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Wu; Tung-Li Patent Filings

Wu; Tung-Li

Patent Applications and Registrations

Patent applications and USPTO patent grants for Wu; Tung-Li.The latest application filed is for "lithography apparatus having dual reticle edge masking assemblies and method of use".

Company Profile
0.6.6
  • Wu; Tung-Li - Hsinchu TW
  • WU; Tung-Li - Hsinchu City TW
  • Wu; Tung-Li - Shih-Chao Village TW
  • Wu; Tung-Li - Jiaosi Township TW
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
Lithography apparatus having dual reticle edge masking assemblies and method of use
Grant 9,709,904 - Wu , et al. July 18, 2
2017-07-18
In-line inspection and clean for immersion lithography
Grant 9,658,536 - Wu , et al. May 23, 2
2017-05-23
Lithography Apparatus Having Dual Reticle Edge Masking Assemblies And Method Of Use
App 20150293462 - WU; Tung-Li ;   et al.
2015-10-15
In-line Inspection And Clean For Immersion Lithography
App 20150241789 - WU; Tung-Li ;   et al.
2015-08-27
Lithography apparatus having dual reticle edge masking assemblies and method of use
Grant 9,081,297 - Wu , et al. July 14, 2
2015-07-14
Lithography Apparatus Having Dual Reticle Edge Masking Assemblies And Method Of Use
App 20130293857 - WU; Tung-Li ;   et al.
2013-11-07
Method and apparatus for reducing down time of a lithography system
Grant 8,237,132 - Peng , et al. August 7, 2
2012-08-07
Method And Apparatus For Reducing Down Time Of A Lithography System
App 20100321660 - Peng; Jui-Chun ;   et al.
2010-12-23
Air supply systems and pressure adjustment devices for use therewith
Grant 7,285,147 - Kuo , et al. October 23, 2
2007-10-23
Air supply systems and pressure adjustment devices for use therewith
App 20060117722 - Kuo; Po-Sung ;   et al.
2006-06-08

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