiconductor device having a pole-shaped portion and method of fabricating the same Grant 7,683,436 - Nishiyama , et al. March 23, 2 | 2010-03-23 |
Nonvolatile Semiconductor Memory Device And Method For Manufacturing Same App 20090283819 - Ishikawa; Masao ;   et al. | 2009-11-19 |
Semiconductor Device Having Misfets And Manufacturing Method Thereof App 20090256178 - MATSUO; Kouji ;   et al. | 2009-10-15 |
Method Of Fabricating Semiconductor Device App 20090221147 - Kikutani; Keisuke ;   et al. | 2009-09-03 |
Semiconductor Device And Method For Manufacturing Same App 20090212337 - MURAKOSHI; Atsushi ;   et al. | 2009-08-27 |
Method For Manufacturing Semiconductor Device App 20090130851 - Hasegawa; Makoto ;   et al. | 2009-05-21 |
Semiconductor Memory Device And Method Of Manufacturing The Same App 20090096007 - OMURA; Mitsuhiro ;   et al. | 2009-04-16 |
Method of manufacturing semiconductor device Grant 7,387,921 - Yahashi , et al. June 17, 2 | 2008-06-17 |
Semiconductor device and method of fabricating the same App 20070262353 - Nishiyama; Nobuyasu ;   et al. | 2007-11-15 |
Semiconductor device App 20060231877 - Takenaka; Keiichi ;   et al. | 2006-10-19 |
Semiconductor manufacturing apparatus and manufacturing method of semiconductor device App 20060137988 - Yahashi; Katsunori ;   et al. | 2006-06-29 |
Method of manufacturing semiconductor device App 20060138413 - Yahashi; Katsunori ;   et al. | 2006-06-29 |
Method of manufacturing semiconductor device App 20060128093 - Takenaka; Keiichi ;   et al. | 2006-06-15 |
Semiconductor device including trench capacitor and manufacturing method of the same App 20040188739 - Takenaka, Keiichi ;   et al. | 2004-09-30 |
GAN group crystal base member having low dislocation density, use thereof and manufacturing methods thereof Grant 6,225,650 - Tadatomo , et al. May 1, 2 | 2001-05-01 |