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Patent applications and USPTO patent grants for Xuan; Guangchi.The latest application filed is for "cleaning of chamber components with solid carbon dioxide particles".
Patent | Date |
---|---|
Cleaning of chamber components with solid carbon dioxide particles Grant 9,925,639 - Suh , et al. March 27, 2 | 2018-03-27 |
Cleaning Of Chamber Components With Solid Carbon Dioxide Particles App 20160016286 - Suh; Song-Moon ;   et al. | 2016-01-21 |
Zero Shrinkage Smooth Interface Oxy-nitride And Oxy-amorphous-silicon Stacks For 3d Memory Vertical Gate Application App 20130161629 - HAN; XINHAI ;   et al. | 2013-06-27 |
Methods Of Dynamically Controlling Film Microstructure Formed In A Microcrystalline Layer App 20110275200 - Zheng; Yi ;   et al. | 2011-11-10 |
Terahertz Emitter With High Power And Temperature Operation App 20110024650 - KOLODZEY; JAMES ;   et al. | 2011-02-03 |
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