Xu; Cangshan

Patent Applications and Registrations

Patent applications and USPTO patent grants for Xu; Cangshan.The latest application filed is for "single nanoparticle tracking spectroscopic microscope".

Company Profile

0.18.11

Xu; Cangshan - Berkeley CA
Xu; Cangshan - Fremont CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Single nanoparticle tracking spectroscopic microscope Grant 7,982,194 - Yang , et al. July 19, 2	2011-07-19
Single Nanoparticle Tracking Spectroscopic Microscope App 20110057121 - Yang; Haw ; et al.	2011-03-10
Air platen for leading edge and trailing edge control Grant 7,018,276 - de la Llera , et al. March 28, 2	2006-03-28
Neural network control of chemical mechanical planarization Grant 7,001,243 - Yi , et al. February 21, 2	2006-02-21
Apparatus for edge polishing uniformity control Grant 6,991,512 - Taylor , et al. January 31, 2	2006-01-31
Methods for reducing slurry usage in a linear chemical mechanical planarization system Grant 6,953,391 - Majumder , et al. October 11, 2	2005-10-11
Methods for making reinforced wafer polishing pads and apparatuses implementing the same Grant 6,949,020 - Xu , et al. September 27, 2	2005-09-27
Methods for monitoring and controlling chemical mechanical planarization Grant 6,931,330 - Yi , et al. August 16, 2	2005-08-16
End point detection with imaging matching in semiconductor processing Grant 6,930,782 - Yi , et al. August 16, 2	2005-08-16
Application of heated slurry for CMP App 20040266192 - Lee, Gregory C. ; et al.	2004-12-30
Air platen for leading edge and trailing edge control App 20040242136 - de la Llera, Anthony ; et al.	2004-12-02
Molded end point detection window for chemical mechanical planarization Grant 6,806,100 - Xu , et al. October 19, 2	2004-10-19
Fluid conserving platen for optimizing edge polishing Grant 6,790,128 - Taylor , et al. September 14, 2	2004-09-14
Air platen for leading edge and trailing edge control Grant 6,761,626 - de la Llera , et al. July 13, 2	2004-07-13
Apparatus for controlling leading edge and trailing edge polishing Grant 6,729,945 - Xu , et al. May 4, 2	2004-05-04
Platen assembly having a topographically altered platen surface Grant 6,712,679 - Taylor , et al. March 30, 2	2004-03-30
Unsupported chemical mechanical polishing belt Grant 6,656,030 - Xu , et al. December 2, 2	2003-12-02
Methods for making reinforced wafer polishing pads and apparatuses implementing the same App 20030194963 - Xu, Cangshan ; et al.	2003-10-16
Grooved rollers for a linear chemical mechanical planarization system Grant 6,620,035 - Xu September 16, 2	2003-09-16
Grooved Rollers For A Linear Chemical Mechanical Planarization System App 20030139124 - Xu, Cangshan	2003-07-24
Air platen for leading edge and trailing edge control App 20030119433 - Llera, Anthony de la ; et al.	2003-06-26
Methods for making reinforced wafer polishing pads utilizing direct casting and apparatuses implementing the same Grant 6,572,463 - Xu , et al. June 3, 2	2003-06-03
Methods for making reinforced wafer polishing pads and apparatuses implementing the same Grant 6,561,889 - Xu , et al. May 13, 2	2003-05-13
Platen assembly having a topographically altered platen surface App 20030032379 - Taylor, Travis R. ; et al.	2003-02-13
Apparatus for edge polishing uniformity control App 20020151256 - Taylor, Travis Robert ; et al.	2002-10-17
Apparatus for controlling leading edge and trailing edge polishing App 20020146972 - Xu, Cangshan ; et al.	2002-10-10
Windowless Belt And Method For Improved In-situ Wafer Monitoring App 20020090819 - XU, CANGSHAN ; et al.	2002-07-11
Unsupported chemical mechanical polishing belt Grant 6,406,363 - Xu , et al. June 18, 2	2002-06-18
Unsupported chemical mechanical polishing belt App 20020068513 - Xu, Cangshan ; et al.	2002-06-06

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