| Patent | Date |
|---|
Wafer inspection using difference images
Grant 11,270,430 - Sezginer , et al. March 8, 2 | 2022-03-08 |
Block-to-block reticle inspection
Grant 10,539,512 - Sezginer , et al. Ja | 2020-01-21 |
Inspection of photomasks by comparing two photomasks
Grant 10,451,563 - Sousa , et al. Oc | 2019-10-22 |
Wafer Inspection Using Difference Images
App 20180342051 - Sezginer; Abdurrahman ; et al. | 2018-11-29 |
Inspection Of Photomasks By Comparing Two Photomasks
App 20180238816 - Sousa; Weston L. ; et al. | 2018-08-23 |
Monitoring changes in photomask defectivity
Grant 9,892,503 - Guan , et al. February 13, 2 | 2018-02-13 |
Block-to-Block Reticle Inspection
App 20180003647 - Sezginer; Abdurrahman ; et al. | 2018-01-04 |
Integrated multi-pass inspection
Grant 9,778,207 - Sousa , et al. October 3, 2 | 2017-10-03 |
Delta die and delta database inspection
Grant 9,778,205 - Hess , et al. October 3, 2 | 2017-10-03 |
Block-to-block reticle inspection
Grant 9,766,185 - Sezginer , et al. September 19, 2 | 2017-09-19 |
Integrated Multi-pass Inspection
App 20170256043 - Sousa; Weston L. ; et al. | 2017-09-07 |
Enzyme Assays on a Droplet Actuator
App 20170159105 - Eckhardt; Allen E. ; et al. | 2017-06-08 |
Monitoring Changes In Photomask Defectivity
App 20170053395 - Guan; Chun ; et al. | 2017-02-23 |
Enzyme assays on a droplet actuator
Grant 9,574,220 - Eckhardt , et al. February 21, 2 | 2017-02-21 |
Monitoring changes in photomask defectivity
Grant 9,518,935 - Guan , et al. December 13, 2 | 2016-12-13 |
Integrated Multi-Pass Inspection
App 20160093040 - Sousa; Weston L. ; et al. | 2016-03-31 |
Method, System And Computer Program Product For Generating High Density Registration Maps For Masks
App 20150310160 - LASKE; Frank ; et al. | 2015-10-29 |
Delta Die And Delta Database Inspection
App 20150276617 - Hess; Carl E. ; et al. | 2015-10-01 |
Enzyme Assays on a Droplet Actuator
App 20150184219 - Eckhardt; Allen E ; et al. | 2015-07-02 |
Block-to-Block Reticle Inspection
App 20150078650 - Sezginer; Abdurrahman ; et al. | 2015-03-19 |
Monitoring Changes In Photomask Defectivity
App 20150029498 - Guan; Chun ; et al. | 2015-01-29 |
Method and apparatus for inspecting a reflective lithographic mask blank and improving mask quality
Grant 8,785,082 - Xiong , et al. July 22, 2 | 2014-07-22 |
Wafer plane detection of lithographically significant contamination photomask defects
Grant 8,611,637 - Shi , et al. December 17, 2 | 2013-12-17 |
Method And Apparatus For Inspecting A Reflective Lithographic Mask Blank And Improving Mask Quality
App 20120238096 - Xiong; Yalin ; et al. | 2012-09-20 |
Methods and systems for classifying defects detected on a reticle
Grant 8,204,297 - Xiong , et al. June 19, 2 | 2012-06-19 |
Methods for simulating reticle layout data, inspecting reticle layout data, and generating a process for inspecting reticle layout data
Grant 8,151,220 - Hess , et al. April 3, 2 | 2012-04-03 |
Detection of thin line for selective sensitivity during reticle inspection
Grant 8,090,189 - Phalke , et al. January 3, 2 | 2012-01-03 |
Wafer Plane Detection of Lithographically Significant Contamination Photomask Defects
App 20110299758 - Shi; Ruifang ; et al. | 2011-12-08 |
Method for detection of oversized sub-resolution assist features
Grant 7,995,199 - Hess , et al. August 9, 2 | 2011-08-09 |
Photomask inspection and verification by lithography image reconstruction using imaging pupil filters
Grant 7,995,832 - Xiong , et al. August 9, 2 | 2011-08-09 |
Enzymatic Assays Using Umbelliferone Substrates with Cyclodextrins in Droplets of Oil
App 20110118132 - Winger; Theodore ; et al. | 2011-05-19 |
Feature identification for metrological analysis
Grant 7,932,004 - Xiong , et al. April 26, 2 | 2011-04-26 |
Method for detecting lithographically significant defects on reticles
Grant 7,873,204 - Wihl , et al. January 18, 2 | 2011-01-18 |
Methods for detecting and classifying defects on a reticle
Grant 7,738,093 - Alles , et al. June 15, 2 | 2010-06-15 |
Computer-implemented methods for detecting defects in reticle design data
Grant 7,646,906 - Saidin , et al. January 12, 2 | 2010-01-12 |
Method for Detection of Oversized Sub-Resolution Assist Features
App 20090310136 - Hess; Carl E. ; et al. | 2009-12-17 |
Methods For Detecting And Classifying Defects On A Reticle
App 20080304056 - Alles; David ; et al. | 2008-12-11 |
Apparatus and methods for providing selective defect sensitivity
Grant 7,440,093 - Xiong , et al. October 21, 2 | 2008-10-21 |
Photomask Inspection And Verification By Lithography Image Reconstruction Using Imaging Pupil Filters
App 20080170774 - Xiong; Yalin ; et al. | 2008-07-17 |
Method For Detecting Lithographically Significant Defects On Reticles
App 20080170773 - Wihl; Mark J. ; et al. | 2008-07-17 |
Apparatus and methods for providing selective defect sensitivity
Grant 7,271,891 - Xiong , et al. September 18, 2 | 2007-09-18 |
Computer-implemented methods for detecting defects in reticle design data
App 20060236294 - Saidin; Zain K. ; et al. | 2006-10-19 |
Methods for simulating reticle layout data, inspecting reticle layout data, and generating a process for inspecting reticle layout data
App 20060051682 - Hess; Carl ; et al. | 2006-03-09 |
Aligning rectilinear images in 3D through projective registration and calibration
Grant 6,754,379 - Xiong , et al. June 22, 2 | 2004-06-22 |
Aligning rectilinear images in 3D through projective registration and calibration
App 20030179923 - Xiong, Yalin ; et al. | 2003-09-25 |
Aligning rectilinear images in 3D through projective registration and calibration
App 20020114536 - Xiong, Yalin ; et al. | 2002-08-22 |
Aligning rectilinear images in 3D through projective registration and calibration
Grant 6,434,265 - Xiong , et al. August 13, 2 | 2002-08-13 |
Blending arbitrary overlaying images into panoramas
Grant 6,359,617 - Xiong March 19, 2 | 2002-03-19 |
Method and system for creating an image-based virtual reality environment utilizing a fisheye lens
Grant 5,960,108 - Xiong September 28, 1 | 1999-09-28 |
| 