Yabuta; Hironobu
Patent Applications and Registrations
Patent applications and USPTO patent grants for Yabuta; Hironobu.The latest application filed is for "foil trap and light source apparatus including the same".
- Yabuta; Hironobu - Tokyo JP
- Yabuta; Hironobu - Gotenba JP
- YABUTA; Hironobu - Gotenba-shi JP
- Yabuta; Hironobu - Shizuoka JP
- Yabuta; Hironobu - Himeji JP
- Yabuta; Hironobu - Himeji-shi JP
| Patent | Date |
|---|---|
| Foil Trap And Light Source Apparatus Including The Same App 20220291597 - Yabuta; Hironobu | 2022-09-15 |
| Foil trap and light source device using such foil trap Grant 9,599,812 - Metzmacher , et al. March 21, 2 | 2017-03-21 |
| Light source apparatus Grant 9,572,240 - Niimi , et al. February 14, 2 | 2017-02-14 |
| Light Source Apparatus App 20160330826 - NIIMI; Gota ; et al. | 2016-11-10 |
| Foil Trap And Light Source Device Using Such Foil Trap App 20160195714 - METZMACHER; Christof ; et al. | 2016-07-07 |
| Extreme ultraviolet radiation source device Grant 7,705,334 - Yabuta , et al. April 27, 2 | 2010-04-27 |
| Device for producing extreme UV radiation Grant 7,479,645 - Yabuta , et al. January 20, 2 | 2009-01-20 |
| Extreme UV radiation source device and method for eliminating debris which forms within the device Grant 7,459,708 - Inoue , et al. December 2, 2 | 2008-12-02 |
| Extreme ultraviolet radiation source device App 20080099699 - Yabuta; Hironobu ; et al. | 2008-05-01 |
| Device For Producing Extreme Uv Radiation App 20070018119 - Yabuta; Hironobu ; et al. | 2007-01-25 |
| Extreme UV radiation source device and method for eliminating debris which forms within the device App 20060163500 - Inoue; Masaki ; et al. | 2006-07-27 |
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