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Metal shielding layer in backside illumination image sensor chips and methods for forming the same Grant 10,276,621 - Chang , et al. | 2019-04-30 |
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Metal Shielding Layer in Backside Illumination Image Sensor Chips and Methods for Forming the Same App 20170213861 - Chang; Shih-Chieh ;   et al. | 2017-07-27 |
Image sensor isolation region and method of forming the same Grant 9,673,244 - JangJian , et al. June 6, 2 | 2017-06-06 |
Metal shielding layer in backside illumination image sensor chips and methods for forming the same Grant 9,620,555 - Chang , et al. April 11, 2 | 2017-04-11 |
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Metal Shielding Layer in Backside Illumination Image Sensor Chips and Methods for Forming the Same App 20160118434 - Chang; Shih-Chieh ;   et al. | 2016-04-28 |
Grids in Backside Illumination Image Sensor Chips and Methods for Forming the Same App 20160111458 - JangJian; Shiu-Ko ;   et al. | 2016-04-21 |
Metal shielding layer in backside illumination image sensor chips and methods for forming the same Grant 9,224,773 - Chang , et al. December 29, 2 | 2015-12-29 |
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In-Situ Formation of Silicon and Tantalum Containing Barrier App 20150115450 - JangJian; Shiu-Ko ;   et al. | 2015-04-30 |
In-situ formation of silicon and tantalum containing barrier Grant 8,946,083 - JangJian , et al. February 3, 2 | 2015-02-03 |
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Image Sensor Isolation Region and Method of Forming the Same App 20130280849 - JangJian; Shiu-Ko ;   et al. | 2013-10-24 |
Oxidation-Free Copper Metallization Process Using In-situ Baking App 20130273735 - Wang; Yu-Sheng ;   et al. | 2013-10-17 |
Image Sensor Isolation Region and Method of Forming the Same App 20130234202 - JangJian; Shiu-Ko ;   et al. | 2013-09-12 |
Grids in Backside Illumination Image Sensor Chips and Methods for Forming the Same App 20130207213 - JangJian; Shiu-Ko ;   et al. | 2013-08-15 |
Image Sensor And Method Of Manufacturing App 20130181258 - JangJian; Shiu-Ko ;   et al. | 2013-07-18 |
Oxidation-free copper metallization process using in-situ baking Grant 8,470,390 - Wang , et al. June 25, 2 | 2013-06-25 |
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Robust fluorine containing Silica Glass (FSG) Film with less free fluorine App 20060017166 - Leu; Po-Hsiung ;   et al. | 2006-01-26 |
Chamber leakage detection by measurement of reflectivity of oxidized thin film Grant 6,985,222 - Cheng , et al. January 10, 2 | 2006-01-10 |
Carbon and halogen doped silicate glass dielectric layer and method for fabricating the same Grant 6,979,656 - Jangjian , et al. December 27, 2 | 2005-12-27 |
Carbon and halogen doped silicate glass dielectric layer and method for fabricating the same App 20050121751 - Jangjian, Shiu-Ko ;   et al. | 2005-06-09 |
Novel method to increase fluorine stability to improve gap fill ability and reduce k value of fluorine silicate glass (FSG) film App 20050009367 - Cheng, Yi-Lung ;   et al. | 2005-01-13 |
Method to solve IMD-FSG particle and increase Cp yield by using a new tougher UFUN season film Grant 6,815,007 - Yoo , et al. November 9, 2 | 2004-11-09 |
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Semiconductor chamber process apparatus and method Grant 6,802,935 - Cheng , et al. October 12, 2 | 2004-10-12 |
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Bypass gas feed system and method to improve reactant gas flow and film deposition App 20040118342 - Cheng, Yi-Lung ;   et al. | 2004-06-24 |
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Semiconductor chamber process apparatus and method App 20030178141 - Cheng, Yi-Lung ;   et al. | 2003-09-25 |
Method for removing residual fluorine in HDP-CVD chamber Grant 6,602,560 - Cheng , et al. August 5, 2 | 2003-08-05 |
Semiconductor Wafer Cleaning Method To Remove Residual Contamination Including Metal Nitride Particles App 20030084919 - Tai, Yali ;   et al. | 2003-05-08 |
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