Patent | Date |
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Micro electrical mechanical system (MEMS) valve Grant 11,187,349 - Xin , et al. November 30, 2 | 2021-11-30 |
MEMS optical liquid level sensor Grant 11,161,110 - Fry , et al. November 2, 2 | 2021-11-02 |
Micro electrical mechanical system (MEMS) multiplexing mixing Grant 10,898,871 - Fry , et al. January 26, 2 | 2021-01-26 |
Micro electrical mechanical system (MEMS) valve Grant 10,612,691 - Xin , et al. | 2020-04-07 |
Mems Optical Liquid Level Sensor App 20200061611 - Fry; Jonathan ;   et al. | 2020-02-27 |
Self-cleaning liquid level sensor Grant 10,551,240 - Fry , et al. Fe | 2020-02-04 |
Micro Electrical Mechanical System (mems) Multiplexing Mixing App 20200001257 - Fry; Jonathan ;   et al. | 2020-01-02 |
MEMS optical sensor Grant 10,458,909 - Fry , et al. Oc | 2019-10-29 |
Micro Electrical Mechanical System (mems) Valve App 20190323627 - XIN; YONGCHUN ;   et al. | 2019-10-24 |
Micro electrical mechanical system (MEMS) valve Grant 10,415,721 - Xin , et al. Sept | 2019-09-17 |
Micro Electrical Mechanical System (mems) Valve App 20190219192 - XIN; Yongchun ;   et al. | 2019-07-18 |
Micro Electrical Mechanical System (mems) Valve App 20190219193 - XIN; Yongchun ;   et al. | 2019-07-18 |
Self-cleaning Liquid Level Sensor App 20190162578 - Fry; Jonathan ;   et al. | 2019-05-30 |
LCR test circuit structure for detecting metal gate defect conditions Grant 9,780,007 - Ouyang , et al. October 3, 2 | 2017-10-03 |
Semiconductor wafer probing system including pressure sensing and control unit Grant 9,702,930 - Edwards , et al. July 11, 2 | 2017-07-11 |
Method for manufacturing in a semiconductor device a low resistance via without a bottom liner Grant 9,559,051 - Xin , et al. January 31, 2 | 2017-01-31 |
Voltage contrast characterization structures and methods for within chip process variation characterization Grant 9,519,210 - Patterson , et al. December 13, 2 | 2016-12-13 |
Pressure Sensing And Control For Semiconductor Wafer Probing App 20160216321 - Edwards; Robert D. ;   et al. | 2016-07-28 |
Pressure sensing and control for semiconductor wafer probing Grant 9,354,252 - Edwards , et al. May 31, 2 | 2016-05-31 |
Voltage Contrast Characterization Structures And Methods For Within Chip Process Variation Characterization App 20160148849 - Patterson; Oliver D. ;   et al. | 2016-05-26 |
Pressure Sensing And Control For Semiconductor Wafer Probing App 20150145544 - Edwards; Robert D. ;   et al. | 2015-05-28 |
Pressure sensing and control for semiconductor wafer probing Grant 8,963,567 - Edwards , et al. February 24, 2 | 2015-02-24 |
Random coded integrated circuit structures and methods of making random coded integrated circuit structures Grant 8,803,328 - Song , et al. August 12, 2 | 2014-08-12 |
Random Coded Integrated Circuit Structures And Methods Of Making Random Coded Integrated Circuit Structures App 20140203448 - Song; Yunsheng ;   et al. | 2014-07-24 |
Noncontact electrical testing with optical techniques Grant 8,742,782 - Ouyang , et al. June 3, 2 | 2014-06-03 |
Wafer alignment system with optical coherence tomography Grant 8,489,225 - Xin , et al. July 16, 2 | 2013-07-16 |
Lcr Test Circuit Structure For Detecting Metal Gate Defect Conditions App 20130169308 - Ouyang; Xu ;   et al. | 2013-07-04 |
Pressure Sensing And Control For Semiconductor Wafer Probing App 20130106455 - Edwards; Robert D. ;   et al. | 2013-05-02 |
Noncontact Electrical Testing With Optical Techniques App 20130027051 - Ouyang; Xu ;   et al. | 2013-01-31 |
Wafer Alignment System With Optical Coherence Tomography App 20120232686 - Xin; Yongchun ;   et al. | 2012-09-13 |