Xia; Annie
Patent Applications and Registrations
Patent applications and USPTO patent grants for Xia; Annie.The latest application filed is for "apparatus and method for conditioning an immersion fluid".
- Xia; Annie - Lynnfield MA
| Patent | Date |
|---|---|
| Apparatus and method for conditioning an immersion fluid App 20090316119 - Parekh; Bipin S. ; et al. | 2009-12-24 |
| Method and system for forming a feature in a high-k layer Grant 7,361,608 - Ko , et al. April 22, 2 | 2008-04-22 |
| Method and system for etching a film stack Grant 7,172,969 - Xia , et al. February 6, 2 | 2007-02-06 |
| Method and system for forming a feature in a high-k layer App 20060065938 - Ko; Akiteru ; et al. | 2006-03-30 |
| Method and system for etching a gate stack App 20060049139 - Xia; Annie ; et al. | 2006-03-09 |
| Method and system for etching a film stack App 20060051964 - Xia; Annie ; et al. | 2006-03-09 |
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