| Patent | Date |
|---|
Monoalkoxysilanes And Dense Organosilica Films Made Therefrom
App 20220301862 - XIAO; MANCHAO ; et al. | 2022-09-22 |
Compositions Comprising Silacycloalkanes And Methods Using Same For Deposition Of Silicon-containing Film
App 20220267642 - VRTIS; RAYMOND N. ; et al. | 2022-08-25 |
Organosilicon Precursors For Deposition Of Silicon-containing Films
App 20220234903 - PEARLSTEIN; RONALD M. ; et al. | 2022-07-28 |
Precursors and Flowable CVD Methods for Making Low-K Films to Fill Surface Features
App 20220157601 - Li; Jianheng ; et al. | 2022-05-19 |
Organoamino-functionalized Cyclic Oligosiloxanes For Deposition Of Silicon-containing Films
App 20220081453 - MACDONALD; MATTHEW R. ; et al. | 2022-03-17 |
Precursors and flowable CVD methods for making low-k films to fill surface features
Grant 11,270,880 - Li , et al. March 8, 2 | 2022-03-08 |
Compositions And Processes For Depositing Carbon-doped Silicon-containing Films
App 20220041870 - XIAO; MANCHAO ; et al. | 2022-02-10 |
Functionalized Cyclosilazanes As Precursors For High Growth Rate Silicon-containing Films
App 20220044929 - XIAO; MANCHAO ; et al. | 2022-02-10 |
Organoaminosilane Precursors And Methods For Depositing Films Comprising Same
App 20210407793 - O'NEILL; MARK LEONARD ; et al. | 2021-12-30 |
Functionalized cyclosilazanes as precursors for high growth rate silicon-containing films
Grant 11,177,127 - Xiao , et al. November 16, 2 | 2021-11-16 |
Bisaminoalkoxysilane compounds and methods for using same to deposit silicon-containing films
Grant 11,142,658 - Spence , et al. October 12, 2 | 2021-10-12 |
Organoaminosilane precursors and methods for depositing films comprising same
Grant 11,139,162 - O'Neill , et al. October 5, 2 | 2021-10-05 |
Organoamino-functionalized cyclic oligosiloxanes for deposition of silicon-containing films
Grant 11,098,069 - MacDonald , et al. August 24, 2 | 2021-08-24 |
Silyl substituted organoamines as precursors for high growth rate silicon-containing films
Grant 11,049,714 - MacDonald , et al. June 29, 2 | 2021-06-29 |
Silacycloalkane compounds and methods for depositing silicon containing films using same
Grant 11,043,374 - Xiao , et al. June 22, 2 | 2021-06-22 |
Compositions and methods for depositing silicon nitride films
Grant 11,035,039 - Lei , et al. June 15, 2 | 2021-06-15 |
Precursors and flowable CVD methods for making low-K films to fill surface features
Grant 11,017,998 - Li , et al. May 25, 2 | 2021-05-25 |
Compositions And Methods Using Same For Deposition Of Silicon-containing Film
App 20210140040 - LI; JIANHENG ; et al. | 2021-05-13 |
High temperature atomic layer deposition of silicon oxide thin films
Grant 10,991,571 - Chandra , et al. April 27, 2 | 2021-04-27 |
Precursors and Flowable CVD Methods for Making Low-K Films to Fill Surface Features
App 20210043446 - Li; Jianheng ; et al. | 2021-02-11 |
Alkoxysilylamine compounds and applications thereof
Grant 10,899,500 - Xiao , et al. January 26, 2 | 2021-01-26 |
Organoamino-Functionalized Linear And Cyclic Oligosiloxanes For Deposition Of Silicon-Containing Films
App 20210017339 - Xiao; Manchao ; et al. | 2021-01-21 |
Organoamino-functionalized linear and cyclic oligosiloxanes for deposition of silicon-containing films
Grant 10,822,458 - Xiao , et al. November 3, 2 | 2020-11-03 |
Compositions And Methods For The Deposition Of Silicon Oxide Films
App 20200308416 - Lei; Xinjian ; et al. | 2020-10-01 |
Compositions And Methods For Depositing Silicon-containing Films
App 20200270749 - Li; Ming ; et al. | 2020-08-27 |
Compositions And Methods Using Same for Silicon Containing Films
App 20200247830 - Kind Code | 2020-08-06 |
Compositions and methods for the deposition of silicon oxide films
Grant 10,703,915 - Lei , et al. | 2020-07-07 |
Silacycloalkane Compounds And Methods For Depositing Silicon Containing Films Using Same
App 20200075323 - Xiao; Manchao ; et al. | 2020-03-05 |
Stable Alkenyl Or Alkynyl-Containing Organosilicon Precursor Compositions
App 20200062787 - Ridgeway; Robert G. ; et al. | 2020-02-27 |
Precursors And Flowable CVD Methods For Making Low-K Films To Fill Surface Features
App 20200058496 - Li; Jianheng ; et al. | 2020-02-20 |
Silicon Compounds And Methods For Depositing Films Using Same
App 20200048286 - Xiao; Manchao ; et al. | 2020-02-13 |
Organoaminosilane Precursors And Methods For Depositing Films Comprising Same
App 20200051811 - O'Neill; Mark Leonard ; et al. | 2020-02-13 |
Compositions and Methods for the Deposition of Silicon Oxide Films
App 20200040192 - Lei; Xinjian ; et al. | 2020-02-06 |
Bisaminoalkoxysilane Compounds And Methods For Using Same To Deposit Silicon-Containing Films
App 20190359637 - Spence; Daniel P. ; et al. | 2019-11-28 |
Precursors and flowable CVD methods for making low-K films to fill surface features
Grant 10,468,244 - Li , et al. No | 2019-11-05 |
Carbon bridged aminosilane compounds for high growth rate silicon-containing films
Grant 10,464,953 - Wang , et al. No | 2019-11-05 |
Organoaminosilane precursors and methods for depositing films comprising same
Grant 10,460,929 - O'Neill , et al. Oc | 2019-10-29 |
Organoaminosilane precursors and methods for depositing films comprising same
Grant 10,453,675 - O'Neill , et al. Oc | 2019-10-22 |
Compositions And Methods Using Same For Deposition Of Silicon-containing Film
App 20190292658 - Li; Jianheng ; et al. | 2019-09-26 |
Silicon-based films and methods of forming the same
Grant 10,422,034 - Lei , et al. Sept | 2019-09-24 |
Bisaminoalkoxysilane compounds and methods for using same to deposit silicon-containing films
Grant 10,421,766 - Spence , et al. Sept | 2019-09-24 |
Compositions and Processes for Depositing Carbon-Doped Silicon-Containing Films
App 20190287798 - Xiao; Manchao ; et al. | 2019-09-19 |
Compositions and Methods Using Same for Deposition of Silicon-Containing Films
App 20190271075 - Lei; Xinjian ; et al. | 2019-09-05 |
Organoamino-Functionalized Cyclic Oligosiloxanes for Deposition of Silicon-Containing Films
App 20190233446 - MacDonald; Matthew R. ; et al. | 2019-08-01 |
Alkoxysilylamine Compounds and Applications Thereof
App 20190225377 - Xiao; Manchao ; et al. | 2019-07-25 |
High Temperature Atomic Layer Deposition of Silicon Oxide Thin Films
App 20190189431 - Chandra; Haripin ; et al. | 2019-06-20 |
Compositions and processes for depositing carbon-doped silicon-containing films
Grant 10,319,584 - Xiao , et al. | 2019-06-11 |
Barrier materials for display devices
Grant 10,319,862 - Ridgeway , et al. | 2019-06-11 |
Compositions and methods using same for deposition of silicon-containing films
Grant 10,316,407 - Lei , et al. | 2019-06-11 |
Organoaminosilanes and methods for making same
Grant 10,294,250 - Xiao , et al. | 2019-05-21 |
Methods for depositing films with organoaminodisilane precursors
Grant 10,283,350 - Xiao , et al. | 2019-05-07 |
Alkoxysilylamine compounds and applications thereof
Grant 10,279,959 - Xiao , et al. | 2019-05-07 |
High temperature atomic layer deposition of silicon oxide thin films
Grant 10,242,864 - Chandra , et al. | 2019-03-26 |
Compositions And Methods For Depositing Silicon Nitride Films
App 20190085451 - Lei; Xinjian ; et al. | 2019-03-21 |
Silyl Substituted Organoamines as Precursors for High Growth Rate Silicon-Containing Films
App 20190088474 - MacDonald; Matthew R. ; et al. | 2019-03-21 |
Compositions And Methods Using Same For Deposition Of Silicon-containing Film
App 20190055645 - Li; Jianheng ; et al. | 2019-02-21 |
Compositions and Methods Using Same for Deposition of Silicon-Containing Film
App 20190017167 - Vrtis; Raymond Nicholas ; et al. | 2019-01-17 |
Compositions and methods using same for carbon doped silicon containing films
Grant 10,145,008 - Chandra , et al. De | 2018-12-04 |
Functionalized Cyclosilazanes as Precursors For High Growth Rate Silicon-Containing Films
App 20180342390 - Xiao; Manchao ; et al. | 2018-11-29 |
Precursors and Flowable CVD Methods for Making Low-K Films to Fill Surface Features
App 20180315598 - Li; Jianheng ; et al. | 2018-11-01 |
Methods for Depositing Films with Organoaminodisilane Precursors
App 20180294152 - Xiao; Manchao ; et al. | 2018-10-11 |
Organoaminodisilane precursors and methods for depositing films comprising same
Grant 10,077,364 - Mayorga , et al. September 18, 2 | 2018-09-18 |
Organoamino-Functionalized Linear And Cyclic Oligosiloxanes For Deposition Of Silicon-Containing Films
App 20180223047 - Xiao; Manchao ; et al. | 2018-08-09 |
Organoamino-Polysiloxanes For Deposition Of Silicon-Containing Films
App 20180223428 - Lei; Xinjian ; et al. | 2018-08-09 |
Methods for depositing films with organoaminodisilane precursors
Grant 9,997,350 - Xiao , et al. June 12, 2 | 2018-06-12 |
Organoaminodisilane precursors and methods for depositing films comprising same
Grant 9,978,585 - Xiao , et al. May 22, 2 | 2018-05-22 |
Compositions and Methods for the Deposition of Silicon Oxide Films
App 20180127592 - Lei; Xinjian ; et al. | 2018-05-10 |
Silicon-Based Films and Methods of Forming the Same
App 20180119276 - Lei; Xinjian ; et al. | 2018-05-03 |
Precursors and Flowable CVD Methods for Making Low-K Films to Fill Surface Features Features
App 20180122631 - XIAO; Manchao ; et al. | 2018-05-03 |
Carbon Bridged Aminosilane Compounds for High Growth Rate Silicon-Containing Films
App 20180105541 - Wang; Meiliang ; et al. | 2018-04-19 |
Precursors and Flowable CVD Methods for Making Low-K Films to Fill Surface Features
App 20180061636 - Li; Jianheng ; et al. | 2018-03-01 |
Silicon-based films and methods of forming the same
Grant 9,879,340 - Lei , et al. January 30, 2 | 2018-01-30 |
Compositions And Methods Using Same For Carbon Doped Silicon Containing Films
App 20180023192 - Chandra; Haripin ; et al. | 2018-01-25 |
Compositions And Methods Using Same For Deposition Of Silicon-containing Films
App 20170338109 - LEI; Xinjian ; et al. | 2017-11-23 |
Catalyst and formulations comprising same for alkoxysilanes hydrolysis reaction in semiconductor process
Grant 9,809,711 - Xiao , et al. November 7, 2 | 2017-11-07 |
AZA-polysilane precursors and methods for depositing films comprising same
Grant 9,796,739 - Xiao , et al. October 24, 2 | 2017-10-24 |
Organoaminosilanes and methods for making same
Grant 9,758,534 - Xiao , et al. September 12, 2 | 2017-09-12 |
High Temperature Atomic Layer Deposition Of Silicon Oxide Thin Films
App 20170256399 - Chandra; Haripin ; et al. | 2017-09-07 |
Organoaminosilane Precursors and Methods for Depositing Films Comprising Same
App 20170207084 - O'Neill; Mark Leonard ; et al. | 2017-07-20 |
Organoaminosilanes and Methods for Making Same
App 20170204120 - Xiao; Manchao ; et al. | 2017-07-20 |
Methods for Depositing Films with Organoaminodisilane Precursors
App 20170186605 - Xiao; Manchao ; et al. | 2017-06-29 |
Organoaminodisilane Precursors and Methods for Depositing Films Comprising Same
App 20170183502 - Mayorga; Steven Gerard ; et al. | 2017-06-29 |
Alkoxyaminosilane compounds and applications thereof
Grant 9,677,178 - Spence , et al. June 13, 2 | 2017-06-13 |
Precursors for CVD silicon carbo-nitride films
Grant 9,640,386 - Xiao , et al. May 2, 2 | 2017-05-02 |
Organoaminodisilane precursors and methods for depositing films comprising same
Grant 9,627,193 - Mayorga , et al. April 18, 2 | 2017-04-18 |
Methods for depositing films with organoaminodisilane precursors
Grant 9,613,799 - Xiao , et al. April 4, 2 | 2017-04-04 |
High Temperature Atomic Layer Deposition Of Silicon Oxide Thin Films
App 20160365244 - Chandra; Haripin ; et al. | 2016-12-15 |
Compositions and Processes for Depositing Carbon-Doped Silicon-Containing Films
App 20160351389 - Xiao; Manchao ; et al. | 2016-12-01 |
Methods to prepare silicon-containing films
Grant 9,502,234 - Xiao , et al. November 22, 2 | 2016-11-22 |
High temperature atomic layer deposition of silicon oxide thin films
Grant 9,460,912 - Chandra , et al. October 4, 2 | 2016-10-04 |
Compositions and processes for depositing carbon-doped silicon-containing films
Grant 9,447,287 - Xiao , et al. September 20, 2 | 2016-09-20 |
Bisaminoalkoxysilane Compounds And Methods For Using Same To Deposit Silicon-containing Films
App 20160237100 - Spence; Daniel P. ; et al. | 2016-08-18 |
Methods For Depositing Films With Organoaminodisilane Precursors
App 20160203975 - Xiao; Manchao ; et al. | 2016-07-14 |
Organoaminosilanes And Methods For Making Same
App 20160168169 - Xiao; Manchao ; et al. | 2016-06-16 |
Methods for depositing films with organoaminodisilane precursors
Grant 9,337,018 - Xiao , et al. May 10, 2 | 2016-05-10 |
Silicon-based Films And Methods Of Forming The Same
App 20160122869 - Lei; Xinjian ; et al. | 2016-05-05 |
Alkoxyaminosilane Compounds And Applications Thereof
App 20160083847 - Spence; Daniel P. ; et al. | 2016-03-24 |
Organoaminosilanes and methods for making same
Grant 9,233,990 - Xiao , et al. January 12, 2 | 2016-01-12 |
Method of making a multicomponent film
Grant 9,214,630 - Xiao , et al. December 15, 2 | 2015-12-15 |
Alkoxyaminosilane compounds and applications thereof
Grant 9,200,167 - Spence , et al. December 1, 2 | 2015-12-01 |
Compositions And Methods For The Deposition Of Silicon Oxide Films
App 20150275355 - Mallikarjunan; Anupama ; et al. | 2015-10-01 |
Methods to Prepare Silicon-Containing Films
App 20150249007 - Xiao; Manchao ; et al. | 2015-09-03 |
Organoaminosilanes And Methods For Making Same
App 20150246937 - Xiao; Manchao ; et al. | 2015-09-03 |
Aza-polysilane Precursors And Methods For Depositing Films Comprising Same
App 20150147871 - Xiao; Manchao ; et al. | 2015-05-28 |
Precursors for CVD Silicon Carbo-Nitride Films
App 20150147893 - Xiao; Manchao ; et al. | 2015-05-28 |
Precursors For GST Films In ALD/CVD Processes
App 20150140790 - Xiao; Manchao ; et al. | 2015-05-21 |
Organoaminosilane precursors and methods for making and using same
Grant 9,005,719 - Xiao , et al. April 14, 2 | 2015-04-14 |
Halogenated organoaminosilane precursors and methods for depositing films comprising same
Grant 8,993,072 - Xiao , et al. March 31, 2 | 2015-03-31 |
Organoaminosilane Precursors And Methods For Depositing Films Comprising Same
App 20150087139 - O'Neill; Mark Leonard ; et al. | 2015-03-26 |
Process for producing silicon and oxide films from organoaminosilane precursors
Grant 8,940,648 - Xiao , et al. January 27, 2 | 2015-01-27 |
Barrier Materials For Display Devices
App 20150021599 - Ridgeway; Robert Gordon ; et al. | 2015-01-22 |
Organoaminodisilane Precursors and Methods for Depositing Films Comprising Same
App 20150024608 - Mayorga; Steven Gerard ; et al. | 2015-01-22 |
Methods for depositing silicon carbo-nitride film
Grant 8,932,675 - Xiao , et al. January 13, 2 | 2015-01-13 |
Organoaminosilane precursors and methods for depositing films comprising same
Grant 8,912,353 - Xiao , et al. December 16, 2 | 2014-12-16 |
Low temperature deposition of silicon-containing films
Grant 8,906,455 - Yang , et al. December 9, 2 | 2014-12-09 |
Dielectric barrier deposition using nitrogen containing precursor
Grant 8,889,235 - Mallikarjunan , et al. November 18, 2 | 2014-11-18 |
Method Of Making A Multicomponent Film
App 20140308802 - Xiao; Manchao ; et al. | 2014-10-16 |
Compositions And Processes For Depositing Carbon-doped Silicon-containing Films
App 20140287164 - Xiao; Manchao ; et al. | 2014-09-25 |
Organoaminosilane Precursors And Methods For Making And Using Same
App 20140272194 - Xiao; Manchao ; et al. | 2014-09-18 |
Plasma enhanced cyclic chemical vapor deposition of silicon-containing films
Grant 8,828,505 - Thridandam , et al. September 9, 2 | 2014-09-09 |
Organoaminosilane precursors and methods for making and using same
Grant 8,771,807 - Xiao , et al. July 8, 2 | 2014-07-08 |
Dielectric Films Comprising Silicon And Methods For Making Same
App 20140183706 - Yang; Liu ; et al. | 2014-07-03 |
Binary and ternary metal chalcogenide materials and method of making and using same
Grant 8,765,223 - Xiao , et al. July 1, 2 | 2014-07-01 |
Alkoxysilylamine Compounds And Applications Thereof
App 20140158580 - Xiao; Manchao ; et al. | 2014-06-12 |
Dielectric films comprising silicon and methods for making same
Grant 8,703,624 - Yang , et al. April 22, 2 | 2014-04-22 |
Methods to prepare silicon-containing films
Grant 8,703,625 - Yang , et al. April 22, 2 | 2014-04-22 |
Amino Vinylsilane Precursors for Stressed SiN Films
App 20140065844 - Vorsa; Vasil ; et al. | 2014-03-06 |
Non-oxygen Containing Silicon-based Films And Methods Of Forming The Same
App 20140030448 - Bowen; Heather Regina ; et al. | 2014-01-30 |
Method of Making a Multicomponent Film
App 20140024173 - Xiao; Manchao ; et al. | 2014-01-23 |
Process for Producing Silicon and Oxide Films from Organoaminosilane Precursors
App 20130330937 - Xiao; Manchao ; et al. | 2013-12-12 |
Organoaminodisilane Precursors And Methods For Depositing Films Comprising Same
App 20130319290 - Xiao; Manchao ; et al. | 2013-12-05 |
Organoaminodisilane Precursors And Methods For Depositing Films Comprising Same
App 20130323435 - Xiao; Manchao ; et al. | 2013-12-05 |
Cylinder surface treated container for monochlorosilane
Grant 8,590,705 - Behm , et al. November 26, 2 | 2013-11-26 |
Amino vinylsilane precursors for stressed SiN films
Grant 8,580,993 - Vorsa , et al. November 12, 2 | 2013-11-12 |
High Temperature Atomic Layer Deposition Of Silicon Oxide Thin Films
App 20130295779 - Chandra; Haripin ; et al. | 2013-11-07 |
Method of making a multicomponent film
Grant 8,563,353 - Xiao , et al. October 22, 2 | 2013-10-22 |
Precursors for CVD Silicon Carbo-Nitride Films
App 20130244448 - Xiao; Manchao ; et al. | 2013-09-19 |
Catalyst Synthesis For Organosilane Sol-gel Reactions
App 20130243968 - Xiao; Manchao ; et al. | 2013-09-19 |
Process for producing silicon and oxide films from organoaminosilane precursors
Grant 8,530,361 - Xiao , et al. September 10, 2 | 2013-09-10 |
Precursors for GST Films in ALD/CVD Processes
App 20130210217 - Xiao; Manchao ; et al. | 2013-08-15 |
Binary and ternary metal chalcogenide materials and method of making and using same
Grant 8,507,040 - Xiao , et al. August 13, 2 | 2013-08-13 |
Alkoxyaminosilane Compounds And Applications Thereof
App 20130196082 - Spence; Daniel P. ; et al. | 2013-08-01 |
Low Temperature Deposition of Silicon-Containing Films
App 20130189853 - Yang; Liu ; et al. | 2013-07-25 |
Catalyst And Formulations Comprising Same For Alkoxysilanes Hydrolysis Reaction In Semiconductor Process
App 20130180215 - Xiao; Manchao ; et al. | 2013-07-18 |
Methods for depositing silicon dioxide or silicon oxide films using aminovinylsilanes
Grant 8,460,753 - Xiao , et al. June 11, 2 | 2013-06-11 |
Organoaminosilane Precursors And Methods For Making And Using Same
App 20130129940 - Xiao; Manchao ; et al. | 2013-05-23 |
Tellurium (Te) Precursors for Making Phase Change Memory Materials
App 20130129603 - Xiao; Manchao ; et al. | 2013-05-23 |
Halogenated Organoaminosilane Precursors And Methods For Depositing Films Comprising Same
App 20130078392 - Xiao; Manchao ; et al. | 2013-03-28 |
Precursors for CVD silicon carbo-nitride films
Grant 8,383,849 - Xiao , et al. February 26, 2 | 2013-02-26 |
Tellurium (Te) precursors for making phase change memory materials
Grant 8,377,341 - Xiao , et al. February 19, 2 | 2013-02-19 |
Antimony precursors for GST films in ALD/CVD processes
Grant 8,318,252 - Xiao November 27, 2 | 2012-11-27 |
Low temperature deposition of silicon-containing films
Grant 8,298,628 - Yang , et al. October 30, 2 | 2012-10-30 |
Porogens, porogenated precursors and methods for using the same to provide porous organosilica glass films with low dielectric constants
Grant 8,293,001 - Vrtis , et al. October 23, 2 | 2012-10-23 |
Method of Making a Multicomponent Film
App 20120220076 - Xiao; Manchao ; et al. | 2012-08-30 |
Plasma Enhanced Cyclic Chemical Vapor Deposition of Silicon- Containing Films
App 20120171874 - Thridandam; Hareesh ; et al. | 2012-07-05 |
Binary and Ternary Metal Chalcogenide Materials and Method of Making and Using Same
App 20120171378 - Xiao; Manchao ; et al. | 2012-07-05 |
Aminovinylsilane for CVD and ALD SiO2 Films
App 20120148745 - Xiao; Manchao ; et al. | 2012-06-14 |
Method of making a multicomponent film
Grant 8,193,027 - Xiao , et al. June 5, 2 | 2012-06-05 |
Organoaminosilane Precursors and Methods for Depositing Films Comprising Same
App 20120128897 - Xiao; Manchao ; et al. | 2012-05-24 |
Cylinder Surface Treatment For Monochlorosilane
App 20120103857 - Behm; Philip E. ; et al. | 2012-05-03 |
Precursors for depositing silicon-containing films and methods for making and using same
Grant 8,129,555 - Cheng , et al. March 6, 2 | 2012-03-06 |
Method of Making a Multicomponent Film
App 20120034767 - Xiao; Manchao ; et al. | 2012-02-09 |
Process for Producing Silicon and Oxide Films from Organoaminosilane Precursors
App 20110262642 - Xiao; Manchao ; et al. | 2011-10-27 |
Methods to Prepare Silicon-Containing Films
App 20110215445 - Yang; Liu ; et al. | 2011-09-08 |
Aminosilanes for shallow trench isolation films
Grant 7,999,355 - Weigel , et al. August 16, 2 | 2011-08-16 |
Precursors for CVD Silicon Carbo-Nitride Films
App 20110165346 - Xiao; Manchao ; et al. | 2011-07-07 |
Porogens, Porogenated Precursors and Methods for Using the Same to Provide Porous Organosilica Glass Films With Low Dielectric Constants
App 20110143032 - Vrtis; Raymond Nicholas ; et al. | 2011-06-16 |
Tellurium precursors for GST films in an ALD or CVD process
Grant 7,960,205 - Xiao , et al. June 14, 2 | 2011-06-14 |
Porogens, porogenated precursors and methods for using the same to provide porous organosilica glass films with low dielectric constants
Grant 7,943,195 - Vrtis , et al. May 17, 2 | 2011-05-17 |
Precursors for CVD silicon carbo-nitride films
Grant 7,932,413 - Xiao , et al. April 26, 2 | 2011-04-26 |
Process for producing silicon oxide films for organoaminosilane precursors
Grant 7,875,312 - Thridandam , et al. January 25, 2 | 2011-01-25 |
Precursors for CVD silicon carbo-nitride and silicon nitride films
Grant 7,875,556 - Xiao , et al. January 25, 2 | 2011-01-25 |
Low Temperature Deposition of Silicon-Containing Films
App 20100304047 - Yang; Liu ; et al. | 2010-12-02 |
Dielectric Barrier Deposition Using Nitrogen Containing Precursor
App 20100291321 - Mallikarjunan; Anupama ; et al. | 2010-11-18 |
Dielectric Films Comprising Silicon And Methods For Making Same
App 20100233886 - Yang; Liu ; et al. | 2010-09-16 |
Amino Vinylsilane Precursors for Stressed SiN Films
App 20100120262 - Vorsa; Vasil ; et al. | 2010-05-13 |
Cyclic chemical vapor deposition of metal-silicon containing films
Grant 7,678,422 - Lei , et al. March 16, 2 | 2010-03-16 |
Precursors for Depositing Silicon-containing Films and Methods for Making and Using Same
App 20100041243 - Cheng; Hansong ; et al. | 2010-02-18 |
Aminosilanes for Shallow Trench Isolation Films
App 20100009546 - Weigel; Scott Jeffrey ; et al. | 2010-01-14 |
Binary and Ternary Metal Chalcogenide Materials and Method of Making and Using Same
App 20090280052 - Xiao; Manchao ; et al. | 2009-11-12 |
Antimony Precursors for GST Films in ALD/CVD Processes
App 20090191330 - Xiao; Manchao | 2009-07-30 |
Tellurium (Te) Precursors for Making Phase Change Memory Materials
App 20090142881 - Xiao; Manchao ; et al. | 2009-06-04 |
Tellurium Precursors for GST Films in an ALD or CVD Process
App 20090137100 - Xiao; Manchao ; et al. | 2009-05-28 |
Precursors for CVD Silicon Carbo-nitride Films
App 20090069588 - Xiao; Manchao ; et al. | 2009-03-12 |
Porogens, Porogenated Precursors and Methods for Using the Same to Provide Porous Organosilica Glass Films with Low Dielectric Constants
App 20080271640 - Vrtis; Raymond Nicholas ; et al. | 2008-11-06 |
Plasma Enhanced Cyclic Chemical Vapor Deposition of Silicon-Containing Films
App 20080207007 - Thridandam; Hareesh ; et al. | 2008-08-28 |
Cyclic Chemical Vapor Deposition of Metal-Silicon Containing Films
App 20080145535 - Lei; Xinjian ; et al. | 2008-06-19 |
Porogens, porogenated precursors and methods for using the same to provide porous organosilica glass films with low dielectric constants
Grant 7,384,471 - Vrtis , et al. June 10, 2 | 2008-06-10 |
Organosilane Compounds For Modifying Dielectrical Properties Of Silicon Oxide And Silicon Nitride Films
App 20080124946 - XIAO; MANCHAO ; et al. | 2008-05-29 |
Stabilizers To Inhibit The Polymerization of Substituted Cyclotetrasiloxane
App 20080042105 - Mayorga; Steven Gerard ; et al. | 2008-02-21 |
Process for producing silicon oxide films from organoaminosilane precursors
App 20070275166 - Thridandam; Hareesh ; et al. | 2007-11-29 |
Stabilizers to inhibit the polymerization of substituted cyclotetrasiloxane
Grant 7,300,995 - Mayorga , et al. November 27, 2 | 2007-11-27 |
Precursors for depositing silicon containing films
Grant 7,288,145 - Xiao , et al. October 30, 2 | 2007-10-30 |
Precursors for depositing silicon containing films
App 20070004931 - Xiao; Manchao ; et al. | 2007-01-04 |
Precursors for CVD silicon carbo-nitride films
App 20060258173 - Xiao; Manchao ; et al. | 2006-11-16 |
Stabilizers to inhibit the polymerization of substituted cyclotetrasiloxane
App 20060252904 - Mayorga; Steven Gerard ; et al. | 2006-11-09 |
Precursors for depositing silicon containing films and processes thereof
Grant 7,122,222 - Xiao , et al. October 17, 2 | 2006-10-17 |
Stabilizers to inhibit the polymerization of substituted cyclotetrasiloxane
Grant 7,101,948 - Mayorga , et al. September 5, 2 | 2006-09-05 |
Organometallic complexes and their use as precursors to deposit metal films
Grant 7,064,224 - Lei , et al. June 20, 2 | 2006-06-20 |
Stabilizers to inhibit the polymerization of substituted cyclotetrasiloxane
Grant 6,858,697 - Mayorga , et al. February 22, 2 | 2005-02-22 |
Methods for using porogens and/or porogenated precursors to provide porous organosilica glass films with low dielectric constants
Grant 6,846,515 - Vrtis , et al. January 25, 2 | 2005-01-25 |
Precursors for depositing silicon containing films and processes thereof
App 20040146644 - Xiao, Manchao ; et al. | 2004-07-29 |
Stabilizers to inhibit the polymerization of substituted cyclotetrasiloxane
App 20040054114 - Mayorga, Steven Gerard ; et al. | 2004-03-18 |
Porogens, porogenated precursors and methods for using the same to provide porous organosilica glass films with low dielectric constants
App 20030232137 - Vrtis, Raymond Nicholas ; et al. | 2003-12-18 |
Porogens, porogenated precursors and methods for using the same to provide porous organosilica glass films with low dielectric constants
App 20030198742 - Vrtis, Raymond Nicholas ; et al. | 2003-10-23 |
Stabilizers to inhibit the polymerization of substituted cyclotetrasiloxane
App 20030149213 - Mayorga, Steven Gerard ; et al. | 2003-08-07 |
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