Wurmbrand; Andreas
Patent Applications and Registrations
Patent applications and USPTO patent grants for Wurmbrand; Andreas.The latest application filed is for "mirror module, in particular for a microlithographic projection exposure appararatus".
Company Profile
0.28.25
- Wurmbrand; Andreas - Aalen DE
- Wurmbrand; Andreas - Aalen-Reichenbach DE
- Wurmbrand; Andreas - Aalen-Reichnbach DE
Patent Activity
| Patent | Date |
|---|---|
| Mirror module, in particular for a microlithographic projection exposure appararatus Grant 9,996,015 - Prochnau , et al. June 12, 2 | 2018-06-12 |
| Mirror Module, In Particular For A Microlithographic Projection Exposure Appararatus App 20170153552 - Prochnau; Jens ; et al. | 2017-06-01 |
| Optical arrangement in a projection exposure apparatus for EUV lithography Grant 9,298,111 - Kulitzki , et al. March 29, 2 | 2016-03-29 |
| Replacement Apparatus For An Optical Element App 20160041475 - Kugler; Jens ; et al. | 2016-02-11 |
| Lithographic apparatus and device manufacturing method Grant 9,182,679 - Hoogendam , et al. November 10, 2 | 2015-11-10 |
| Replacement apparatus for an optical element Grant 9,081,296 - Kugler , et al. July 14, 2 | 2015-07-14 |
| Holding Device for an Optical Element in an Objective App 20150138520 - Gellrich; Bernhard ; et al. | 2015-05-21 |
| Replacement Apparatus For An Optical Element App 20150070789 - Kugler; Jens ; et al. | 2015-03-12 |
| Lithographic Apparatus And Device Manufacturing Method App 20150015858 - HOOGENDAM; Christiaan Alexander ; et al. | 2015-01-15 |
| Replacement apparatus for an optical element Grant 8,902,519 - Kugler , et al. December 2, 2 | 2014-12-02 |
| Lithographic apparatus and device manufacturing method Grant 8,860,922 - Hoogendam , et al. October 14, 2 | 2014-10-14 |
| Holding device for an optical element in an objective Grant 8,854,602 - Gellrich , et al. October 7, 2 | 2014-10-07 |
| Lithographic apparatus and device manufacturing method Grant 8,810,771 - Hoogendam , et al. August 19, 2 | 2014-08-19 |
| Device For The Low-deformation Replaceable Mounting Of An Optical Element App 20140063628 - Sorg; Franz ; et al. | 2014-03-06 |
| Device for the low-deformation replaceable mounting of an optical element Grant 8,582,081 - Sorg , et al. November 12, 2 | 2013-11-12 |
| Replacement Apparatus For An Optical Element App 20130279029 - Kugler; Jens ; et al. | 2013-10-24 |
| Replacement apparatus for an optical element Grant 8,488,261 - Kugler , et al. July 16, 2 | 2013-07-16 |
| Projection objective of a microlithographic projection exposure apparatus Grant 8,339,576 - Loering , et al. December 25, 2 | 2012-12-25 |
| Projection Objective Of A Microlithographic Projection Exposure Apparatus App 20120281196 - Loering; Ulrich ; et al. | 2012-11-08 |
| Optical Arrangement In A Projection Exposure Apparatus For Euv Lithography App 20120188523 - Kulitsky; Viktor ; et al. | 2012-07-26 |
| Lithographic Apparatus And Device Manufacturing Method App 20120120377 - HOOGENDAM; Christiaan Alexander ; et al. | 2012-05-17 |
| Lithographic Apparatus And Device Manufacturing Method App 20120086926 - Hoogendam; Christiaan Alexander ; et al. | 2012-04-12 |
| Lithographic apparatus and device manufacturing method Grant 8,102,502 - Hoogendam , et al. January 24, 2 | 2012-01-24 |
| Replacement Apparatus For An Optical Element App 20110255181 - Kugler; Jens ; et al. | 2011-10-20 |
| Replacement apparatus for an optical element Grant 7,995,296 - Kugler , et al. August 9, 2 | 2011-08-09 |
| Replacement Apparatus For An Optical Element App 20100271716 - Kugler; Jens ; et al. | 2010-10-28 |
| Replacement apparatus for an optical element Grant 7,768,723 - Kugler , et al. August 3, 2 | 2010-08-03 |
| Immersion lithography objective Grant 7,649,702 - Gellrich , et al. January 19, 2 | 2010-01-19 |
| Lithographic Apparatus And Device Manufacturing Method App 20090197211 - HOOGENDAM; Christiaan Alexander ; et al. | 2009-08-06 |
| Microlithographic projection exposure apparatus Grant 7,570,343 - Dodoc , et al. August 4, 2 | 2009-08-04 |
| Replacement Apparatus for an Optical Element App 20090168207 - Kugler; Jens ; et al. | 2009-07-02 |
| Device For The Low-deformation Replaceable Mounting Of An Optical Element App 20090122288 - Sorg; Franz ; et al. | 2009-05-14 |
| Lithographic apparatus and device manufacturing method Grant 7,532,304 - Hoogendam , et al. May 12, 2 | 2009-05-12 |
| Replacement apparatus for an optical element Grant 7,515,363 - Kugler , et al. April 7, 2 | 2009-04-07 |
| Device for the low-deformation replaceable mounting of an optical element Grant 7,471,469 - Sorg , et al. December 30, 2 | 2008-12-30 |
| Immersion Lithography Objective App 20080212211 - Gellrich; Bernhard ; et al. | 2008-09-04 |
| Lithographic apparatus and device manufacturing method App 20080204679 - Hoogendam; Christiaan Alexander ; et al. | 2008-08-28 |
| Lithographic apparatus and device manufacturing method Grant 7,352,433 - Hoogendam , et al. April 1, 2 | 2008-04-01 |
| Holding Device for an Optical Element in an Objective App 20080002170 - Gellrich; Bernhard ; et al. | 2008-01-03 |
| Replacement apparatus for an optical element App 20070297074 - Kugler; Jens ; et al. | 2007-12-27 |
| Replacement apparatus for an optical element Grant 7,265,917 - Kugler , et al. September 4, 2 | 2007-09-04 |
| Microlithographic projection exposure apparatus App 20060187430 - Dodoc; Aurelian ; et al. | 2006-08-24 |
| Low-deformation support device of an optical element Grant 7,085,080 - Schaffer , et al. August 1, 2 | 2006-08-01 |
| Device for the low-deformation replaceable mounting of an optical element App 20060158749 - Sorg; Franz ; et al. | 2006-07-20 |
| Replacement apparatus for an optical element App 20050134972 - Kugler, Jens ; et al. | 2005-06-23 |
| Lithographic apparatus and device manufacturing method App 20050128445 - Hoogendam, Christiaan Alexander ; et al. | 2005-06-16 |
| Low-deformation support device of an optical element App 20050128607 - Schaffer, Dirk ; et al. | 2005-06-16 |
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