Xie; Xiangjin

Patent Applications and Registrations

Patent applications and USPTO patent grants for Xie; Xiangjin.The latest application filed is for "coil for improved process chamber deposition and etch uniformity".

Company Profile

5.8.13

Xie; Xiangjin - Fremont CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Coil For Improved Process Chamber Deposition And Etch Uniformity App 20220293392 - Li; Rui ; et al.	2022-09-15
Methods and apparatus for aluminum oxide surface recovery Grant 11,443,936 - Leal Cervantes , et al. September 13, 2	2022-09-13
Impurity removal in doped ALD tantalum nitride Grant 11,410,881 - Li , et al. August 9, 2	2022-08-09
Methods and apparatus for processing a substrate Grant 11,315,771 - Xie , et al. April 26, 2	2022-04-26
Methods and apparatus for filling a feature disposed in a substrate Grant 11,289,329 - Li , et al. March 29, 2	2022-03-29
Methods And Apparatus For Intermixing Layer For Enhanced Metal Reflow App 20220084882 - ZHONG; Lanlan ; et al.	2022-03-17
Methods And Apparatus For Processing A Substrate App 20220020578 - XIE; Xiangjin ; et al.	2022-01-20
Methods and apparatus for semi-dynamic bottom up reflow Grant 11,222,816 - Zhong , et al. January 11, 2	2022-01-11
Impurity Removal in Doped ALD Tantalum Nitride App 20210407853 - Li; Rui ; et al.	2021-12-30
Methods And Apparatus For Aluminum Oxide Surface Recovery App 20210398798 - LEAL CERVANTES; Carmen ; et al.	2021-12-23
Methods And Apparatus For Semi-dynamic Bottom Up Reflow App 20210391214 - ZHONG; Lanlan ; et al.	2021-12-16
Methods And Apparatus For Precleaning And Treating Wafer Surfaces App 20210371972 - XIE; Xiangjin ; et al.	2021-12-02
Methods for In-Situ Chamber Monitoring App 20210164093 - Xie; Xiangjin ; et al.	2021-06-03
Method Of Depositing Layers App 20210118729 - PETHE; Shirish ; et al.	2021-04-22
Methods And Apparatus For Filling A Feature Disposed In A Substrate App 20200350159 - LI; Rui ; et al.	2020-11-05
Methods and apparatus for dynamically treating atomic layer deposition films in physical vapor deposition chambers Grant 10,563,304 - Xie , et al. Feb	2020-02-18
Treatment And Doping Of Barrier Layers App 20190385908 - Xie; Xiangjin ; et al.	2019-12-19
Methods for pre-cleaning conductive materials on a substrate Grant 10,283,345 - Xie , et al.	2019-05-07
Barrier Film Deposition And Treatment App 20180294162 - XIE; XIANGJIN ; et al.	2018-10-11
Methods For Pre-cleaning Conductive Materials On A Substrate App 20170098540 - XIE; Xiangjin ; et al.	2017-04-06
Methods for pre-cleaning conductive interconnect structures Grant 9,460,959 - Xie , et al. October 4, 2	2016-10-04

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