loadpatents
Patent applications and USPTO patent grants for Yagita; Takanori.The latest application filed is for "ion implanter and particle detection method".
Patent | Date |
---|---|
Ion Implanter And Particle Detection Method App 20220102112 - Ninomiya; Aki ;   et al. | 2022-03-31 |
Ion implanter and beam park device Grant 11,017,978 - Yagita May 25, 2 | 2021-05-25 |
Ion Implanter And Beam Park Device App 20200152409 - Yagita; Takanori | 2020-05-14 |
Ion implantation apparatus Grant 9,520,265 - Yagita December 13, 2 | 2016-12-13 |
Ion implantation apparatus Grant 9,431,214 - Matsushita , et al. August 30, 2 | 2016-08-30 |
Ion implantation apparatus, beam parallelizing apparatus, and ion implantation method Grant 9,343,262 - Yagita , et al. May 17, 2 | 2016-05-17 |
Ion implantation apparatus, final energy filter, and ion implantation method Grant 9,293,295 - Yagita March 22, 2 | 2016-03-22 |
Ion implantation apparatus and ion implantation method Grant 9,236,222 - Yagita , et al. January 12, 2 | 2016-01-12 |
Ion Implantation Apparatus And Ion Implantation Method App 20150357160 - Yagita; Takanori ;   et al. | 2015-12-10 |
Ion implantation apparatus Grant 9,208,991 - Matsushita , et al. December 8, 2 | 2015-12-08 |
Ion Implantation Apparatus App 20150340202 - Matsushita; Hiroshi ;   et al. | 2015-11-26 |
Ion Implantation Apparatus App 20150340197 - Matsushita; Hiroshi ;   et al. | 2015-11-26 |
Ion Implantation Apparatus, Final Energy Filter, And Ion Implantation Method App 20150279612 - Yagita; Takanori | 2015-10-01 |
Ion implantation apparatus and ion implantation method Grant 9,117,627 - Manabe , et al. August 25, 2 | 2015-08-25 |
Ion Implantation Apparatus App 20150155129 - Yagita; Takanori | 2015-06-04 |
Ion Implantation Apparatus And Ion Implantation Method App 20150064887 - Manabe; Kazuhisa ;   et al. | 2015-03-05 |
Ion Implantation Apparatus, Beam Parallelizing Apparatus, And Ion Implantation Method App 20150064888 - Yagita; Takanori ;   et al. | 2015-03-05 |
Ion implantation apparatus and control method thereof Grant 8,692,216 - Kariya , et al. April 8, 2 | 2014-04-08 |
Ion Implantation Apparatus And Control Method Thereof App 20130256566 - KARIYA; Hiroyuki ;   et al. | 2013-10-03 |
Beam processing apparatus Grant 7,982,192 - Tsukihara , et al. July 19, 2 | 2011-07-19 |
Ion implantation apparatus and ion implantation method Grant 7,851,772 - Tsukihara , et al. December 14, 2 | 2010-12-14 |
Ion implantation apparatus and method of converging/shaping ion beam used therefor Grant 7,755,067 - Tsukihara , et al. July 13, 2 | 2010-07-13 |
Beam Processing Apparatus App 20080258074 - TSUKIHARA; Mitsukuni ;   et al. | 2008-10-23 |
Ion Implantation Apparatus and Method of Converging/Shaping Ion Beam Used Therefor App 20080251734 - Tsukihara; Mitsukuni ;   et al. | 2008-10-16 |
Ion Implantation Apparatus And Ion Implantation Method App 20080251713 - Tsukihara; Mitsukuni ;   et al. | 2008-10-16 |
Irradiation system with ion beam/charged particle beam Grant 7,423,276 - Yagita September 9, 2 | 2008-09-09 |
Beam processing system and beam processing method Grant 7,411,709 - Yagita , et al. August 12, 2 | 2008-08-12 |
Beam processing system and beam processing method App 20080002244 - Yagita; Takanori ;   et al. | 2008-01-03 |
Irradiation system with ion beam/charged particle beam Grant 7,315,034 - Yagita , et al. January 1, 2 | 2008-01-01 |
Beam space-charge compensation device and ion implantation system having the same Grant 7,276,711 - Kawaguchi , et al. October 2, 2 | 2007-10-02 |
Beam space-charge compensation device and ion implantation system having the same App 20060113491 - Kawaguchi; Hiroshi ;   et al. | 2006-06-01 |
Irradiation system with ion beam/charged particle beam App 20060113468 - Yagita; Takanori | 2006-06-01 |
Irradiation system with ion beam/charged particle beam App 20060113467 - Yagita; Takanori ;   et al. | 2006-06-01 |
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