YABU; Takayuki

Patent Applications and Registrations

Patent applications and USPTO patent grants for YABU; Takayuki.The latest application filed is for "extreme ultraviolet light generation system and electronic device manufacturing method".

Company Profile

12.55.63

YABU; Takayuki - Oyama-shi JP
Yabu; Takayuki - Oyama JP
Yabu; Takayuki - Tochigi-ken JP
Yabu; Takayuki - Tochigi JP
Yabu; Takayuki - Hiratsuka N/A JP
YABU; Takayuki - Hiratsuka-shi JP
Yabu; Takayuki - Kanagawa JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Extreme Ultraviolet Light Generation System And Electronic Device Manufacturing Method App 20220232690 - NISHIMURA; Yuichi ; et al.	2022-07-21
Extreme Ultraviolet Light Generation System And Electronic Device Manufacturing Method App 20220110205 - YABU; Takayuki ; et al.	2022-04-07
Extreme Ultraviolet Light Generation Apparatus And Electronic Device Manufacturing Method App 20220078898 - YABU; Takayuki ; et al.	2022-03-10
Extreme ultraviolet light generation system and electronic device manufacturing method Grant 11,219,116 - Takashima , et al. January 4, 2	2022-01-04
Extreme Ultraviolet Light Generation System And Electronic Device Manufacturing Method App 20210410262 - TAKASHIMA; Yuta ; et al.	2021-12-30
Extreme Ultraviolet Light Generation System And Electronic Device Manufacturing Method App 20210333718 - NISHIMURA; Yuichi ; et al.	2021-10-28
Laser apparatus and EUV light generation system Grant 11,043,784 - Hori , et al. June 22, 2	2021-06-22
Extreme ultraviolet light generation system, laser beam size controlling method, and electronic device manufacturing method Grant 10,908,429 - Yabu , et al. February 2, 2	2021-02-02
Extreme Ultraviolet Light Generation System, Laser Beam Size Controlling Method, And Electronic Device Manufacturing Method App 20200393687 - YABU; Takayuki ; et al.	2020-12-17
Target measuring apparatus and extreme ultraviolet light generation apparatus Grant 10,869,378 - Yabu December 15, 2	2020-12-15
Extreme ultraviolet light generation system Grant 10,842,010 - Yabu , et al. November 17, 2	2020-11-17
Extreme ultraviolet (EUV) light generating apparatus and control method for centroid of EUV light Grant 10,609,803 - Nishimura , et al.	2020-03-31
Laser Apparatus And Euv Light Generation System App 20200044407 - HORI; Tsukasa ; et al.	2020-02-06
Target Measuring Apparatus And Extreme Ultraviolet Light Generation Apparatus App 20200037429 - YABU; Takayuki	2020-01-30
Extreme ultraviolet light generation device Grant 10,531,550 - Yabu J	2020-01-07
Extreme ultraviolet light generating apparatus Grant 10,531,551 - Yabu , et al. J	2020-01-07
Extreme Ultraviolet (euv) Light Generating Apparatus And Control Method For Centroid Of Euv Light App 20190361361 - NISHIMURA; Yuichi ; et al.	2019-11-28
Extreme Ultraviolet Light Generation System App 20190313519 - YABU; Takayuki ; et al.	2019-10-10
Extreme Ultraviolet Light Generation System App 20190289707 - NISHIMURA; Yuichi ; et al.	2019-09-19
Extreme ultraviolet light generation device Grant 10,303,061 - Nishimura , et al.	2019-05-28
Droplet detector and extreme ultraviolet light generating apparatus Grant 10,271,414 - Satou , et al.	2019-04-23
Extreme ultraviolet light generating apparatus and control method for centroid of extreme ultraviolet light Grant 10,251,254 - Nishimura , et al.	2019-04-02
Target supply device and extreme ultraviolet light generating device Grant 10,225,917 - Fujimaki , et al.	2019-03-05
Extreme ultraviolet light generating apparatus Grant 10,225,918 - Nishimura , et al.	2019-03-05
Extreme ultraviolet light generating device Grant 10,191,381 - Yabu Ja	2019-01-29
Extreme UV light generator Grant 10,172,224 - Yabu , et al. J	2019-01-01
Extreme Ultraviolet Light Generating Apparatus App 20180352641 - NISHIMURA; Yuichi ; et al.	2018-12-06
Extreme Ultraviolet Light Generating Apparatus And Control Method For Centroid Of Extreme Ultraviolet Light App 20180343729 - NISHIMURA; Yuichi ; et al.	2018-11-29
Target image-capture device, extreme-ultraviolet-light generation device, and extreme-ultraviolet-light generation system Grant 10,141,186 - Hosoda , et al. Nov	2018-11-27
Extreme ultraviolet light generating apparatus Grant 10,102,938 - Yabu , et al. October 16, 2	2018-10-16
Extreme Ultraviolet Light Generation Device App 20180284617 - NISHIMURA; Yuichi ; et al.	2018-10-04
Target Supply Device And Extreme Ultraviolet Light Generating Device App 20180288863 - FUJIMAKI; Takahisa ; et al.	2018-10-04
Extreme ultraviolet light generating system Grant 10,085,334 - Yabu September 25, 2	2018-09-25
Extreme Ultraviolet Light Generating Apparatus App 20180240562 - YABU; Takayuki ; et al.	2018-08-23
Extreme ultraviolet light generation system and method of generating extreme ultraviolet light Grant 10,057,972 - Ueno , et al. August 21, 2	2018-08-21
Extreme ultraviolet light generating apparatus and method for generating extreme ultraviolet light Grant 10,054,861 - Yabu August 21, 2	2018-08-21
Extreme Ultraviolet Light Generating Apparatus App 20180235064 - YABU; Takayuki ; et al.	2018-08-16
Extreme Ultraviolet Light Generating Device App 20180224746 - YABU; Takayuki	2018-08-09
Extreme Ultraviolet Light Generating System App 20180199422 - YABU; Takayuki	2018-07-12
Extreme Ultraviolet Light Generation Device App 20180173102 - YABU; Takayuki	2018-06-21
Extreme UV light generation apparatus and method Grant 9,949,354 - Saito , et al. April 17, 2	2018-04-17
Droplet Detector And Extreme Ultraviolet Light Generating Apparatus App 20180007771 - SATOU; Kouichi ; et al.	2018-01-04
Target Image-capture Device, Extreme-ultraviolet-light Generation Device, And Extreme-ultraviolet-light Generation System App 20170358442 - HOSODA; Hirokazu ; et al.	2017-12-14
Extreme Ultraviolet Light Generating Apparatus And Method For Generating Extreme Ultraviolet Light App 20170205713 - YABU; Takayuki	2017-07-20
Extreme ultraviolet light generation apparatus Grant 9,686,845 - Suzuki , et al. June 20, 2	2017-06-20
Extreme Ultraviolet Light Generation System And Method Of Generating Extreme Ultraviolet Light App 20170171955 - UENO; Yoshifumi ; et al.	2017-06-15
Extreme ultraviolet light generation apparatus with a gas supply toward a trajectory of a target Grant 9,661,730 - Ueda , et al. May 23, 2	2017-05-23
Laser unit and extreme ultraviolet light generating system Grant 9,647,406 - Suganuma , et al. May 9, 2	2017-05-09
Extreme Ultraviolet Light Generation Apparatus App 20170079126 - SUZUKI; Toru ; et al.	2017-03-16
Extreme Uv Light Generator App 20170064799 - YABU; Takayuki ; et al.	2017-03-02
Laser Unit And Extreme Ultraviolet Light Generating System App 20160285222 - SUGANUMA; Takashi ; et al.	2016-09-29
Extreme ultraviolet light generating system Grant 9,439,276 - Yabu , et al. September 6, 2	2016-09-06
Extreme Ultraviolet Light Generation Apparatus App 20160255707 - UEDA; Atsushi ; et al.	2016-09-01
Target supply device and target supply method Grant 9,310,686 - Yabu , et al. April 12, 2	2016-04-12
Extreme Ultraviolet Light Generating System App 20160066401 - YABU; Takayuki ; et al.	2016-03-03
Extreme Uv Light Generation Apparatus App 20160037616 - SAITO; Takashi ; et al.	2016-02-04
Target supply apparatus and target supply method Grant 9,097,434 - Yabu , et al. August 4, 2	2015-08-04
Control method for target supply device, and target supply device Grant 8,841,639 - Yabu , et al. September 23, 2	2014-09-23
Target supply unit and extreme ultraviolet light generation apparatus Grant 8,809,819 - Yabu , et al. August 19, 2	2014-08-19
Target supply device Grant 8,779,402 - Yabu , et al. July 15, 2	2014-07-15
Target supply unit Grant 8,779,401 - Mizoguchi , et al. July 15, 2	2014-07-15
Target output device and extreme ultraviolet light source apparatus Grant 8,710,472 - Ishihara , et al. April 29, 2	2014-04-29
Extreme ultraviolet light generation apparatus Grant 8,698,112 - Yabu , et al. April 15, 2	2014-04-15
Extreme Ultraviolet Light Generation System App 20140098830 - YABU; Takayuki ; et al.	2014-04-10
Control Method For Target Supply Device, And Target Supply Device App 20140070021 - YABU; Takayuki ; et al.	2014-03-13
Target Supply Device And Target Supply Method App 20140034759 - YABU; Takayuki ; et al.	2014-02-06
Extreme ultraviolet light source device Grant 8,610,095 - Yabu , et al. December 17, 2	2013-12-17
Target supply apparatus Grant 8,604,451 - Yabu , et al. December 10, 2	2013-12-10
Chamber Apparatus And Method Of Maintaining Target Supply Unit App 20130277452 - YABU; Takayuki ; et al.	2013-10-24
Target Supply Apparatus And Target Supply Method App 20130209077 - YABU; Takayuki ; et al.	2013-08-15
Target Supply Device App 20130206863 - YABU; Takayuki ; et al.	2013-08-15
Chamber apparatus and method of maintaining target supply unit Grant 8,497,489 - Yabu , et al. July 30, 2	2013-07-30
Extreme Ultraviolet Light Generation Apparatus, Target Collection Device, And Target Collection Method App 20130134326 - Yabu; Takayuki ; et al.	2013-05-30
Extreme ultraviolet light source apparatus Grant 8,450,706 - Abe , et al. May 28, 2	2013-05-28
Target Supply Unit And Extreme Ultraviolet Light Generation Apparatus App 20130075625 - YABU; Takayuki ; et al.	2013-03-28
Target Supply Unit App 20130048878 - MIZOGUCHI; Hakaru ; et al.	2013-02-28
Target Supply Unit, Mechanism For Cleaning Nozzle Thereof, And Method For Cleaning The Nozzle App 20130032640 - YABU; Takayuki ; et al.	2013-02-07
Target supply unit of extreme ultraviolet light source apparatus and method of manufacturing the same Grant 8,343,429 - Yabu , et al. January 1, 2	2013-01-01
Target Supply Unit Of Extreme Ultraviolet Light Source Apparatus And Method Of Manufacturing The Same App 20120311969 - Yabu; Takayuki ; et al.	2012-12-13
Extreme ultraviolet light source apparatus Grant 8,294,129 - Moriya , et al. October 23, 2	2012-10-23
Target Supply Unit And Extreme Ultraviolet Light Generation Apparatus App 20120241650 - YABU; Takayuki ; et al.	2012-09-27
Extreme Ultraviolet Light Generation Apparatus App 20120217422 - YABU; Takayuki ; et al.	2012-08-30
Target Supply Device And Extreme Ultraviolet Light Generation Apparatus App 20120205559 - Yabu; Takayuki ; et al.	2012-08-16
Extreme ultraviolet light source apparatus Grant 8,173,984 - Moriya , et al. May 8, 2	2012-05-08
Chamber Apparatus And Method Of Controlling Movement Of Droplet In The Chamber Apparatus App 20120085922 - YABU; Takayuki ; et al.	2012-04-12
Chamber Apparatus And Method Of Maintaining Target Supply Unit App 20110310365 - YABU; Takayuki ; et al.	2011-12-22
Target Output Device And Extreme Ultraviolet Light Source Apparatus App 20110284774 - ISHIHARA; Takanobu ; et al.	2011-11-24
Extreme Ultraviolet Light Source Apparatus App 20110180734 - MORIYA; Masato ; et al.	2011-07-28
Extreme ultra violet light source apparatus Grant 7,923,705 - Moriya , et al. April 12, 2	2011-04-12
Narrow-spectrum laser device Grant 7,903,700 - Nagai , et al. March 8, 2	2011-03-08
Target Supply Apparatus App 20100213272 - YABU; Takayuki ; et al.	2010-08-26
Extreme Ultraviolet Light Source Device App 20100200776 - Yabu; Takayuki ; et al.	2010-08-12
Extreme ultra violet light source apparatus App 20100176310 - Moriya; Masato ; et al.	2010-07-15
Extreme ultraviolet light source apparatus App 20100171049 - Moriya; Masato ; et al.	2010-07-08
Target Supply Unit Of Extreme Ultraviolet Light Source Apparatus And Method Of Manufacturing The Same App 20100143202 - YABU; Takayuki ; et al.	2010-06-10
Extreme ultra violet light source apparatus Grant 7,732,794 - Abe , et al. June 8, 2	2010-06-08
Extreme ultra violet light source apparatus Grant 7,683,355 - Moriya , et al. March 23, 2	2010-03-23
Exreme ultraviolet light source apparatus App 20090272919 - Abe; Tamotsu ; et al.	2009-11-05
Narrow-Spectrum Laser Device App 20080285602 - Nagai; Shinji ; et al.	2008-11-20
Extreme ultra violet light source apparatus App 20080197298 - Abe; Tamotsu ; et al.	2008-08-21
Extreme ultra violet light source apparatus App 20080073598 - Moriya; Masato ; et al.	2008-03-27
Gas laser electrode, laser chamber employing the electrode, and gas laser device Grant 7,006,546 - Hori , et al. February 28, 2	2006-02-28
Discharge electrode and discharge electrode manufacturing method Grant 6,810,061 - Hori , et al. October 26, 2	2004-10-26
Discharge electrodes connecting structure for laser apparatus and laser apparatus therewith Grant 6,771,685 - Yabu , et al. August 3, 2	2004-08-03
Discharge electrode and discharge electrode manufacturing method App 20030042436 - Hori, Tsukasa ; et al.	2003-03-06
Gas laser electrode, laser chamber employing the electrode, and gas laser device App 20010050937 - Hori, Tsukasa ; et al.	2001-12-13

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